<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>15718</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>055003</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>5</issue>
    <volume>30</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2016-04-21</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Ternary and Quaternary Ni(Si)GeSn Contact Formation for highly strained Ge p- and n-MOSFETs</title>
    <parentTitle language="eng">Semiconductor Science and Technology</parentTitle>
    <identifier type="doi">10.1088/0268-1242/30/5/055003</identifier>
    <identifier type="issn">0268-1242</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>S.</firstName>
      <lastName>Wirths</lastName>
    </author>
    <submitter>
      <firstName>Marion</firstName>
      <lastName>Tülling</lastName>
    </submitter>
    <author>
      <firstName>R.</firstName>
      <lastName>Troitsch</lastName>
    </author>
    <author>
      <firstName>G.</firstName>
      <lastName>Mussler</lastName>
    </author>
    <author>
      <firstName>T.</firstName>
      <lastName>Stoica</lastName>
    </author>
    <author>
      <firstName>J.-M.</firstName>
      <lastName>Hartmann</lastName>
    </author>
    <author>
      <firstName>Peter</firstName>
      <lastName>Zaumseil</lastName>
    </author>
    <author>
      <firstName>Thomas</firstName>
      <lastName>Schroeder</lastName>
    </author>
    <author>
      <firstName>Siegfried</firstName>
      <lastName>Mantl</lastName>
    </author>
    <author>
      <firstName>Dan</firstName>
      <lastName>Buca</lastName>
    </author>
    <collection role="institutes" number="1521">FG Halbleitermaterialien</collection>
  </doc>
</export-example>
