<?xml version="1.0" encoding="utf-8"?>
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  <doc>
    <id>9066</id>
    <completedYear/>
    <publishedYear>2012</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>82520S-1</pageFirst>
    <pageLast>82520S-8</pageLast>
    <pageNumber/>
    <edition>1. Auflage</edition>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE, The Society of Photo-Optical Instrumentation Engineers</publisherName>
    <publisherPlace>Bellingham</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation>Fraunhofer IPMS</contributingCorporation>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2013-07-02</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Optical position feedback for electrostatically driven MOEMS-scanners</title>
    <parentTitle language="eng">SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012</parentTitle>
    <identifier type="isbn">978-0-8194-8930-2</identifier>
    <identifier type="url">http://dx.doi.org/10.1117/12.907761</identifier>
    <enrichment key="BTU">nicht an der BTU erstellt / not created at BTU</enrichment>
    <enrichment key="UBICOseries">Proceedings of SPIE ; 8252</enrichment>
    <author>
      <firstName>Andreas</firstName>
      <lastName>Tortschanoff</lastName>
    </author>
    <submitter>
      <firstName>Kerstin</firstName>
      <lastName>Röhl</lastName>
    </submitter>
    <author>
      <firstName>M.</firstName>
      <lastName>Baumgart</lastName>
    </author>
    <author>
      <firstName>A.</firstName>
      <lastName>Frank</lastName>
    </author>
    <author>
      <firstName>Michael</firstName>
      <lastName>Wildenhain</lastName>
    </author>
    <author>
      <firstName>Thilo</firstName>
      <lastName>Sandner</lastName>
    </author>
    <author>
      <firstName>Harald</firstName>
      <lastName>Schenk</lastName>
    </author>
    <author>
      <firstName>Andreas</firstName>
      <lastName>Kenda</lastName>
    </author>
    <collection role="old_institute" number="01052">LS Mikro- und Nanosysteme</collection>
    <collection role="institutes" number="1522">FG Mikro- und Nanosysteme</collection>
  </doc>
</export-example>
