@inproceedings{HenkelSeimePaloumpaetal., author = {Henkel, Karsten and Seime, Bernd and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {C(V) and C(t) measurements on MFIS structures consisting P[VDF/TrFE] as ferroelectric layer}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 828}, abstract = {Ferroelectric Field Effect Transistors (FeFETs) are considered as a candidate for future non volatile and non destructive readout memory cells. A possible low cost solution is the use of poly[vinylidene fluoride trifluoroethylene (P[VDF/TrFE]). Using P[VDF/TrFE] we focus on metal ferroelectric insulator semiconductor (MFIS) capacitor structures. In this contribution we will summarize our investigations related to capacitance measurements in dependence of applied bias (C(V)) and time (C(t)). The thickness of the ferroelectric layer as well as the thickness and the material of the buffer layer have been investigated for optimization of the write voltage. CV measurements at higher temperatures deliver decreased flatband voltage shifts within one CV loop resulting in lower memory windows. At temperatures around 100∘C the hysteresis totally vanished, pointing out the ferroelectric behavior of the system. C(t) measurements at a constant bias have been performed for retention analysis of the MFIS stack. After applying a writing pulse we could distinguish between a higher and a lower capacitance state for more than 5 days. This work is supported by Deutsche Forschungsgemeinschaft within priority program 1157 (SCHM 745/11-2).}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisseretal., author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {In-situ ALD growth of Hafnium oxide films}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 244}, abstract = {We report on a novel system for in-situ atomic layer growth (ALD) of high-k dielectric films. First results were obtained for Hf-oxide samples by using Hf-tetrachloride as precursor and water as oxidizer. We compare the photoelectron spectra of Si2p, O1s and Hf4f of our in-situ prepared films with samples (ex-situ) prepared by industrial ALD reactors and discuss similarities and differences observed in the core level spectra of the various samples by considering the different growth conditions.}, language = {en} } @inproceedings{MandalMuellerSchmeisser, author = {Mandal, Dipankar and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Dipole orientation of the P[VDF-TrFE] co-polymer films: A NEXAFS study}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 840}, abstract = {Ferroelectric properties of copolymers of vinylidene fluoride with trifluoroethylene (P[VDF-TrFE]) has become great deal of interest due to potential use in non volatile memory technology. Permanent dipoles (formed between the alternating hydrogen and fluorine atom within the copolymer) ordering of orientation are crucial for device efficiency. Here we focus on thickness dependence dipole orientation in these co-polymer films. In our systematic studies, we found there is prominent dipole re-orientation effect also for the intrinsic films (~10 nm thickness) before applying the electric field. It is observed after the application of the field, the dipoles re-oriented in opposite direction. Therefore, we conclude that the lowest thickness of the film should have well grown crystalline lamellae structure. As a result, c-axis of crystallites acts as well define manner in plane of the surface and for that reason the b-axis is more free. Because the b-axis is parallel to the polarization direction, it is easy to get a preferred orientation of the dipoles. For thicker films (here up to 100 nm), the average orientation effect is hindered, so a very low re-orientation effect has been observed. For this investigation, we used Near Edge X-ray Absorption Spectroscopy, at the U 49/2-PGM beam line of BESSY-II, Berlin. This work is supported by DFG within SPP1157 (SCHM 745/11-2).}, language = {en} } @inproceedings{MuellerMandalHenkeletal., author = {M{\"u}ller, Klaus and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Interface reactions of ferroelectric copolymer layers with different electrode materials}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 830}, abstract = {The ferroelectric copolymer poly(vinylidene fluoride trifluoroethylene) (P(VDF-TrFE)) is a possible material for low cost applications as organic nonvolatile memory element. We present an XPS interface investigation of the copolymer/electrode interface. Below 100nm film thickness, interface phenomena becomes important. Possible interface reactions could lead to a reduction of the ferroelectric functionality.We present a comparative study of the two interfaces Al/P(VDF-TrFE) and PEDOT:PSS/P(VDF-TrFE). The result is a clear indication of a surface reaction in between the Aluminum-electrodes. In contrast, for PEDOT:PSS the measurements shows a layer by layer formation of the interface PEDOT:PSS/PVDF without any reaction. Second, we present a study of remanent polarization of ultrathin spincoated films of the copolymer, in a thickness range from 5 to 100mn, with organic electrodes like PEDOT:PSS. The measurements are carried out by using the flatband shift of a capacitance-voltage (CV) characteristic. This shift of flatband voltage is used as value for the electric polarization of the polymer.}, language = {en} } @inproceedings{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Direct Observation of d2L2 Charge Transfer States in TiO2 thin films by Resonant Photoelectron Spectroscopy}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 592}, abstract = {We investigate the electronic structure of TiO2 thin films by SR-PES, NEXAFS and ResPES. The films are prepared in a combined in-situ/ex-situ process that leads to stoichiometric thin films (≈ 10 nm) in Rutile structure. We focus on ResPES at the Ti 2p edge. When the photon energy is close to the Ti 2p absorption edge we observe additional features about 13 eV below the valence band main features. These features show clear spectator auger decay at the resonance leading to d0 final state. From this, we deduce the existence of the d2L2 initial charge transfer state as this is the only possible channel that enables the corresponding spectator auger decay. These features have the same origin as the satellite structures observed in core level spectra, esp. 2p and 3p.