<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>5152</id>
    <completedYear/>
    <publishedYear>2008</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>articlenr</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2011-02-15</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Novel Carbon-cage based ultralow-k materials: Modelling and first experiments</title>
    <identifier type="doi">10.1109/TSM.2008.2005396</identifier>
    <enrichment key="UBICOIdent">005994</enrichment>
    <enrichment key="UBICOquelle">IEEE Transaction on Semiconductor Manufacturing 21(2008)4, S. 646-660, 0894-6507</enrichment>
    <author>
      <firstName>Kostyantyn</firstName>
      <lastName>Zagorodniy</lastName>
    </author>
    <submitter>
      <firstName>...</firstName>
      <lastName>Administrator</lastName>
    </submitter>
    <author>
      <firstName>Dmytro</firstName>
      <lastName>Chumakov</lastName>
    </author>
    <author>
      <firstName>Christine</firstName>
      <lastName>Täschner</lastName>
    </author>
    <author>
      <firstName>Anna</firstName>
      <lastName>Lukowiak</lastName>
    </author>
    <author>
      <firstName>Heiko</firstName>
      <lastName>Stegmann</lastName>
    </author>
    <author>
      <firstName>Dieter</firstName>
      <lastName>Schmeißer</lastName>
    </author>
    <author>
      <firstName>Holm</firstName>
      <lastName>Geisler</lastName>
    </author>
    <author>
      <firstName>Hans-Jürgen</firstName>
      <lastName>Engelmann</lastName>
    </author>
    <author>
      <firstName>Helmut</firstName>
      <lastName>Hermann</lastName>
    </author>
    <author>
      <firstName>Ehrenfried</firstName>
      <lastName>Zschech</lastName>
    </author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>carbon-cage</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ultralow-k</value>
    </subject>
    <collection role="old_institute" number="01005">LS Angewandte Physik / Sensorik</collection>
    <collection role="institutes" number="1503">FG Angewandte Physik und Halbleiterspektroskopie</collection>
  </doc>
</export-example>
