@article{TorcheHenkelSchmeisser, author = {Torche, Mohamed and Henkel, Karsten and Schmeißer, Dieter}, title = {The interaction of Al, Ag, Au and Ti to Pr2O3 thin film dielectrics}, language = {en} } @misc{SeifarthBurkovSchmeisseretal., author = {Seifarth, Olaf and Burkov, Yevgen and Schmeißer, Dieter and Stamm, Manfred}, title = {Metallic nickel nanorod arrays embedded into ordered block copolymer templates}, series = {Thin Solid Films}, volume = {515}, journal = {Thin Solid Films}, number = {16}, issn = {0040-6090}, pages = {6552 -- 6556}, language = {en} } @misc{SchroederLupinaSeifarthetal., author = {Schroeder, Thomas and Lupina, Grzegorz and Seifarth, Olaf and Tallarida, Massimo and Schmeißer, Dieter}, title = {Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2-xO3 (x=0-2) dielectrics on TiN for dynamic random access memory applications}, series = {Journal of Applied Physics}, volume = {102}, journal = {Journal of Applied Physics}, number = {1}, issn = {0021-8979}, pages = {014103}, language = {en} } @article{HenkelSohalSchmeisseretal., author = {Henkel, Karsten and Sohal, Rakesh and Schmeißer, Dieter and Schwiertz, Carola and Burkov, Yevgen and Torche, Mohamed}, title = {Al-oxynitride buffer layer facilities for PrOx/SiC interfaces}, language = {en} } @article{MuellerHenkelSchmeisser, author = {M{\"u}ller, Klaus and Henkel, Karsten and Schmeißer, Dieter}, title = {Organic field effect transistors with ferroelectric hysteresis}, language = {en} } @article{MuellerMandalSchmeisser, author = {M{\"u}ller, Klaus and Mandal, Dipankar and Schmeißer, Dieter}, title = {No interfacial layer for PEDOT electrodes on PVDF: Characterization of reactions at the interface P(VDF/TrFE)/Al and P(VDF/TrFE)/PEDOT:PSS}, language = {en} } @phdthesis{Meyer, author = {Meyer, Moritz Andreas}, title = {Effects of advanced process approaches on electromigration degradation of Cu on-chip interconnects}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus-3509}, language = {en} } @phdthesis{Sohal, author = {Sohal, Rakesh}, title = {CVD growth of (001) and (111) 3C-SiC epilayers and their interface reactivity with praseodymium oxide dielectric layers}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus-121}, language = {en} } @article{SchmeisserBierman, author = {Schmeißer, Dieter and Bierman, Matthew J.}, title = {Ferromagnetic Semiconducting EuO Nanorods}, language = {en} } @inproceedings{SchmeisserWehnerHoffmannetal., author = {Schmeißer, Dieter and Wehner, Stefan and Hoffmann, Patrick and Brand, Helmut R. and K{\"u}ppers, J{\"u}rgen}, title = {Influence of the Substrate on the Pattern Formation of a Surface Reaction}, series = {Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006}, booktitle = {Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006}, editor = {Descalzi, Orazio}, publisher = {AIP Publishing}, address = {Melville, New York}, isbn = {978-0-7354-0421-2}, pages = {121 -- 126}, language = {en} } @article{MuellerSeiboldSchmeisser, author = {M{\"u}ller, Sebastian and Seibold, G{\"o}tz and Schmeißer, Dieter}, title = {Preparation and Characterization of TiO2 Thin Films and Cr and Co Doped TiO2 Thin Films}, editor = {Vierhaus, Heinrich Theodor}, language = {en} } @article{Burkov, author = {Burkov, Yevgen}, title = {Dielectric Buffer Layer (Aluminium Oxynitride/AlON) for Ultrathin High-k Materials}, editor = {Vierhaus, Heinrich Theodor}, language = {en} } @misc{TallaridaSchmeisser, author = {Tallarida, Massimo and Schmeißer, Dieter}, title = {Study of Bulk and Interface Defects in Silicon Oxide with X-ray Absorption Spectroscopy}, series = {Materials Science and Engineering : B}, volume = {144}, journal = {Materials Science and Engineering : B}, number = {1-3}, issn = {0921-5107}, pages = {23 -- 26}, language = {en} } @article{BeckHoffmannSchmeisseretal., author = {Beck, Romuald