}, language = {en} } @inproceedings{TallaridaKaravaevSchmeisseretal., author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Photoemission and absorption spectroscopy for in situ investigations of the ALD growth}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 242}, abstract = {We have investigated the growth of Hf-oxide on Si by means of photoemission and X-ray absorption spectroscopy using synchrotron radiation at Bessy, Berlin. The Hf-oxide layers were grown via atomic layer deposition (ALD) using an in-situ ALD reactor attached to the investigation chamber. The XPS and XAS spectra were measured after every deposition cycle by transferring the sample into the investigation chamber without breaking the vacuum. From the experimental data we have obtained information about the early stages of the Hf-oxide growth, concerning in particular the reactivity of the interface with Si. Due to the possibility to study the layers after every cycle and with different oxidation parameters without exposing them to contaminants, the in situ investigation revealed to be a very important method to understand the growth properties of Hf-oxide.}, language = {en} } @inproceedings{OpelNielsenBaueretal., author = {Opel, Matthias and Nielsen, Karl-Wilhelm and Bauer, Sebastian and Goennenwein, Sebastian T. B. and Gross, Rudolf and Cezar, Julio C. and Schmeißer, Dieter and Simon, J{\"u}rgen and Mader, Werner}, title = {Ferromagnetism and magnetic clusters in cobalt-doped ZnO}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 430}, abstract = {Ferromagnetic semiconductors (FMS) - i.e. semiconductors exhibiting long-range magnetic ordering - are intriguing materials. However, in spite of intensive research in the last decade, the existence of homogeneous FMS with a Curie temperature around or above room temperature still is controversial. A particularly tedious issue are local sample inhomogeneities or magnetic clusters, which can yield strong magnetic signals resembling the behaviour expected for a homogeneous FMS. Using pulsed laser deposition, we have grown cobalt-doped ZnO films on single crystalline ZnO substrates. Combining x-ray magnetic circular dichroism, DC magnetometry, and AC susceptibility measurements with a detailed structural analysis by high resolution x-ray diffraction, transmission electron microscopy, and electron-spectroscopic imaging, we can unambigously trace the characteristic, ferromagnetic-like behaviour of our ZnO:Co samples at room-temperature to nanometer-sized superparamagnetic metallic cobalt precipitates.}, language = {en} } @inproceedings{LazarevaKovalMuelleretal., author = {Lazareva, I. and Koval, Yuri and M{\"u}ller, P. and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Field effect transistor of graphitized polyimide with P(VDF-TrFE) as gate insulator}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 195}, abstract = {Surfaces of polyimide films were graphitized by low-energy ion irradiation. The conductivity was between 10-5 to 200 S/cm [1]. We prepared field effect transistors using this material. Ferroelectric P(VDF-TrFE) was used as gate insulator. The thickness of P(VDF-TrFE) varied from 120 nm to 1200 nm. Properties of P(VDF-TrFE) were investigated by current-voltage measurements of metal/ P(VDF-TrFE)/metal capacitors. We have found that at room temperature, the coercive field of P(VDF-TrFE) does not depend on the film thickness. At lower temperatures the coercive field increases proportionally to the reciprocal temperature. Remnant polarization is 9.5 µC/cm2. It slightly rises with decreasing temperature. Our recent results of field effect mobility, carrier concentration and threshold voltage are presented. [1] I. Lazareva, Y. Koval, M. Alam, S. Str{\"o}msd{\"o}rfer, P. M{\"u}ller, Appl. Phys. Lett. 90, 262108 (2007)}, language = {en} } @inproceedings{BergholzSohalSchmeisser, author = {Bergholz, Matthias and Sohal, Rakesh and Schmeißer, Dieter}, title = {ELS to determine the band gap of thin dielectric layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 156}, abstract = {In ultra thin layers of high-K materials the value of the band gap can be derived not explicitly although it is a key quantity in the electric behavior. We use ELS with a monochromatized (50 meV - 150 meV) electron gun and primary energies between 20 eV and 30 eV. Starting with the native SiO2/Si(001) layers we find that loss function of the substrate dominates for using primary energies beyond 50 eV. In contrast at energies below 50 eV the loss intensity can be used to derived the band gap with an accuracy of ±200 meV. We compare thin (<3 nm) films of HfOx, Pr2O3,Al2O3 and Si-Oxynitrides and discuss the band gap values as well as the scattered intensity observed within the gap.}, language = {en} } @inproceedings{HenkelTorcheSchwiertzetal., author = {Henkel, Karsten and Torche, Mohamed and Schwiertz, Carola and Paloumpa, Ioanna and Sohal, Rakesh and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Inorganic and organic layers for high-k and organic memory applications}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 127}, abstract = {We report about organic and inorganic MIS stacks for new possibilities for high frequency and high power applications as well as for non volatile memory cell. The organic stack contains a ferroelectric polymer as the functional layer. Poly[vinylidene fluoride trifluoroethylene] (P[VDF/TrFE]) is spin coated from a solution onto oxidised silicon substrates. We report on the polarisation induced flatband voltage shifts. For the inorganic stack our attempt is to combine higk-k dielectrics with high band gap semiconductors (SiC). Praseodymium oxide layers are prepared by electron beam evaporation from Pr6O11 powder and in situ controlling of interface and volume composition (XPS). Praseodymium silicate layers were prepared either by metal evaporation onto a thin ox- ide on top of the semiconductor and following annealing steps or by a wet chemical process out of aqueous Pr(NO3)3 solutions. Using spectro-scopic characterisation we investigate the stability of the various inter-faces within the stacks as well as the reactivity of the metal electrodes on thin Pr2O3. We report the results of electrical characterisation consisting of permittivity values, leakage current and density of interface states.}, language = {en} } @inproceedings{MuellerHenkelPaloumpaetal., author = {M{\"u}ller, Klaus and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {P(VDF/TrFE) as ferroelectric insulation layer for organic field effect transistors}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 101}, abstract = {The ferroelectric polymer poly(vinylidene fluoride trifluoroethylene)(P(VDF-TrFE)) is used as insulating material for organic field effect tran-sistors (OFET) and metal-insulator-semiconductor (MIS)-structures. For the MIS-structures, we find the typical hysteresis in the CV charac-teristic upon increasing the voltage scan window. Based on these results, we fabricate OFET with regioregular poly(3-hexlythiophene)(P3HT) as organic semiconductor. The transistors are constructed in bottom gate architecture with thin layers of spincoated P(VDF-TrFE) as gate insulation (100nm). The drain-source current of the OFET is reversible affected by the polarized gate, which gives opportunities for organic nonvolatile memory elements. We present characteristic features like the hysteretic drain current response or the data retention. Furthermore, we present measurements with Kelvin probe force microscopy, a method which gives informations on the lateral distributions of the surface potential.