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  <doc>
    <id>7293</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>9314</pageFirst>
    <pageLast>9320</pageLast>
    <pageNumber/>
    <edition/>
    <issue>24</issue>
    <volume>83</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Chemical vapor detection using a capacitive micromachined ultrasonic transducer</title>
    <parentTitle language="eng">Analytical chemistry</parentTitle>
    <identifier type="doi">10.1021/ac201626b</identifier>
    <identifier type="issn">1520-6882</identifier>
    <enrichment key="UBICOIdent">008555</enrichment>
    <author>
      <firstName>Hyunjoo J.</firstName>
      <lastName>Lee</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Kwan Kyu</firstName>
      <lastName>Park</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Ömer</firstName>
      <lastName>Oralkan</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>7294</id>
    <completedYear/>
    <publishedYear>2012</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>79</pageFirst>
    <pageLast>84</pageLast>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>159</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon</title>
    <parentTitle language="eng">Journal of The Electrochemical Society</parentTitle>
    <identifier type="issn">0013-4651</identifier>
    <identifier type="doi">10.1149/2.005202jes</identifier>
    <enrichment key="UBICOIdent">008556</enrichment>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Ali Fatih</firstName>
      <lastName>Sarioglu</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Srikant</firstName>
      <lastName>Vaithilingam</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>7295</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1120</pageFirst>
    <pageLast>1127</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>160</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection</title>
    <parentTitle language="eng">Sensors and Actuators B: Chemical</parentTitle>
    <identifier type="issn">0925-4005</identifier>
    <identifier type="doi">10.1016/j.snb.2011.09.036</identifier>
    <enrichment key="UBICOIdent">008560</enrichment>
    <author>
      <firstName>Kwan Kyu</firstName>
      <lastName>Park</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Hyunjoo J.</firstName>
      <lastName>Lee</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Ömer</firstName>
      <lastName>Oralkan</lastName>
    </author>
    <author>
      <firstName>Jean-Pierre</firstName>
      <lastName>Ramseyer</lastName>
    </author>
    <author>
      <firstName>Hans Peter</firstName>
      <lastName>Lang</lastName>
    </author>
    <author>
      <firstName>Martin</firstName>
      <lastName>Hegner</lastName>
    </author>
    <author>
      <firstName>Christoph</firstName>
      <lastName>Gerber</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>7296</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>95</pageFirst>
    <pageLast>103</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>20</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding</title>
    <parentTitle language="eng">Journal of Microelectromechanical Systems</parentTitle>
    <identifier type="issn">1941-0158</identifier>
    <identifier type="doi">10.1109/JMEMS.2010.2093567</identifier>
    <enrichment key="UBICOIdent">008561</enrichment>
    <author>
      <firstName>Kwan Kyu</firstName>
      <lastName>Park</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Hyunjoo J.</firstName>
      <lastName>Lee</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>7304</id>
    <completedYear/>
    <publishedYear>2010</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1341</pageFirst>
    <pageLast>1351</pageLast>
    <pageNumber/>
    <edition/>
    <issue>6</issue>
    <volume>19</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer</title>
    <parentTitle language="eng">Journal of Microelectromechanical Systems</parentTitle>
    <identifier type="issn">1941-0158</identifier>
    <identifier type="doi">10.1109/JMEMS.2010.2076786</identifier>
    <enrichment key="UBICOIdent">008569</enrichment>
    <author>
      <firstName>Der-Song</firstName>
      <lastName>Lin</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Xuefeng</firstName>
      <lastName>Zhuang</lastName>
    </author>
    <author>
      <firstName>Serena H.</firstName>
      <lastName>Wong</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>7305</id>
    <completedYear/>
    <publishedYear>2010</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>114</pageFirst>
    <pageLast>123</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>57</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2012-02-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Capacitive micromachined ultrasonic transducers for therapeutic ultrasound applications</title>
    <parentTitle language="eng">IEEE transactions on bio-medical electronics</parentTitle>
    <identifier type="issn">0018-9294</identifier>
    <enrichment key="UBICOIdent">008570</enrichment>
    <author>
      <firstName>Serena H.</firstName>
      <lastName>Wong</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Ronald D.</firstName>
      <lastName>Watkins</lastName>
    </author>
    <author>
      <firstName>Kim</firstName>
      <lastName>Butts-Pauly</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>10002</id>
    <completedYear/>
    <publishedYear>2012</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>3063</pageFirst>
    <pageLast>3066</pageLast>
    <pageNumber/>
    <edition/>
    <issue>7</issue>
    <volume>84</volume>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2013-11-13</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Mesoporous thin-film on highly sensitive resonant chemical sensors for relative humidity and CO2 detection</title>
    <abstract language="eng">Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 × 10–4% RH/Hz to water vapor in N2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 × 10–4%/Hz and a volume resolution of 1.82 × 10–4% to CO2 in N2.</abstract>
    <parentTitle language="eng">Analytical Chemistry</parentTitle>
    <identifier type="doi">10.1021/ac300225c</identifier>
    <identifier type="issn">1520-6882</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Hyunjoo J.</firstName>
      <lastName>Lee</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Kwan Kyu</firstName>
      <lastName>Park</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Nicholas A.</firstName>
      <lastName>Melosh</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
  <doc>
    <id>10003</id>
    <completedYear/>
    <publishedYear>2012</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>87</pageFirst>
    <pageLast>93</pageLast>
    <pageNumber/>
    <edition/>
    <issue>174</issue>
    <volume/>
    <type>articler</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2013-11-13</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers</title>
    <abstract language="eng">Sensing of carbon dioxide(CO2)using inexpensive, miniaturized,and highly sensitive sensors is of great interest for environmental and consumer applications. In this paper, we present four functionalization layers that are suitable for resonant sensors based on mass-loading for CO2 detection. We compare the volume sensitivities of these layers to CO2 and relative humidity (RH) by using a highly sensitive 50-MHz capacitive micromachined ultrasonic transducer (CMUT) as a resonant sensor. Among the four function-alization layers, the layer based on a guanidine polymer exhibits the highest volume sensitivity to CO2 of 1.0 ppm/Hz in N2 and 3.8 ppm/Hz in air (∼45%RH). Furthermore, we report on other important characteristics of the guanidine polymer for sensing applications, including polymer saturation, regeneration, and repeatability.</abstract>
    <parentTitle language="eng">Sensors and Actuators B: Chemical</parentTitle>
    <identifier type="issn">0925-4005</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <author>
      <firstName>Hyunjoo J.</firstName>
      <lastName>Lee</lastName>
    </author>
    <submitter>
      <firstName>Madlen</firstName>
      <lastName>Herzig</lastName>
    </submitter>
    <author>
      <firstName>Kwan Kyu</firstName>
      <lastName>Park</lastName>
    </author>
    <author>
      <firstName>Mario</firstName>
      <lastName>Kupnik</lastName>
    </author>
    <author>
      <firstName>Butrus T.</firstName>
      <lastName>Khuri-Yakub</lastName>
    </author>
    <collection role="old_institute" number="03016">LS Allgemeine Elektrotechnik und Messtechnik</collection>
    <collection role="institutes" number="1101">FG Elektronische Systeme und Sensorik</collection>
  </doc>
</export-example>