B. and Hoffmann, Patrick and Schmeißer, Dieter and Bieniek, Tomasz and Jakubowski, Andrzej}, title = {Composition and Electrical Properties of Ultra-Thin SiOxNy Layers Formed by rf Plasma Nitrogen Implantation/Plasma Oxidation Processes}, language = {en} } @article{MroczynskiHoffmannSchmeisser, author = {Mroczynski, Robert and Hoffmann, Patrick and Schmeißer, Dieter}, title = {The Influence of Annealing (900 Grad C) of Ultra-Thin PECVD Silicon Oxynitride Layers}, language = {en} } @article{SchmeisserMroczynskiBieniek, author = {Schmeißer, Dieter and Mroczynski, Robert and Bieniek, Tomasz}, title = {Comparison of Composition of Ultra-Thin Silicon Oxynitride Layers´ fabricated by PECVD and Ultrashallow rf Plasma Ion Implantation}, language = {en} } @article{SchmeisserBurkovPaloumpaetal., author = {Schmeißer, Dieter and Burkov, Yevgen and Paloumpa, Ioanna and Mandal, Dipankar and Henkel, Karsten}, title = {Microscopic and Spectroscopic Characterization of Interfaces and Dielectric Layers for OFET Devices}, language = {en} } @article{SchmeisserHenkelKaravaev, author = {Schmeißer, Dieter and Henkel, Karsten and Karavaev, Konstantin}, title = {Al-Oxynitride Interfacial Layer Investigations for PrxOy on SiC and Si}, language = {en} } @article{SchmeisserDomaradzkiKaczmareketal., author = {Schmeißer, Dieter and Domaradzki, Jarosław and Kaczmarek, Danuta and Borkowska, Angnieszka and M{\"u}ller, Sebastian}, title = {Influence of Annealing on the Structure and Stoichiometry of Europium-Doped Titanium Dioxide Thin Films}, language = {en} } @phdthesis{Lehmann, author = {Lehmann, Carsten}, title = {Elektronische Struktur d{\"u}nner Halbleiterfilme (Chalkopyrite) als Absorbermaterialien f{\"u}r D{\"u}nnschichtsolarzellen}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus-4319}, language = {de} } @phdthesis{Mandal, author = {Mandal, Dipankar}, title = {Ultra-thin films of a ferroelectric copolymer: P(VDF-TrFE)}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus-5628}, language = {en} } @misc{SchmeisserMuellerSeifarthetal., author = {Schmeißer, Dieter and M{\"u}ller, S. and Seifarth, Olaf and Dabrowski, Jarek Marek and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {On the band gaps and electronic structure of thin single crystalline praseodymium oxide layers on Si(111)}, series = {Journal of vacuum science \& technology / B}, volume = {27}, journal = {Journal of vacuum science \& technology / B}, number = {1}, pages = {271 -- 276}, language = {en} } @phdthesis{Neubauer, author = {Neubauer, Antje}, title = {Untersuchung der ultraschnellen Elektronentransferdynamik an organisch/anorganischen Grenzfl{\"a}chen unter Einsatz von Femtosekundenspektroskopie im Ultrahochvakuum}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus-7858}, language = {de} } @misc{HenkelTorcheSohaletal., author = {Henkel, Karsten and Torche, Mohamed and Sohal, Rakesh and Karavaev, Konstantin and Burkov, Yevgen and Schwiertz, Carola and Schmeißer, Dieter}, title = {Pr-O-Al-N dielectrics for metal insulator semiconductor stacks}, language = {en} } @misc{MuellerHenkelMandaletal., author = {M{\"u}ller, Klaus and Henkel, Karsten and Mandal, Dipankar and Seime, Bernd and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Spin coated organic ferroelectric films for non volatile memories}, language = {en} } @misc{KovalLazarevaMuelleretal., author = {Koval, Yuri and Lazareva, I. and M{\"u}ller, P. and M{\"u}ller, Klaus and Henkel, Karsten and Friedrich, Daniel}, title = {Field effect transistors on graphitized polymer surfaces}, language = {en} } @misc{SeifarthSchubertGiussanietal., author = {Seifarth, Olaf and Schubert, Markus Andreas and Giussani, A. and Klenov, D. O. and Schmeißer, Dieter and Schroeder, Thomas}, title = {Single crystalline Pr2-xYxO3 (x=0-2)dielectrics on Si with tailored electronic and