}, language = {en} } @inproceedings{HoffmannSchmeisserHimpseletal., author = {Hoffmann, Patrick and Schmeißer, Dieter and Himpsel, Franz J. and Engelmann, Hans-J{\"u}rgen and Zschech, Ehrenfried and Stegmann, Heiko and Denlinger, Jonathan D.}, title = {Characterization of Chemical Bonding in Low-K Dielectric Materials for Interconnect Isolation: XAS and EELS Study}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 156}, abstract = {The use of low dielectric constant materials in the on-chip interconnect process reduces interconnect delay, power dissipation and crosstalk noise. In CVD deposited organo-silicate glass (OSG) the substitution of oxygen in SiO2 by methyl groups (-CH3) reduces the permittivity significantly (from 4.0 in SiO2 to 2.6-3.3 in the OSG). However, plasma processing removes C and H containing molecular groups. Therefore, compositional analysis and chemical bonding characterization of structured films with nanometer resolution is necessary. OSG thin films as-deposited and after plasma treatment are studied using XAS and EELS. In both techniques, the fine structure near the C1s edge allows to identify C-H, C-C, and C-O bonds. XAS spectra have been recorded for non-patterned films and EELS spectra for patterned structures. The chemical bonding is compared for as-deposited and plasma-treated low-k materials. The flu-orescence and the electron yield recorded while XAS measurement are compared. Examination of the C 1s near-edge structures reveal a mod-ified bonding of the remaining C atoms in the plasma-treated sample regions.}, language = {en} } @inproceedings{MuellerChowdhuryDremovetal., author = {M{\"u}ller, P. and Chowdhury, F. and Dremov, V. and Koval, Yuri and Lichtenberg, F. and M{\"u}ller, S. and Schmeißer, Dieter and Pentcheva, R.}, title = {Resistive memory switching in perovskite-derivative single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 818}, abstract = {We investigated several layered perovskite derivatives of the family AnBnO3n+2, such as LaTiO3.41, CaNbO3.41 and SrNbO3.41, which can be considered as a stacking of blocks consisting of 5 perovskite layers. Electric transport across these layers takes place via intrinsic tunnelling. Mesa devices with a cross-sectional area of 50 to 200 µm2 and a height between 30 and 500 nm were fabricated by electron-beam lithography and ion-beam etching. Both dc I-V characteristics and pulsed current injection have shown switching between different resistive states in these materials. The resistive states have long-term stability, which makes them interesting for memory applications. The transport experiments suggest that switching and resistive memory are controlled by trapping and release of charge carriers. Furthermore, photoelectron and NEXAFS spectroscopy of cleaved LaTiO3.41 surfaces have been performed. The results are compared to recent correlated band theory (LDA+U) calculations.}, language = {en} } @inproceedings{SeifarthWalczykLupinaetal., author = {Seifarth, Olaf and Walczyk, Christian and Lupina, Grzegorz and Dabrowski, Jaroslaw and Weidner, G{\"u}nter and Zaumseil, Peter and Schmeißer, Dieter and Storck, Peter and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {On the electronic and dielectric characterisation of thin cubic PrO2 layers on Silicon}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 196}, abstract = {For the integration of 100 \% Ge onto the Si platform, a buffer oxide approach has been developed recently, using rare earth oxides to tune the lattice constant between the Si and the Ge. Among these buffer oxides, PrO2 is a prospective candidate with high quality crystalline growth on Si, moderated by an interfacial Pr-silicate between. In order to specify electronic properties of thin PrO2 and its interface on Si(111), especially the width of the band gap, we performed synchrotron radiation based XPS, UPS and XAS measurements at the U49/2 PGM 2 beamline at BESSY II and correlate the results with our structural characterisation performed by TEM and XRD. In order to evaluate the dielectric properties of thin PrO2 layers on Si(111), we performed temperature-, time-, voltage-, and layer thickness-dependent leakage current measurements (J-V). Here, we identified relaxation behaviour in the leakage current, successfully addressed to defect like states inside the Pr-silicate interface layer, corroborated by frequency dependent capacitance versus voltage (C-V) measurements.}, language = {en} } @inproceedings{FriedrichMichlingKloceketal., author = {Friedrich, Daniel and Michling, Marcel and Klocek, Jolanta and Schmeißer, Dieter and Avdoshenko, Stas and Chumakov, Dmytro and Zschech, Ehrenfried}, title = {Study of C60 based films formation by NEXAFS}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 145}, abstract = {The C60 fullerenes and some of its -OH, -CF3 and -Cl derivates are candidates for application as ultra-low-k insulators in the semiconductor industry. Future preparation of thin films based on these materials requires the stability of the substituted fullerenes against chemical handling and processing steps. The latter issue was addressed by our NEXAFS studies that were done by synchrotron radiation at the beam line U49/2-PGM2 at BESSY II. Performed were the C K-edge NEXAFS studies in total fluorescence and total electron yield modes. The C60 based films were deposited on silicon by spraying from solutions. The influence of the different substitutional groups with C60 molecules was studied. The data were compared to the reference spectra of a pure C60 film. For C60(OH)24, C60-Cl2 and C60(CF3)12 a variance of the intensity of the π*-resonance as well as shift to higher energies of 0.5 eV (-OH), 0.6 eV (-F), 0.7 eV (-Cl) were observed. The results confirm the necessary stability of the used C60 derivatives and shall be used for optimization of the film deposition chemistry and conditions.