<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>13729</id>
    <completedYear/>
    <publishedYear>2014</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>patent</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation>Fraunhofer IPMS</contributingCorporation>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2015-02-03</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Elektrostatisch auslenkbares mikromechanisches Bauelement</title>
    <enrichment key="Patentnr">DE 10 2014 225 934.7</enrichment>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <collection role="old_institute" number="01052">LS Mikro- und Nanosysteme</collection>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>15878</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>10078</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>6</issue>
    <volume/>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2016-04-25</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A small-gap electrostatic micro-actuator for large deflections</title>
    <parentTitle language="eng">Nature Communications</parentTitle>
    <identifier type="doi">10.1038/ncomms10078</identifier>
    <identifier type="issn">2041-1723</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Miriam</firstName>
      <lastName>Lenz</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>18781</id>
    <completedYear/>
    <publishedYear>2016</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1533</pageFirst>
    <pageLast>1536</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>168</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2017-02-21</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A novel electrostatic actuator class</title>
    <parentTitle language="eng">Procedia Engineering</parentTitle>
    <identifier type="doi">10.1016/j.proeng.2016.11.454</identifier>
    <identifier type="issn">1877-7058</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Uhlig</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>18782</id>
    <completedYear/>
    <publishedYear>2016</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>Tu 3.11-1</pageFirst>
    <pageLast>Tu 3.11-2</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>IEEE</publisherName>
    <publisherPlace>Piscataway, NJ</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2017-02-21</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A novel electrostatic micro-actuator class and its application potential for optical MEMS</title>
    <parentTitle language="eng">2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings</parentTitle>
    <identifier type="doi">10.1109/OMN.2016.7565867</identifier>
    <identifier type="isbn">978-1-5090-1036-3</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Uhlig</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>21009</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>175</pageFirst>
    <pageLast>178</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>IEEE</publisherName>
    <publisherPlace>Piscataway, NJ</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2018-01-16</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Electrostatic bending actuators with liquid filled nanometer scale gap</title>
    <parentTitle language="eng">MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017</parentTitle>
    <identifier type="isbn">978-1-5090-5078-9</identifier>
    <identifier type="url">http://ieeexplore.ieee.org/document/7863369/</identifier>
    <identifier type="isbn">978-1-5090-5079-6</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Uhlig</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>S.</firstName>
      <lastName>Arscott</lastName>
    </author>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>21011</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace>Bellingham, Washington, USA</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2018-01-16</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A contribution to the expansion of the applicability of electrostatic forces in micro transducers</title>
    <parentTitle language="eng">MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States</parentTitle>
    <identifier type="doi">10.1117/12.2249575</identifier>
    <identifier type="isbn">978-1-5106-0674-6</identifier>
    <identifier type="isbn">978-1-5106-0673-9</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="UBICOseries">Proceedings of SPIE ; 10116</enrichment>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Uhlig</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>20963</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>5697</pageFirst>
    <pageLast>5708</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>23</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2018-01-12</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive</title>
    <parentTitle language="eng">Microsystem Technologies</parentTitle>
    <identifier type="doi">10.1007/s00542-017-3360-6</identifier>
    <identifier type="issn">1432-1858</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Uhlig</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>23058</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>219</pageFirst>
    <pageLast>222</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace>Berlin [u.a.]</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-01-09</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators</title>
    <parentTitle language="deu">MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017</parentTitle>
    <identifier type="isbn">978-3-8007-4491-6</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>24842</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>366</pageFirst>
    <pageLast>369</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject_ref</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-12-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen</title>
    <abstract language="deu">In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive – NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollständig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei über einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerstörungsfreie optische Methoden präsentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren ermöglicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann.</abstract>
    <parentTitle language="deu">MikroSystemTechnik-Kongress, Berlin, Germany, 2019</parentTitle>
    <identifier type="url">https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Andreas</firstName>
      <lastName>Mrosk</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Lutz</firstName>
      <lastName>Ehrig</lastName>
    </author>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Matthieu</firstName>
      <lastName>Gaudet</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>24845</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>54</pageFirst>
    <pageLast>57</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject_ref</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-12-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren</title>
    <abstract language="eng">Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.</abstract>
    <parentTitle language="deu">MikroSystemTechnik-Kongress, Berlin, Germany, 2019</parentTitle>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Barbara</firstName>
      <lastName>Spitz</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Franziska</firstName>
      <lastName>Wall</lastName>
    </author>
    <author>
      <firstName>Hermann</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Anton</firstName>
      <lastName>Melnikov</lastName>
    </author>
    <author>
      <firstName>Lutz</firstName>
      <lastName>Ehrig</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Wolfram</firstName>
      <lastName>Pufe</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>24900</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber>11</pageNumber>
    <edition/>
    <issue>5</issue>
    <volume/>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-12-19</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers</title>
    <abstract language="eng">MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches.</abstract>
    <parentTitle language="eng">Microsystems and Nanoengineering</parentTitle>
    <identifier type="doi">10.1038/s41378-019-0095-9</identifier>
    <identifier type="issn">2055-7434</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="Artikelnummer">43</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Lutz</firstName>
      <lastName>Ehrig</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Hermann</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Klaus</firstName>
      <lastName>Schimmanz</lastName>
    </author>
    <author>
      <firstName>David</firstName>
      <lastName>Schuffenhauer</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
  <doc>
    <id>27476</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject_noref</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2021-05-17</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Acoustic validation of electrostatic all-silicon MEMS-speakers</title>
    <parentTitle language="eng">AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019</parentTitle>
    <identifier type="doi">10.17743/aesconf.2019.978-1-942220-29-9</identifier>
    <identifier type="url">https://www.aes.org/e-lib/browse.cfm?elib=20522</identifier>
    <enrichment key="BTU">nicht an der BTU erstellt / not created at BTU</enrichment>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="Artikelnummer">Paper 10</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Lutz</firstName>
      <lastName>Ehrig</lastName>
    </author>
    <submitter>
      <firstName>Ramona</firstName>
      <lastName>Reichold</lastName>
    </submitter>
    <author>
      <firstName>Bert</firstName>
      <lastName>Kaiser</lastName>
    </author>
    <author>
      <firstName>Hermann</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Stolz</lastName>
    </author>
    <author>
      <firstName>Sergiu</firstName>
      <lastName>Langa</lastName>
    </author>
    <author>
      <firstName>Holger</firstName>
      <lastName>Conrad</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Andreas</firstName>
      <lastName>Männchen</lastName>
    </author>
    <author>
      <firstName>Tobias</firstName>
      <lastName>Brocks</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
</export-example>
