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    <title language="eng">Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms</title>
    <parentTitle language="eng">Journal of Applied Physics</parentTitle>
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    <enrichment key="BTU">nicht an der BTU erstellt / not created at BTU</enrichment>
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    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
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    <title language="eng">Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4</title>
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      <firstName>Timo</firstName>
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    <title language="eng">Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase</title>
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    <collection role="institutes" number="1102">FG Theoretische Elektrotechnik</collection>
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</export-example>