}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisser, author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {Evolution of the interfacial layer during the atomic layer deposition of HfO2 on Si/SiO2 substrates}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 160}, abstract = {We studied the formation of the interfacial layer in the Si/SiO2/HfO2 system using the in-situ Atomic Layer Deposition (ALD) reactor developed in our group [1,2]. We measured the X-ray photoelectron and X-ray absorption spectra with synchrotron radiation at the beamline U49-2/PGM2-BESSY II. The ALD growth was obtained using different Hf-precursors (HfCl4,TEMAHf and TDMAHf) on various prepared substrates at different temperatures. The investigation was carried out in-situ giving the possibility to determine the properties of the grown film after every ALD cycle without breaking the vacuum. We observed the evolution of the Si/SiO2/HfO2 system during the formation of first three Hf-oxide layers, detecting the interfacial growth of SiO2 during the initial ALD cycles from the XPS spectra of Si2p. We discuss how the interfacial layer growth depends on the various ALD parameters. [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{KolanekKaravaevTallaridaetal., author = {Kolanek, Krzysztof and Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-situ investigations of the atomic layer deposition of HfO2 with UHV/AFM}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 160}, abstract = {We studied in-situ the atomic layer deposition (ALD) of HfO2 with ultra high vacuum (UHV) atomic force microscope (AFM), using the ALD reactor developed by our group [1, 2]. The reactor was attached to the Omicron Large Sample-UHV/AFM system in the AFM-Lab of the Angewandte Physik-Sensorik chair at the BTU-Cottbus. We investigated different Si(001)/SiO2 substrates and surface preparation techniques performed before the ALD process. After each ALD cycle (using TDMAHf and H2O as precursors), we studied the influence of the HfO2 growth on the root mean square (RMS) roughness; the surface fractal dimension and the height histogram: the surface skewness and kurtosis. We focused on the influence of the substrate temperature on the surface topography during the ALD. The in-situ studies of the ALD process with the UHV/AFM system correlated with the experiments performed with photoelectron spectroscopy can be used for understanding the fundamental properties of the ALD of HfO2 on Si(001). [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{KraatzSchmeisserZschechetal., author = {Kraatz, Matthias and Schmeißer, Dieter and Zschech, Ehrenfried and Ho, Paul S.}, title = {Electromigration simulation for on-chip Cu interconnects}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 161}, abstract = {We are investigating the influence of copper microstructure on electromigration degradation effects and interconnect lifetimes using computer simulation. The simulation is carried out in three dimensions. For the copper microstructure, a Monte Carlo technique was used to model the Cu grain growth. Different diffusivities where applied to grain boundaries and top interface of the interconnect model according to the qualitative crystallographic orientation of adjacent grains. The grain boundary network and the top interface form the diffusion paths for the electromigration mass transport. Along the diffusion paths, the fluxes of vacancies where calculated including mechanical stress and electromigration driving forces using a finite difference method. Positive flux divergent sites of the FDM lattice are treated as void nucleation sites after a critical vacancy concentration is reached. The resistance increase due to void growth was calculated using a cellular automaton, masking current free regions as quasi voids and adding the resistance of the slices of the lattice normal to the electron flow direction in series. A parallel computing environment was used to generate large numbers of interconnect models in order to obtain a pool of data for statistical analysis of interconnect lifetimes. The results of this analysis will be shown}, language = {en} } @inproceedings{MichlingFriedrichSchmeisseretal., author = {Michling, Marcel and Friedrich, Daniel and Schmeißer, Dieter and Koval, Yuri and M{\"u}ller, Paul}, title = {Study of polyimide after graphitization with low-energy Ar+ Ion irradiation by NEXAFS}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 147}, abstract = {In this contribution we report on investigations of the electronic structure of Ar+ irradiated polyimide samples by using NEXAFS. The NEXAFS measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin using TEY and TFY detection. Polyimide samples are prepared using low Ar+ dose while the temperature of the samples is varied between 300K and 700K. In the NEXAFS data at the Carbon K-edge we see substantial changes between different samples. The differences appear in particular in the more surface sensitive TEY-Signal. The NEXFS data are consistent with the graphitization of the surface upon Ar+ bombardment as we identify the characteristic absorption bands of graphitic carbon. Its relative content increases with increasing sample temperature. In contrast, in the more bulk sensitive TFY data, the emission characteristic of polyimide is maintained. The possibility to cover insulating polymers with a conducting layer is a great demand for many applications. Because of the relative low price of the basic materials, the irradiation with low-energy Ions will play an important roll in the microelectronic of the future.}, language = {en} } @inproceedings{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Investigation of ultra-thin Chromium layers on Titanium Dioxide by resonant photoemission}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 453}, abstract = {Oxide supported metal films and clusters offer interesting properties with a wide range of possible applications. In this context, Titanium Dioxide is chosen as a model substrate due to its simple electronic structure with a d0 configuration. We study the interaction of ultrathin Chromium films deposited on TiO2 film with focus on the modifications of the valence band and band gap region. Normal photoemission in bulk and surface sensitive modes as well as resonant photoemission at the Cr 2p and Ti 2p edges are used to distinguish the different Cr 3d and Ti 3d contributions to the valence band. In the initial step we find to gap states of distinct character with a sharp resonance of the Cr 3d related state at the Cr 2p edge. With increasing layer thickness we observe that this resonance extends to about 20 eV below the Fermi-Energy. Datasets of valence band spectra measured around the Cr 2p edge show 2 resonant mechanisms in this case i.e. a participator channel for the 3d state accompanied by a spectator channel at fixed kinetic energy.