<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>21933</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber>14</pageNumber>
    <edition/>
    <issue>5</issue>
    <volume>27</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2018-06-04</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma</title>
    <parentTitle language="eng">Plasma Sources Science and Technology</parentTitle>
    <identifier type="doi">10.1088/1361-6595/aac23e</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="Artikelnummer">ID 054003</enrichment>
    <author>
      <firstName>Jan</firstName>
      <lastName>Trieschmann</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Stefan</firstName>
      <lastName>Ries</lastName>
    </author>
    <author>
      <firstName>Nikita</firstName>
      <lastName>Bibinov</lastName>
    </author>
    <author>
      <firstName>Peter</firstName>
      <lastName>Awakowicz</lastName>
    </author>
    <author>
      <firstName>Stanislav</firstName>
      <lastName>Mráz</lastName>
    </author>
    <author>
      <firstName>Jochen M.</firstName>
      <lastName>Schneider</lastName>
    </author>
    <author>
      <firstName>Thomas</firstName>
      <lastName>Mussenbrock</lastName>
    </author>
    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
  </doc>
</export-example>
