<?xml version="1.0" encoding="utf-8"?>
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  <doc>
    <id>23136</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>573</pageFirst>
    <pageLast>583</pageLast>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>16</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-01-16</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD</title>
    <parentTitle language="eng">Journal of Coatings Technology and Research</parentTitle>
    <identifier type="doi">10.1007/s11998-018-0138-4</identifier>
    <identifier type="issn">1547-0091</identifier>
    <identifier type="issn">1935-3804</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Dennis</firstName>
      <lastName>Kirchheim</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Stefan</firstName>
      <lastName>Wilski</lastName>
    </author>
    <author>
      <firstName>Montgomery</firstName>
      <lastName>Jaritz</lastName>
    </author>
    <author>
      <firstName>Felix</firstName>
      <lastName>Mitschker</lastName>
    </author>
    <author>
      <firstName>Moritz</firstName>
      <lastName>Oberberg</lastName>
    </author>
    <author>
      <firstName>Jan</firstName>
      <lastName>Trieschmann</lastName>
    </author>
    <author>
      <firstName>Lars</firstName>
      <lastName>Banko</lastName>
    </author>
    <author>
      <firstName>Markus</firstName>
      <lastName>Brochhagen</lastName>
    </author>
    <author>
      <firstName>Rabea</firstName>
      <lastName>Schreckenberg</lastName>
    </author>
    <author>
      <firstName>Christian</firstName>
      <lastName>Hopmann</lastName>
    </author>
    <author>
      <firstName>Marc</firstName>
      <lastName>Böke</lastName>
    </author>
    <author>
      <firstName>Jan</firstName>
      <lastName>Benedikt</lastName>
    </author>
    <author>
      <firstName>Teresa de los</firstName>
      <lastName>Arcos</lastName>
    </author>
    <author>
      <firstName>Guido</firstName>
      <lastName>Grundmeier</lastName>
    </author>
    <author>
      <firstName>Dario</firstName>
      <lastName>Grochla</lastName>
    </author>
    <author>
      <firstName>Alfred</firstName>
      <lastName>Ludwig</lastName>
    </author>
    <author>
      <firstName>Thomas</firstName>
      <lastName>Mussenbrock</lastName>
    </author>
    <author>
      <firstName>Ralf Peter</firstName>
      <lastName>Brinkmann</lastName>
    </author>
    <author>
      <firstName>Peter</firstName>
      <lastName>Awakowicz</lastName>
    </author>
    <author>
      <firstName>Rainer</firstName>
      <lastName>Dahlmann</lastName>
    </author>
    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
  </doc>
</export-example>