}, language = {en} } @inproceedings{RichterMuellerPhilipetal., author = {Richter, Matthias and M{\"u}ller, Klaus and Philip, Shine and Paloumpa, Ioanna and Henkel, Karsten and Schmeißer, Dieter}, title = {Temperature dependence of organic solar cell parameters}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 671}, abstract = {The influence of an annealing step on the parameters of bulk heterojunction organic solar cells is investigated. In order to fabricate the solar cells we use glass coated with ITO (Indiumtinoxide) as a substrate on which the active layer consisting of P3HT and PCBM is spincoated. Al-electrodes are evaporated on top of the active layer. We use PEDOT:PSS as buffer layer. Each sample is annealed at different temperatures for a short time. Between every temperature step the I-V characteristic of the cell is measured. The following parameters are derived afterwards: FF, Isc (density), Voc. Also the efficiency is estimated. The results show a maximum cell efficiency for drying at 100°C for 20sec. A further important step for preparation is the drying procedure of the PEDOT:PSS layer. Here an improvement of about 50\% in cell efficiency is measured after drying at 50°C for 5 days under inert gas atmosphere.}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Basics of the atomic layer deposition of HfO2 onto Si/SiO2 substrates: in-situ investigations with XPS, XAS and UHV-AFM}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 159}, abstract = {We developed a reactor for investigating in-situ the atomic layer deposition (ALD) of HfO2. X-ray photoelectron and X-ray absorption spectra were collected after each ALD cycle using synchrotron radiation at the beamline U49-2/PGM2 - BESSY II, Berlin. The morphology of the substrate and thin film surfaces was investigated after each ALD cycle with an UHV-AFM microscopy attached to the ALD reactor. We studied the ALD on differently prepared substrates, at different substrate temperatures, and using different Hf-precursors (HfCl4, TEMAHf, TDMAHf). We observed the evolution of the Si/SiO2/HfO2 system during the formation of the first three Hf-oxide layers [1]; we detected the incorporation of Cl into the Hf-oxide films and proposed a mechanism responsible for the Cl contamination [2]; we found evidence of the interfacial-SiO2 growth during the initial ALD cycles and of dipole formation at the HfO2/SiO2 interface. In this contribution we illustrate the basics of the technique used, and discuss the physical-chemical properties of ALD on the basis of the experimental results. [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {In-situ experimental approach to the study of atomic layer deposition with atomic force microscope, X-ray photoelectron and X-ray absorption spectroscopy}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S.176}, abstract = {We describe our experimental approach to the investigation of atomic layer deposition (ALD). ALD is a powerful deposition technique for growing conformal thin films of composite materials with atomically accurate thickness on large area [1]. Despite the enormous industrial interest growing around ALD, its fundamental properties were not yet properly studied. We developed an ALD reactor for the in-situ investigations using XPS, XAS and AFM as experimental techniques. We studied the chemical-physical properties of the growing thin films after each deposition cycle. Here, we illustrate the recent results concerning the ALD of HfO2 obtained using different Hf-precursors on various substrates [2]. We show how the in-situ investigations could deliver an important insight into the fundamental characteristics of ALD and how these information could be used to modify and optimize the deposition parameters. [1] M. Leskel{\"a}, M. Ritala, Thin Solid Films, 409, 138, 2002; [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008).}, language = {en} } @inproceedings{SeifarthWalczykLupinaetal., author = {Seifarth, Olaf and Walczyk, Christian and Lupina, Grzegorz and Zaumseil, Peter and Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {The electronic band diagram of thin PrO2(111) / Pr-silicate buffers on Si(111) and its relevance to dielectric properties}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 136}, abstract = {Thin dielectric buffers of cubic PrO2(111) on Si(111) are ideally suited to integrate Ge onto Si by moderating the lattice mismatch between the materials. The leakage current across this dielectric buffer is strongly influenced by the electronic band diagram and defects inside the band gap. Therefore, we measured the band offsets, band gaps and defect positions by means of synchrotron radiation based photoemission spectroscopy techniques (XPS and XAS) with special emphasis on the Pr-silicate interface. In a next step we compare the spectroscopic data with information from dielectric studies, based on temperature dependent leakage current studies. We observe a close relation between dielectric properties and the electronic structure.}, language = {en} } @inproceedings{FriedrichMichlingSchmeisseretal., author = {Friedrich, Daniel and Michling, Marcel and Schmeißer, Dieter and Koval, Yuri and M{\"u}ller, Paul}, title = {Characterization of ion beam modified polyimide layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 247}, abstract = {Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar+ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He+ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films.}, language = {en} } @inproceedings{DudekLupinaKozłowskietal., author = {Dudek, Peter and Lupina, Grzegorz and Kozłowski, Grzegorz and Dabrowski, Jarek Marek and Lippert, Gunther and M{\"u}ssig, Hans-Joachim and Schmeißer, Dieter and Schroeder, Thomas}, title = {Band structure and electrical properties of MBE grown HfO2 - based alkaline earth perovskites}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 232}, abstract = {Ultra thin dielectric films (<20 nm) deposited on TiN electrodes are interesting for MIM capacitor application. High capacitance density and dielectric permittivity must be accompanied by extremely low leakage currents (10-8 A/cm2) at bias 0.5 V. To achieve such low leakage currents, high band gap and proper band alignment is required. Occupied electronic states can be probed with standard laboratory photoemission methods. Probing of unoccupied states is more challenging. Synchrotron based PES in combination with XAS forms a powerful method to study the band alignment. ASAM end station located at the U 49/2 PGM 2 beamline of BESSY II (Berlin) offers excellent conditions for performing such measurements. We investigated HfO2 - based alkaline earth perovskite - BaHfO3 with subsequent admixture of TiO2, resulting in formation of BaHf0.5Ti0.5O3 compound. The analysis of data indicates that band gap for HfO2 is similar to BaHfO3 and amounts 5.8 eV; for BaHf0.5Ti0.5O3 it decreases to 3.8 eV. We conclude that the addition of TiO2 to BaHfO3 increases significantly the dielectric permittivity but also impacts the band gap alignment. The conduction band offset shrinks, influencing the leakage current behavior.