@inproceedings{GaudetUhligStolzetal., author = {Gaudet, Matthieu and Uhlig, Sebastian and Stolz, Michael and Arscott, S. and Conrad, Holger and Langa, Sergiu and Kaiser, Bert and Schenk, Harald}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, series = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-5078-9}, pages = {175 -- 178}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A contribution to the expansion of the applicability of electrostatic forces in micro transducers}, series = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, booktitle = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {978-1-5106-0674-6}, doi = {10.1117/12.2249575}, language = {en} } @misc{LangaConradKaiseretal., author = {Langa, Sergiu and Conrad, Holger and Kaiser, Bert and Stolz, Michael and Gaudet, Matthieu and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive}, series = {Microsystem Technologies}, volume = {23}, journal = {Microsystem Technologies}, number = {1}, issn = {1432-1858}, doi = {10.1007/s00542-017-3360-6}, pages = {5697 -- 5708}, language = {en} } @inproceedings{ConradGaudetKaiseretal., author = {Conrad, Holger and Gaudet, Matthieu and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schenk, Harald}, title = {CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators}, series = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, booktitle = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, publisher = {VDE-Verlag}, address = {Berlin [u.a.]}, isbn = {978-3-8007-4491-6}, pages = {219 -- 222}, language = {en} } @inproceedings{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically in-plane driven silicon micropump for modular configuration}, series = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, booktitle = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, publisher = {University of Twente}, address = {Enschede}, pages = {57 -- 60}, language = {en} } @misc{SchenkZimmerWolter, author = {Schenk, Harald and Zimmer, F. and Wolter, A.}, title = {Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung}, language = {de} }