<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>23730</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber>12</pageNumber>
    <edition/>
    <issue>3</issue>
    <volume>28</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-03-11</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations</title>
    <parentTitle language="eng">Plasma Sources Science and Technology</parentTitle>
    <identifier type="doi">10.1088/1361-6595/ab0246</identifier>
    <identifier type="issn">1361-6595</identifier>
    <identifier type="issn">0963-0252</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="Artikelnummer">035002</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Florian</firstName>
      <lastName>Krüger</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Tobias</firstName>
      <lastName>Gergs</lastName>
    </author>
    <author>
      <firstName>Jan</firstName>
      <lastName>Trieschmann</lastName>
    </author>
    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
  </doc>
  <doc>
    <id>24540</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber>13</pageNumber>
    <edition/>
    <issue>7</issue>
    <volume>28</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-10-23</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches</title>
    <parentTitle language="eng">Plasma Sources Science and Technology</parentTitle>
    <identifier type="doi">10.1088/1361-6595/ab2c72</identifier>
    <identifier type="issn">963-0252</identifier>
    <identifier type="issn">1361-6595</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="Artikelnummer">075017</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">false</enrichment>
    <author>
      <firstName>Florian</firstName>
      <lastName>Krüger</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Sebastian</firstName>
      <lastName>Wilczek</lastName>
    </author>
    <author>
      <firstName>Thomas</firstName>
      <lastName>Mussenbrock</lastName>
    </author>
    <author>
      <firstName>Julian</firstName>
      <lastName>Schulze</lastName>
    </author>
    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
  </doc>
</export-example>