}, language = {en} } @inproceedings{FriedrichKovalMuelleretal., author = {Friedrich, Daniel and Koval, Yuri and M{\"u}ller, Paul and Schmeißer, Dieter}, title = {Electronic structure of thin spin-coated polyimide layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 311}, abstract = {The conductivity of polyimide layers can be modified by several orders of magnitude by ion beam radiation. In order to understand the electronic structure of the pure polyimide before ion beam modification we focus in our preliminary experiments on spectroscopic investigations of thin as prepared polyimide films. The films were made by spin coating from a PMDA/ODA solution with subsequent vacuum annealing at 350°C. The layer thickness can be controlled by changing the concentration of PMDA/ODA in the solution realizing a thickness down to 3.5nm. For the characterization of the as prepared thin polyimide films the techniques NEXAFS, ResPES, XPS and CIS were applied at the U49/2-PGM2 beam line of Bessy II, Berlin. Our data including the valence band, core levels and absorption spectrum were compared with theoretical LCAO calculations. Based on these results we are able to attribute all spectral features to the specific atomic bonds in the molecule.}, language = {en} } @inproceedings{HoffmannbeckRichterStaedteretal., author = {Hoffmannbeck, David and Richter, Matthias and St{\"a}dter, Matthias and Paloumpa, Ioanna and Henkel, Karsten and Schmeißer, Dieter}, title = {Spectroscopic and microscopic characterization of potential catalysts for the hydrogenation of CO2}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 483}, abstract = {The reduction of CO2 emissions is a general demand of the society in order to avoid irreversible climate changes. We are investigating potential catalysts for the hydrogenation of CO2 in particular for its application in the so called oxyfuel combustion process. In order to understand the catalytic behavior of the investigated materials we use the techniques X-Ray Photoemission (XPS) and -absorption (XAS) Spectroscopy as well as X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The prospective of our work is to figure out the electronic and structural properties of the material and to optimize proper catalysts or design new ones for best catalytic activity. Beside the spectro-microscopic investigations the catalysts are tested under Sabatier reaction conditions in terms of activity, stability and sensitivity against poisoning. In our preliminary work we constructed a Sabatier reactor system with analytical parts based on infrared absorption and mass spectroscopy modules. First spectroscopic and catalytic results achieved on a commercially available Ru/Al2O3 catalyst will be presented.}, language = {en} } @inproceedings{KraatzZhangSchmeisseretal., author = {Kraatz, Matthias and Zhang, Lijuan and Schmeißer, Dieter and Zschech, Ehrenfried and Ho, Paul S.}, title = {Statistical Analysis of Computer-simulated On-Chip Interconnect Electromigration Lifetimes under the Influence of Microstructure and Strengthened Top Interface}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 292}, abstract = {We are investigating the statistics of computer-simulated interconnect electromigration (EM) lifetimes with regard to the effects of microstructure and a strengthened top interface. The degradation process of EM once threatened the entire existence of integrated circuit industry in the 1960s and has remained a major reliability concern. Ongoing miniaturization and the introduction of new materials further complicate the task of EM-resistant chip manufacturing. We have developed a simple two-dimensional finite difference simulation that models the mass transport by electromigration along the grain boundaries and the top interface of interconnect segments that allows us to do calculations of void nucleation and growth. A parallel computer simulates hundreds of interconnects simultaneously and statistical analysis becomes feasible. A Monte Carlo grain growth algorithm (a modified Potts version) is applied to model the grain structure of the interconnect segments. We will show that the simulation can be used to compare simulation and experiment qualitatively. Four cases have been studied: interconnect segments with small/large grains and weak/strong top interface.}, language = {en} } @inproceedings{MbuaMuellerRichteretal., author = {Mbua, Roy and M{\"u}ller, Klaus and Richter, Matthias and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter and Kramm, Ulricke}, title = {Investigation of new Catalysts for PEM Fuel Cells}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 483}, abstract = {Increasing green house emissions amplify global warming concerns worldwide. Fuel cells, based on polymer electrolyte membranes (PEM) are part of the solution to this issue. We aim at developing and testing new catalysts for fuel cells. Platinum catalysts perform best in PEM fuel cells to date but they are very expensive. For fuel cells to be perfectly applicable and economically affordable, an alternative catalyst with similar or even greater efficiency should be developed. Metal phthalocyanines are known to be good oxygen reduction catalysts and are associated with high electron transfer properties. We investigated Cobalt Phthalocyanine in its pure state mixed with Carbon Black (CoPc:Carbon Black=1:9) untreated and also after a treatment in N2 at several temperatures, up to 1000°C for 30 minutes. Results of XPS and EDX analyses reveal that the treatment at higher temperatures causes a rearrangement in the chemical states of Co, N and C atoms. Furthermore, results of cycling voltammetry (CV) analysis reveal that CoPc treated in N2 at 800°C exhibited a higher current density, in conclusion, a higher catalytic activity than the untreated CoPc.}, language = {en} } @inproceedings{MichlingKolanekSchmeisseretal., author = {Michling, Marcel and Kolanek, Krzysztof and Schmeißer, Dieter and Tallarida, Massimo}, title = {A growth model for the HfO2 ALD process}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 294}, abstract = {In this contribution we report on our in-situ2 cycle-by-cycle (up to the 25 cycles) investigation of the HfO2 atomic layer deposition (ALD) process using the method of x-ray photoelectron spectroscopy (XPS) and electron energy loss spectroscopy (EELS). We used Tetrakis-Dimethyl-Amino-Hafnium (TDMA-Hf) and H2O as precursors and p-type Si wafer with native oxide as a substrate. The XPS measurements were carried out at BESSY II in Berlin with primary energies of 150 eV and 640 eV and the EELS measurements were done with a primary energy of 50 eV. We measured the O1s, Si2p core level and the valence band including the Hf 4f core level. From the Hf4f to Si2p ratios taken at each energy we developed a growth model for the first monolayer and for the following layers too. From our data we conclude, that in the first monolayer up to the fourth ALD cycle an island growth occurs. The height of these islands is about 0,5nm. After the first monolayer is completed, a layer- by-layer growth can be expected. In order to proof this observation we have simulated the Hf/Si ratio for different excitation energies and found a very good agreement with our measurement data. The EELS data especially the evaluation of the loss function onset confirm our growth model.