<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>20957</id>
    <completedYear/>
    <publishedYear>2014</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>021513</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>32</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2018-01-12</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties</title>
    <parentTitle language="eng">Journal of Vacuum Science &amp; Technology A</parentTitle>
    <identifier type="doi">10.1116/1.4865917</identifier>
    <identifier type="issn">1520-8559</identifier>
    <enrichment key="BTU">nicht an der BTU erstellt / not created at BTU</enrichment>
    <author>
      <firstName>Kirsten</firstName>
      <lastName>Bobzin</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Nazlim</firstName>
      <lastName>Bagcivan</lastName>
    </author>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Theiß</lastName>
    </author>
    <author>
      <firstName>Jan</firstName>
      <lastName>Trieschmann</lastName>
    </author>
    <author>
      <firstName>Ricardo Henrique</firstName>
      <lastName>Brugnara</lastName>
    </author>
    <author>
      <firstName>Sven</firstName>
      <lastName>Preissing</lastName>
    </author>
    <author>
      <firstName>Ante</firstName>
      <lastName>Hecimovic</lastName>
    </author>
    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
  </doc>
</export-example>
