@inproceedings{MuthSchmidSchnitzlein, author = {Muth, Marco and Schmid, Reiner P. and Schnitzlein, Klaus}, title = {Specific modifications to enhance sensitivity in null-ellipsometry}, series = {Book of abstracts, 8th Workshop Ellipsometry, March 10 - 12, 2014, Dresden, Germany}, booktitle = {Book of abstracts, 8th Workshop Ellipsometry, March 10 - 12, 2014, Dresden, Germany}, pages = {S. 84}, language = {en} }