}, language = {en} } @inproceedings{PhilipMartinezMuelleretal., author = {Philip, Shine and Martinez, Elias and M{\"u}ller, Klaus and Kunst, Marinus and Schmeißer, Dieter}, title = {Time resolved microwave conductivity measurements of Bulk Heterojunction solar cells}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 301}, abstract = {The time resolved microwave conductivity (TRMC) method was used in order to study the generation and decay kinetics of charge carriers in the Bulk Heterojunction (BHJ) solar cells. The charge carriers were generated with 532nm laser pulses of 10ns FWHM (Full Width at Half Maximum) induced in the cells. The BHJ solar cells used for the measurements had a photoactive layer consisting of a mixture of Poly (3-Hexylthiophene) P3HT and Phenyl-C61-butyric acid methyl ester (PCBM) which was spin coated onto Indium tin oxide (ITO)/glass substrates. In the field of Organic photovoltaic blends, TRMC method is introduced as a new method of direct investigation of the charge carrier lifetime as well as the charge carrier mobility and we were successful in studying the charge carrier lifetime of the reference BHJ solar cells. We also studied the influence of aligned ferroelectric fields on the charge separation in BHJ solar cells. As ferroelectric material, we used the copolymer Poly (vinylidene fluoride - trifluoroethylene) P(VDF-TrFE).}, language = {en} } @inproceedings{RichterSchmeisser, author = {Richter, Matthias and Schmeißer, Dieter}, title = {Electronic structure and optical properties of P3HT - Evidence of 2D-polarons in P3HT}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 311}, abstract = {In this contribution we report on investigations of the electronic structure and optical characteristics of poly(3-hexylthiophene) (P3HT) based films. Various techniques like NEXAFS, SRXPS, UPS, UV-VIS and FTIR were used. X-Ray based measurements were done at the U49/2-PGM2 beam line at BESSYII. The samples were produced by spin casting P3HT dissolved in chloroform and other suitable solvents on ITO (indium tin oxide) coated glass slides and silicon substrates. Regioregular-P3HT is known to form thin films with nanocrystalline lamellae. This 2D structure give rise to additional electronic excitations in photoinduced absorption measurements, which are attributed to 2D-polarons [1]. In the Total Electron Yield (surface sensitive) and Total Fluorescence Yield (bulk sensitive) NEXAFS spectra of regioregular-P3HT three additional features can be found prior to the first typical π* excitation. The nature of these features was further investigated by means of SRXPS and UPS measurements. Energy differences relative to π*-peak maximum (0.54eV, 0.87eV and 2.24eV) suggest that these features are due to 2D-polarons. This presence of polarons is further confirmed by our FTIR and UV-VIS results. [1] Osterbacka et al., Synth. Met. 116 (2001) 317}, language = {en} } @inproceedings{SchmidtSchmeisser, author = {Schmidt, Stefan and Schmeißer, Dieter}, title = {Localized gap states in cobalt/nickel mixed oxides}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 486}, abstract = {Replacing Co by large amounts of Ni is considered to reduce costs in Li-Ion-Batteries while maintaining their performance. We investigate the electronic structure of Co/Ni compounds because of their direct impact on battery operation. Thin Co/Ni oxide films on metal substrates were prepared by dropping/spin-coating from nitrate solutions followed by subsequent annealing in air and UHV. The following Co to Ni ratios have been investigated: 50/50, 40/60, 30/70, and 20/80. The results are compared with the pure Co-oxide and magnetron sputtered LiCoO2 reference samples. Spectroscopic measurements on these samples were carried out at the U49/2 beamline at BESSYII, Berlin. XPS of the transition metal (TM) 2p states reveals the existence of charge transfer ground states and different oxidation states. NEXAFS at the Co L3, Ni L3 and O K edges reflects the density of unoccupied states while resonant PES at these edges provides the related partial density of states (pDOS). Therefore, these techniques can be used in order to distinguish between the different contributions of TM3d and O2p states in the valence band region. We find sharp localized features at the valence band edge and at the O K and Co L3 absorption edges that are discussed to originate from the strong hybridization between metal and oxygen states in that region.}, language = {en} } @inproceedings{TallaridaDessmannStaedteretal., author = {Tallarida, Massimo and Deßmann, Nils and St{\"a}dter, Matthias and Friedrich, Daniel and Michling, Marcel and Schmeißer, Dieter}, title = {Atomic layer deposition of TiO}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {We present a study of the initial growth of TiO2 on Si(111) by atomic layer deposition (ALD). The Si substrate was etched with NH4F before ALD to remove the native oxide film and to produce a Si-H termination. In-situ experiments by means of photoemission and X-ray absorption spectroscopy were conducted with synchrotron radiation on Ti-oxide films produced using Ti-tetra-iso-propoxide (TTIP) and water as precursors. O1s, Ti2p, C1s, and Si2p core level, and O1s and Ti2p absorption edges show the transition of the Ti-oxide properties during the first layers. The growth starts with a very small growth rate (0.03nm/cycle) due to the growth inhibition of the Si-H termination and proceeds with higher growth rate (0.1nm/cycle) after 1.5nm Ti-oxide has been deposited.}, language = {en} } @inproceedings{DasStaedterTallaridaetal., author = {Das, Chittaranjan and St{\"a}dter, Matthias and Tallarida, Massimo and Schmeißer, Dieter}, title = {Investigation of Linear Dichroism in ALD layers of TiO2}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Titanium dioxide is on the most studied material due to its wide range of applications in various fields such as self cleaning, photocatalysis, solar cell, water splitting, bio-implants, etc. In order to increase its efficiency in water splitting and solar cell, it is necessary to understand the crystal structure and electronic properties in thin films. In our approach we are investigating the X-ray linear dichroism (XLD) of thin layers of TiO2. XLD studies have been done in multiferroics, antiferromagnetic, and ferromagnetic materials, but a very less amount of work have been done in studying XLD effect of TiO2 thin films. These layers are grown by in-situ atomic layer deposition (ALD) system and are investigated with X-ray absorption spectroscopy (XAS) at BESSY II, Berlin. ALD is a promising technique to grow thin films on different substrates conveniently due to its uniform deposition property. XAS study will also help us to better understand the interfacial electronic properties of thin films of TiO2.