crystallographic structure}, volume = {108}, number = {10}, issn = {1089-7550}, pages = {103709}, language = {en} } @misc{MandalHenkelMuelleretal., author = {Mandal, Dipankar and Henkel, Karsten and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Band gab determination of P(VDF-TrFE) copolymer film by electron energy loss spectroscopy}, language = {en} } @misc{SionckeLinBrammertzetal., author = {Sioncke, Sonja and Lin, Hang-Chu and Brammertz, Guy and Delabie, Annelies and Conard, Thierry and Franquet, Alexis and Caymax, Matty and Meuris, Marc and Schmeißer, Dieter and Tallarida, Massimo}, title = {ALD on high mobility channels: engineering the proper gate stack passivation}, series = {ECS Transactions}, volume = {33}, journal = {ECS Transactions}, number = {2}, issn = {1938-5862}, pages = {9 -- 23}, language = {en} } @misc{KolanekHermannDudeketal., author = {Kolanek, Krzysztof and Hermann, Peter and Dudek, Piotr T. and Gotszalk, Teodor and Chumakov, Dmytro and Weisheit, Martin and Hecker, Michael and Zschech, Ehrenfried}, title = {Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon-germanium thin films}, series = {Thin Solid Films}, volume = {518}, journal = {Thin Solid Films}, number = {12}, issn = {0040-6090}, pages = {3267 -- 3272}, language = {en} } @misc{TammKemellKozlovaetal., author = {Tamm, Aile and Kemell, Marianna and Kozlova, Jekaterina and Sajavaara, Timo and Tallarida, Massimo and Kukli, Kaupo and Sammelselg, V. and Ritala, Mikko and Leskel{\"a}, Markku}, title = {Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxid Thin Films}, series = {Journal of The Electrochemical Society}, volume = {157}, journal = {Journal of The Electrochemical Society}, number = {10}, pages = {G193 -- G201}, language = {en} } @misc{KukliAarikAidlaetal., author = {Kukli, Kaupo and Aarik, Jaan and Aidla, Aleks and Uustare, Teet and J{\~o}gi, Indrek and Lu, Jun and Tallarida, Massimo and Kemell, Marianna and Kiisler, Alma- Asta and Ritala, Mikko and Leskel{\"a}, Markku}, title = {Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1´-methyl-ruthenocene}, series = {Journal of Crystal Growth}, volume = {312}, journal = {Journal of Crystal Growth}, number = {12-13}, issn = {0022-0248}, doi = {10.1016/j.jcrysgro.2010.03.033}, pages = {2025 -- 2032}, language = {en} } @misc{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope}, language = {en} } @misc{HoZschechSchmeisseretal., author = {Ho, Paul S. and Zschech, Ehrenfried and Schmeißer, Dieter and Meyer, Moritz Andreas and Huebner, Rene and Hauschildt, Meike and Zhang, Lijuan and Gall, Martin and Kraatz, Matthias}, title = {Scaling effects on microstructure and reliability for cu interconnects}, language = {en} } @misc{WehnerKarpitschkaBurkovetal., author = {Wehner, Stefan and Karpitschka, Stefan and Burkov, Yevgen and Schmeißer, Dieter and K{\"u}ppers, J{\"u}rgen and Brand, Helmut R.}, title = {Stochastic aspects of pattern formation during the catalytic oxidation of CO on Pd(111)}, language = {en} } @misc{HenkelSeimePaloumpaetal., author = {Henkel, Karsten and Seime, Bernd and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Buffer layer incestigaions on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene]}, series = {IOP conference series : Materials Science and Engineering}, volume = {8}, journal = {IOP conference series : Materials Science and Engineering}, number = {1}, issn = {1757-899X}, pages = {012036}, language = {en} } @misc{SchmeisserHenkelBergholzetal., author = {Schmeißer, Dieter and Henkel, Karsten and Bergholz, Matthias and Tallarida, Massimo}, title = {The band gab and band offset in ultrathin oxide-semiconductor heterostructures}, language = {en} } @inproceedings{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {64 -- 68}, language = {en} } @inproceedings{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {47 -- 51}, language = {en} } @inproceedings{KlocekFriedrichSchmeisseretal., author = {Klocek, Jolanta and Friedrich, Daniel and Schmeißer, Dieter and Hecker, Michael and Zschech, Ehrenfried}, title = {The stability of C60 and its derivatives upon handling in microsystems technologies}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {43 -- 46}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films}, language = {en} } @incollection{SchwiertzHenkelBleietal., author = {Schwiertz, Carola and Henkel, Karsten and Blei, S. and Heidenreich, R. and Schmeißer, Dieter}, title = {Nachweis von Aerosolen (<1µm) mit Schwingquarzimpedanzspektroskopie}, language = {de} } @misc{ZschechHoSchmeisseretal., author = {Zschech, Ehrenfried and Ho, O. S. and Schmeißer, Dieter and Meyer, Moritz Andreas and Vairagar, A. V. and Schneider, G. and Hauschildt, Meike and Kraatz, Matthias and Sukharev, V.}, title = {Geometry and Microstructure Effect on EM-Induced Copper Interconnect Degradation}, series = {IEEE Transactions on Device and Materials Reliability}, volume = {9}, journal = {IEEE Transactions on Device and Materials Reliability}, number = {1}, issn = {1530-4388}, pages = {20 -- 30}, language = {en} } @inproceedings{HeimFriedrichGuttmannetal., author = {Heim, S. and Friedrich, Daniel and Guttmann, P. and Rehbein, S. and Chumakov, Dmytro and Ritz, Y. and Schneider, G. and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects}, language = {en} } @misc{SchmeisserHenkelMuelleretal., author = {Schmeißer, Dieter and Henkel, Karsten and M{\"u}ller, Klaus and Tallarida, Massimo}, title = {Interface Reactions in Ultrathin Functional Dielectric Films}, language = {en} } @misc{SchmeisserTallaridaHenkeletal., author = {Schmeißer, Dieter and Tallarida, Massimo and Henkel, Karsten and M{\"u}ller, Klaus and Mandal, Dipankar and Chumakov, Dmytro and Zschech, Ehrenfried}, title = {Characterization of oxidic and organic materials with synchrotron radiation based XPS and XAS}, language = {en} } @misc{LazarevaKovalMuelleretal., author = {Lazareva, I. and Koval, Yuri and M{\"u}ller, P. and M{\"u}ller, Klaus and Henkel, Karsten and Schmeißer, Dieter}, title = {Interface screening and imprint in pol(vinylidene fluoride/trifluoroethylene) ferroelectric field effect transistors}, language = {en} } @incollection{MuellerBurkovMandaletal., author = {M{\"u}ller, Klaus and Burkov, Yevgen and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Goryachko, Andriy and Schmeißer, Dieter}, title = {Microscopic and spectroscopic characterization of interfaces and dielectric layers for OFET devices}, series = {Organic Electronics : structural and Electronic Properties of OFETs}, booktitle = {Organic Electronics : structural and Electronic Properties of OFETs}, editor = {W{\"o}ll, Christof}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-40810-8}, pages = {445 -- 468}, language = {en} } @misc{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {HfO2/Si interface formation in atomic layer deposition films: an in situ investigation}, language = {en} } @misc{HenkelLazarevaMandaletal., author = {Henkel, Karsten and Lazareva, I. and Mandal, Dipankar and Paloumpa, Ioanna and M{\"u}ller, Klaus and Koval, Yuri and M{\"u}ller, P. and Schmeißer, Dieter}, title = {Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using Poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications}, language = {en} } @misc{HenkelBurkovKaravaevetal., author = {Henkel, Karsten and Burkov, Yevgen and Karavaev, Konstantin and Torche, Mohamed and Schwiertz, Carola and Schmeißer, Dieter}, title = {Optimization of the AION buffer layer for PrxOy/Si stacks}, language = {de} } @article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Konarski, Piotr and Cwil, M. and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation}, language = {en} } @misc{ZschechGeislerRinderknechtetal., author = {Zschech, Ehrenfried and Geisler, Holm and Rinderknecht, Jochen and Schneider, Gerd and Spolenak, Ralph and Schmeißer, Dieter}, title = {Nano-scale analysis using synchrotron-radiation: Applications in the semiconductor industry}, series = {Current nanoscience}, volume = {4}, journal = {Current nanoscience}, number = {3}, issn = {1573-4137}, pages = {256 -- 266}, language = {en} } @misc{ZagorodniyChumakovTaeschneretal., author = {Zagorodniy, Kostyantyn and Chumakov, Dmytro and T{\"a}schner, Christine and Lukowiak, Anna and Stegmann, Heiko and Schmeißer, Dieter and Geisler, Holm and Engelmann, Hans-J{\"u}rgen and Hermann, Helmut and Zschech, Ehrenfried}, title = {Novel Carbon-cage based ultralow-k materials: Modelling and first experiments}, doi = {10.1109/TSM.2008.2005396}, language = {en} } @article{TallaridaSchmeisser, author = {Tallarida, Massimo and Schmeißer, Dieter}, title = {Study of silicon/oxides interfaces by means of Si2p resonant photoemission}, language = {en} } @article{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {The initial atomic layer deposition of HfO2/Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy}, language = {en} } @article{MuellerMandalHenkeletal., author = {M{\"u}ller, Klaus and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Ferroelectric properties of spin-coated ultrathin (down to 10nm) copolymer films}, language = {en} } @misc{OpelNielsenBaueretal., author = {Opel, Matthias and Nielsen, Karl-Wilhelm and Bauer, Sebastian and Goennenwein, Sebastian T. B. and Gross, Rudolf and Cezar, Julio C. and Schmeißer, Dieter and Simon, J{\"u}rgen and Mader, Werner}, title = {Nanosized superparamagnetic precipitates in cobalt-doped ZnO}, series = {The European Physical Journal : B}, volume = {63}, journal = {The European Physical Journal : B}, number = {4}, issn = {1434-6036}, pages = {437 -- 444}, language = {en} } @inproceedings{SeifarthWilkeWalczyketal., author = {Seifarth, Olaf and Wilke, A. and Walczyk, Christian and Dabrowski, Jarek Marek and Zaumseil, Peter and Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111)}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {285 -- 286}, language = {en} } @inproceedings{HenkelBurkovBergholzetal., author = {Henkel, Karsten and Burkov, Yevgen and Bergholz, Matthias and Karavaev, Konstantin and Sohal, Rakesh and Torche, Mohamed and Schmeißer, Dieter}, title = {Al-Oxynitride as a buffer layer for high-k dielectrics}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {161 -- 162}, language = {en} } @inproceedings{HenkelMandalSeimeetal., author = {Henkel, Karsten and Mandal, Dipankar and Seime, Bernd and Paloumpa, Ioanna and Lazareva, I. and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Electrical investigations on MFIS structures consisting P[VDF/TrFE] as ferro-electric layer for non-volatile memory applications}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {159 -- 160}, language = {en} } @article{ZiminaBatchelorEisebittetal., author = {Zimina, A. and Batchelor, David R. and Eisebitt, S. and Schmeißer, Dieter and Shukalov, A. and Eberhardt, W.}, title = {Soft X-ray emission electron microscopy: chemical state microscopy from interface and bulk}, language = {en} } @article{SchmeisserSeiboldReif, author = {Schmeißer, Dieter and Seibold, G{\"o}tz and Reif, J{\"u}rgen}, title = {Nano-scaled Dielectric Barriers (NanoDieB) for CMOS compatible Si-technologies}, series = {Forum der Forschung}, journal = {Forum der Forschung}, number = {19}, issn = {0947-6989}, pages = {131 -- 136}, language = {en} } @article{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Properties of Cr deposited on TiO2 thin films}, language = {en} } @article{SohalLupinaLippertetal., author = {Sohal, Rakesh and Lupina, Grzegorz and Lippert, Gunther and Wenger, Christian