<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>5033</id>
    <completedYear/>
    <publishedYear>2010</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>9</pageFirst>
    <pageLast>23</pageLast>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>33</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2011-02-11</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">ALD on high mobility channels: engineering the proper gate stack passivation</title>
    <parentTitle language="eng">ECS Transactions</parentTitle>
    <identifier type="issn">1938-5862</identifier>
    <enrichment key="UBICOIdent">005862</enrichment>
    <author>
      <firstName>Sonja</firstName>
      <lastName>Sioncke</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Hang-Chu</firstName>
      <lastName>Lin</lastName>
    </author>
    <author>
      <firstName>Guy</firstName>
      <lastName>Brammertz</lastName>
    </author>
    <author>
      <firstName>Annelies</firstName>
      <lastName>Delabie</lastName>
    </author>
    <author>
      <firstName>Thierry</firstName>
      <lastName>Conard</lastName>
    </author>
    <author>
      <firstName>Alexis</firstName>
      <lastName>Franquet</lastName>
    </author>
    <author>
      <firstName>Matty</firstName>
      <lastName>Caymax</lastName>
    </author>
    <author>
      <firstName>Marc</firstName>
      <lastName>Meuris</lastName>
    </author>
    <author>
      <firstName>Dieter</firstName>
      <lastName>Schmeißer</lastName>
    </author>
    <author>
      <firstName>Massimo</firstName>
      <lastName>Tallarida</lastName>
    </author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ALD</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>engineering</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>gate stack</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>passivation</value>
    </subject>
    <collection role="old_institute" number="01005">LS Angewandte Physik / Sensorik</collection>
    <collection role="institutes" number="1503">FG Angewandte Physik und Halbleiterspektroskopie</collection>
  </doc>
</export-example>
