@misc{PitthandosReisAlbertonCorreaetal., author = {Pitthan, E. and dos Reis, R. and Alberton Corr{\^e}a, Silma and Schmeißer, Dieter and Boudinov, H. I. and Stedile, F. C.}, title = {Influence of CO annealing in metal-oxide-semiconductor capacitors with SiO2 films thermally grown on Si and on SiC}, series = {Journal of Applied Physics}, journal = {Journal of Applied Physics}, number = {119}, issn = {0021-8979}, doi = {10.1063/1.4939836}, pages = {025307-1 -- 025307-6}, abstract = {Understanding the influence of SiC reaction with CO, a by-product of SiC thermal oxidation, is a key point to elucidate the origin of electrical defects in SiC metal-oxide-semiconductor (MOS) devices. In this work, the effects on electrical, structural, and chemical properties of SiO2/Si and SiO2/SiC structures submitted to CO annealing were investigated. It was observed that long annealing times resulted in the incorporation of carbon from CO in the Si substrate, followed by deterioration of the SiO2/Si interface, and its crystallization as SiC. Besides, this incorporated carbon remained in the Si surface (previous SiO2/Si region) after removal of the silicon dioxide film by HF etching. In the SiC case, an even more defective surface region was observed due to the CO interaction. All MOS capacitors formed using both semiconductor materials presented higher leakage current and generation of positive effective charge after CO annealings. Such results suggest that the negative fixed charge, typically observed in SiO2/SiC structures, is not originated from the interaction of the CO by-product, formed during SiC oxidation, with the SiO2/SiC interfacial region.}, language = {en} } @misc{SchmeisserHaeberle, author = {Schmeißer, Dieter and Haeberle, J{\"o}rg}, title = {Intrinsic localized gap states in IGZO and its parent single crystalline TCOs}, series = {Thin Solid Films}, journal = {Thin Solid Films}, number = {603}, issn = {0040-6090}, doi = {10.1016/j.tsf.2016.02.010}, pages = {206 -- 211}, abstract = {We report on the X-ray absorption data for Indium-Gallium-Zink-Oxide thin films, amorphous ZnO films, amorphous SnOx films, and single crystalline In2O3, Ga2O3, ZnO, and SnO2 data. These absorption data probe the empty conduction band states explicitly. Also they allow for an elemental assignment using resonant excitation to derive the contributions of each metal ion. We find that the lowest states appear right at the Fermi energy and result from configuration interaction induced charge transfer states which we consider as intrinsic gap states.}, language = {en} }