<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>15905</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>93750D-1</pageFirst>
    <pageLast>93750D-10</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>articlenr</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace>Bellingham, Wash.</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2016-04-26</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Spatially resolved contrast measurement of diffractive micromirror arrays</title>
    <parentTitle language="eng">MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States</parentTitle>
    <identifier type="isbn">978-1-62841-465-3</identifier>
    <enrichment key="BTU">an der BTU erstellt / created at BTU</enrichment>
    <enrichment key="UBICOseries">Proceedings of SPIE ;  9375</enrichment>
    <author>
      <firstName>Cornelius</firstName>
      <lastName>Sicker</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>Jörg</firstName>
      <lastName>Heber</lastName>
    </author>
    <author>
      <firstName>Dirk</firstName>
      <lastName>Berndt</lastName>
    </author>
    <author>
      <firstName>Florian</firstName>
      <lastName>Rückerl</lastName>
    </author>
    <author>
      <firstName>Jean-Yves</firstName>
      <lastName>Tinevez</lastName>
    </author>
    <author>
      <firstName>Spencer</firstName>
      <lastName>Shorte</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Wagner</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
</export-example>
