<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>6424</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>82</pageFirst>
    <pageLast>84</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>IEEE</publisherName>
    <publisherPlace>Piscataway, NJ</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2011-11-22</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements</title>
    <parentTitle language="eng">2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM 2011), Dresden, Germany, 8 - 12 May 2011</parentTitle>
    <identifier type="doi">10.1109/IITC.2011.5940322</identifier>
    <identifier type="isbn">978-1-4577-0503-8</identifier>
    <enrichment key="UBICOIdent">007586</enrichment>
    <author>
      <firstName>Lukas</firstName>
      <lastName>Gehrlich</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Susanne</firstName>
      <lastName>Ohsiek</lastName>
    </author>
    <author>
      <firstName>C.</firstName>
      <lastName>Klein</lastName>
    </author>
    <author>
      <firstName>M.</firstName>
      <lastName>Geiß</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Friedemann</lastName>
    </author>
    <author>
      <firstName>Peter</firstName>
      <lastName>Kücher</lastName>
    </author>
    <author>
      <firstName>Dieter</firstName>
      <lastName>Schmeißer</lastName>
    </author>
    <collection role="old_institute" number="01005">LS Angewandte Physik / Sensorik</collection>
    <collection role="institutes" number="1503">FG Angewandte Physik und Halbleiterspektroskopie</collection>
  </doc>
</export-example>