and Seifarth, Olaf and Schr{\"o}der, Thomas and Tallarida, Massimo and Schmeißer, Dieter}, title = {Interface chemistry of high-k PrxAl2-xO3 (x=2-0) dielectrics on TiN for dynamic random access memory applications}, language = {en} } @inproceedings{TallaridaKaravaevSchmeisseretal., author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {HfO2 ALD-growth studied by in situ photoemission}, series = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, pages = {289 -- 290}, language = {en} } @misc{TallaridaAdelmannDelabieetal., author = {Tallarida, Massimo and Adelmann, Christoph and Delabie, Annelies and Elshocht, Sven van and Caymax, Matty and Schmeißer, Dieter}, title = {Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum}, series = {Applied physics letters}, volume = {99}, journal = {Applied physics letters}, number = {4}, issn = {1077-3118}, doi = {10.1063/1.3615784}, pages = {042906-1 -- 042906-3}, language = {en} } @misc{SchwarzkopfDirsyteDevietal., author = {Schwarzkopf, Jutta and Dirsyte, R. and Devi, A. and Kwasniewski, A. and Schmidbauer, M. and Wagner, Gerd and Michling, Marcel and Schmeißer, Dieter and Fornari, Robert}, title = {Influence of Na on the structure of Bi4Ti3O12 films deposited by liquid-delivery spin MOCVD}, series = {Thin solid films}, volume = {519}, journal = {Thin solid films}, number = {17}, issn = {0040-6090}, pages = {5754 -- 5759}, language = {en} } @misc{TallaridaWeisheitKolaneketal., author = {Tallarida, Massimo and Weisheit, Martin and Kolanek, Krzysztof and Michling, Marcel and Engelmann, Hans-J{\"u}rgen and Schmeißer, Dieter}, title = {Atomic layer deposition of nanolaminate oxide films on Si}, series = {Journal of Nanoparticle Research}, volume = {13}, journal = {Journal of Nanoparticle Research}, number = {11}, doi = {10.1007/s11051-011-0319-x}, pages = {5975 -- 5983}, language = {en} } @inproceedings{WyrodekTallaridaWeisheitetal., author = {Wyrodek, Jakub and Tallarida, Massimo and Weisheit, Martin and Schmeißer, Dieter}, title = {Determination of interfacial layers in high-k nanomaterials by ADXPS measurements}, language = {en} } @inproceedings{StarzykTallaridaSchmeisser, author = {Starzyk, Łukasz and Tallarida, Massimo and Schmeißer, Dieter}, title = {Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition}, language = {en} } @misc{SchmeisserSchmidtSeiboldetal., author = {Schmeißer, Dieter and Schmidt, Stephan and Seibold, G{\"o}tz and Cherkashinin, Gennady and Jaegermann, Wolfram}, title = {Localized Gap States in LiCoO2 and their Influence on the Transport Properties in Li-Ion Batteries}, series = {ECS Transactions}, volume = {25}, journal = {ECS Transactions}, number = {35}, issn = {1938-5862}, pages = {37 -- 45}, language = {en} } @misc{KolanekTallaridaSchmeisser, author = {Kolanek, Krzysztof and Tallarida, Massimo and Schmeißer, Dieter}, title = {Atomic layer deposition of HfO2 investigated in situ by means of a noncontact atomic force microscopy}, language = {en} } @inproceedings{BroczkowskaKlocekFriedrichetal., author = {Broczkowska, K. and Klocek, Jolanta and Friedrich, Daniel and Henkel, Karsten and Kolanek, Krzysztof and Urbanowicz, A. and Schmeißer, Dieter and Miller, M. and Zschech, Ehrenfried}, title = {Fullerene based materials for ultra-low-k application}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-8324-2}, pages = {39 -- 43}, language = {en} } @misc{HenkelSeimePaloumpaetal., author = {Henkel, Karsten and Seime, Bernd and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Optimization of MFIS structures containing poly(vinylidene-fluoride trifluoroethylene) for non-volatile memory applications}, language = {en} } @misc{HenkelSeimePaloumpaetal., author = {Henkel, Karsten and Seime, Bernd and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Buffer layer investigations on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene]}, language = {en} } @misc{DudekLupinaKozłowskietal., author = {Dudek, Piotr T. and Lupina, Grzegorz and Kozłowski, Grzegorz and Zaumseil, Peter and Bauer, Jakob and Fursenko, Oksana and Dabrowski, Jarek Marek and Schmidt, R. and Lippert, Gunther and M{\"u}ssig, Hans-Joachim and Schr{\"o}der, Thomas and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Atomic-scale engineering of future high-k dynamic random access memory dielectrics: The example of partial Hf substitution by Ti in BaHfO3}, series = {Journal of Vacuum Science and Technology / B}, volume = {29}, journal = {Journal of Vacuum Science and Technology / B}, number = {1}, issn = {2166-2754}, language = {en} } @misc{JanowitzSchererMohamedetal., author = {Janowitz, Christoph and Scherer, Valentina and Mohamed, Mansour and Krapf, Alica and Dwelk, Helmut and Manzke, Recardo and Galazka, Zbigniew and Uecker, Reinhard and Irmscher, Klaus and Fornari, Robert and Michling, Marcel and Schmeißer, Dieter}, title = {Experimental electronic structure of In2O3 and Ga2O3}, series = {New Journal of Physics}, volume = {13}, journal = {New Journal of Physics}, number = {8}, issn = {1367-2630}, pages = {085014}, language = {en} } @misc{MandalHenkelSchmeisser, author = {Mandal, Dipankar and Henkel, Karsten and Schmeißer, Dieter}, title = {Comment on "Preparation and Characterization of Silver-Poly(vinylidene fluoride) Nanocomposites:Formation of Piezoelectric Polymorph of Poly(vinylidene fluoride"}, language = {en} } @misc{KolanekTallaridaMichlingetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Michling, Marcel and Karavaev, Konstantin and Schmeißer, Dieter}, title = {Atomic layer deposition reactor for fabrication of metal oxides}, language = {en} } @misc{TallaridaKukliMichlingetal., author = {Tallarida, Massimo and Kukli, Kaupo and Michling, Marcel and Ritala, Mikko and Leskel{\"a}, Markku and Schmeißer, Dieter}, title = {Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium}, series = {Chemistry of Materials}, volume = {23}, journal = {Chemistry of Materials}, number = {13}, issn = {0897-4756}, pages = {3159 -- 3168}, language = {en} } @misc{TallaridaFriedrichStaedteretal., author = {Tallarida, Massimo and Friedrich, Daniel and St{\"a}dter, Matthias and Michling, Marcel and Schmeißer, Dieter}, title = {Growth of TiO2 with Thermal and Plasma Enhanced Atomic Layer Deposition}, series = {Journal of Nanoscience and Nanotechnology}, volume = {11}, journal = {Journal of Nanoscience and Nanotechnology}, number = {9}, issn = {1533-4880}, pages = {8049 -- 8053}, language = {en} } @misc{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {Novel "In-situ2" Approach to Modified ALD Processes for Nano-functional Metal Oxide Films}, language = {en} } @misc{KaravaevKolanekTallaridaetal., author = {Karavaev, Konstantin and Kolanek, Krzysztof and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-Situ Studies of ALD Growth of Hafnium Oxide Films}, language = {en} } @article{HenkelKaravaevTorcheetal., author = {Henkel, Karsten and Karavaev, Konstantin and Torche, Mohamed and Schwiertz, Carola and Burkov, Yevgen and Schmeißer, Dieter}, title = {Al-Oxyxynitride interfacial layer investigations for PrXOY on SiC and Si}, language = {en} } @incollection{MuellerSchmeisser, author = {M{\"u}ller, S. and Schmeißer, Dieter}, title = {Deposition of reactive and non-reactive metals on titanium dioxide - chromium and cobalt}, language = {en} } @article{TallaridaSchmeisser, author = {Tallarida, Massimo and Schmeißer, Dieter}, title = {Study of bulk and interface defects in silicon oxide with X-ray absorption spectroscopy}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisser, author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-situ Atomic Layer Deposition growth of Hafnium oxide}, series = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, booktitle = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, editor = {Vierhaus, Heinrich Theodor}, publisher = {BTU}, address = {Cottbus}, pages = {13 -- 19}, language = {en} } @article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Hoffmann, Patrick and Schmeißer, Dieter and Konarski, Piotr and Cwil, M.}, title = {Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor}, language = {en} } @article{TallaridaSohalSchmeisser, author = {Tallarida, Massimo and Sohal, Rakesh and Schmeißer, Dieter}, title = {Resonant photoemission at the Oxygen K edge as a tool to study the eletronic properties of defects at SiO2/Si and SiO2/SiC interfaces}, language = {en} } @misc{HoffmannWehnerSchmeisseretal., author = {Hoffmann, Patrick and Wehner, Stefan and Schmeißer, Dieter and Brand, Helmut R. and K{\"u}ppers, J{\"u}rgen}, title = {Noise-induced spatiotemporal patterns in a bistable reaction-diffusion system: Photoelectron emission micrsoscopy experiments and modeling of the CO oxidation reaction on Ir(111)}, series = {Physical Review : E}, volume = {73}, journal = {Physical Review : E}, number = {5}, issn = {1550-2376}, pages = {056123}, language = {en} } @inproceedings{HenkelTorcheSohaletal., author = {Henkel, Karsten and Torche, Mohamed and Sohal, Rakesh and Schwiertz, Carola and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Pr-O-N Dielectrics for MIS Stacks on Silicon and Silicon Carbide Surfaces}, series = {Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A.}, booktitle = {Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A.}, editor = {Dudley, Michael}, publisher = {Materials Research Society}, address = {Warrendale, Pa.}, isbn = {978-1-55899-867-4}, pages = {353 -- 358}, language = {en} } @misc{BeerbomMayerJaegermannetal., author = {Beerbom, Martin and Mayer, Thomas and Jaegermann, Wolfram and Batchelor, David R. and Schmeißer, Dieter}, title = {Electrochemically Induced Redox-Reactions on GaAs-Surfaces: High Resolution Photoemission Spectra Taken at the U49/2 Beamline}, language = {en} } @article{HoffmannMikaloBatcheloretal., author = {Hoffmann, Patrick and Mikalo, Ricardo Pablo and Batchelor, David R. and Schmeißer, Dieter and Soinski, M. S. and Follath, Rolf}, title = {The chromatic aberration of PEEM - demonstration on graphite inclusions in cast iron, Kategrorie: Microscopy - Spectromicroscopy}, language = {en} } @article{SieberMantelSeylleretal., author = {Sieber, N. and Mantel, B. F. and Seyller, Th. and Ristein, J. and Ley, L. and Heller, Thomas and Batchelor, David R. and Schmeißer, Dieter}, title = {Structural, electronic and chemical properties of hydrogen terminated 6H-SiC}, language = {en} } @article{GraupnerSeyllerLeyetal., author = {Graupner, R. and Seyller, Th. and Ley, L. and Mikalo, Ricardo Pablo and Hoffmann, Patrick and Batchelor, David R. and Schmeißer, Dieter}, title = {PEEM Investigation of CVD-Diamond grown on Si}, language = {en} } @article{HoffmannMikaloBatcheloretal., author = {Hoffmann, Patrick and Mikalo, Ricardo Pablo and Batchelor, David R. and Schmeißer, Dieter and Follath, Rolf}, title = {N2O-Oxidation of Si(100)}, language = {en} } @article{MikaloHoffmannBatcheloretal., author = {Mikalo, Ricardo Pablo and Hoffmann, Patrick and Batchelor, David R. and Schmeißer, Dieter}, title = {Valence band spectroscopy of semiconducting regioregular Poly(3-Hexylthiophene)-2,5-diyl}, language = {en} } @inproceedings{MuellerPaloumpaSchmeisser, author = {M{\"u}ller, Klaus and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Carbon-Plot-Micostructuring for All-Polymer-Transistors}, language = {en} } @article{YfantisSchmeisserKompotiatis, author = {Yfantis, Alexandros D. and Schmeißer, Dieter and Kompotiatis, L.}, title = {Polypyrrole based conversion coatings for aluminium alloys}, language = {en} }