}, language = {en} } @inproceedings{MuellerHoffmannbeckKirneretal., author = {M{\"u}ller, Klaus and Hoffmannbeck, David and Kirner, Georg and St{\"a}dter, Matthias and Schmeißer, Dieter}, title = {CO2-Methanation by Catalytic Conversion}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {The utilization of CO2 as raw material is an important component of a program for CO2 reduction. A possibility is the production of methane. At a moderate temperature of around 350°C, hydrogenation of CO2 to methane is possible by the Sabatier reaction CO2 + 4H2 ->CH4 +2H2O. Prerequisite for an efficient kinetics of the Sabatier reaction is the application and optimization of catalysts. In this contribution, we present investigations of Ru and Ni catalysts on different substrates. For Ru/Al2O3 catalysts, we found stable operation without degradation within 500 hours with a conversion rate of 80\% at 350°C. For NiO/SiO2 catalysts, a conversion rate of 90\% was found for temperatures of 350-405°C. We also show the investigation of cross sensitivities against SOx and NOx, which are typical contaminations of CO2, generated by the industrial oxyfuel process. In our work the morphology (REM, AFM, specific surface), chemical composition (FTIR, XPS) and phase composition (XRD) of the catalysts are characterized. In addition, we report on thermodesorption (TDS) measurements at atmospheric pressure to determine the amount of adsorbed CO2 under real conditions. The project is funded by the German Ministry of Research and Education (BMBF-GeoEn).}, language = {en} } @inproceedings{PhilipMuellerRichteretal., author = {Philip, Shine and M{\"u}ller, Klaus and Richter, Matthias and Kunst, Marinus and Schmeißer, Dieter}, title = {Study of excited states and a model for exciton-polaron interaction in P3HT}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Organic semiconductors efficiently harvest light in the region of the solar spectrum due to a high absorption/extinction coefficient.In our work we study the electronic structure and the charge carrier dynamics of polymeric organic semiconductor regioregular poly(3-hexylthiophen-2,5-diyl) (P3HT), an ideal p-type semiconductor and a widely used conjugated polymer, and blends with the fullerene derivative phenyl-C61-butyric acid methyl ester (PCBM), an electron acceptor material. The study was done with the help of time resolved microwave conductivity (TRMC) for contactless investigation of bulk carrier dynamics, optical spectroscopy, ultraviolet photoelectron spectroscopy(UPS) and high resolution X-ray absorption spectroscopy(XAS) which investigates excited states of rr-P3HT. From the data obtained we could infer the positions of the valence and conduction band, the existence of two excitons as well as the co-existence of one dimensional and two dimensional polarons. Based on our spectroscopic data we propose a model in which the scattering of virtual polarons and excitons are shown to create mobile polaronic charge carriers.}, language = {en} } @inproceedings{RichterFriedrichSchmeisser, author = {Richter, Matthias and Friedrich, Daniel and Schmeißer, Dieter}, title = {3h-Auger decay in the π-band of HOPG}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {In this contribution we report on the electronic structure of highly oriented pyrolitic graphite (HOPG). HOPG is a model system because of the clear separation between π- and σ-bands in the valence band regime. X-ray based measurements were done at the U49/2-PGM2 beam line at BESSYII in Berlin. The resonant photoemission spectra (resPES) at the carbon K-edge give a complete picture of the occupied and unoccupied states in these sp2 hybridized system. Above the K-edge the resPES data are dominated by the Auger process causing a C2p4 final state. The Auger lines appear at constant kinetic energy (spectator, 2h) or constant binding energy (participator, 1h). For the features right at the resonance we observe a different Auger decay mechanism. We attribute it to the decay out of an excitonic intermediate state with a long lifetime. It involves three valence hole states. The original primary core hole is filled by a normal KLL Auger decay. The excited electron rests in the excitonic intermediate state and decays later. We discuss the spectral features of such combined spectator-participator decays in detail which are found only close to resonance and only in the localized valence states of excitonic excitation i.e.C1s - 1π* transitions [1, 2, 3]. [1] Richter et al. (2011) BioNanoScience, submitted. [2] Michling et al. (2011) IOP C Ser Mater Sci Eng, submitted. [3] Schmidt et al. (2011) Solid State Ionics, submitted.}, language = {en} } @inproceedings{StaedterSchmeisser, author = {St{\"a}dter, Matthias and Schmeißer, Dieter}, title = {AP-TDS characterization of CO2 methanation catalysts}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Development of new catalysts and their characterization by TDS (thermal desorption spectroscopy) is used in a wide field of applications. In our group we focus on catalysts usable to convert CO2 towards methane by the Sabatier reaction (CO2 + 4H2 → CH4 + 2H2O at 375∘C). For measuring large numbers of samples we designed an AP-TDS (ambient pressure TDS) chamber where various desorption experiments can be performed without bringing the catalyst into vacuum. The well-defined reaction chamber, in terms of temperature, pressure and gas composition (Ar atmosphere), is separated by a pin hole (∅ = 6 µ m) from an external UHV chamber. Evolving species and their composition are monitored by a mass spectrometer attached to the UHV chamber. Our first measurement results on commercially available NiO/SiO2 and Ru/Al2O3 based catalysts, with focus on the identification and enumeration of different adsorption sites for CO2, will be presented. CO2 saturated samples were heated from RT to 1100∘C (heating rate β = 0.3 K/s) while measuring the evolution of the CO2 content. Our measurements show large numbers of different adsorption sites for NiO (200-750∘C) whereas Ru shows only few different sites around 440∘C. For both catalysts, most of the formerly adsorbed CO2 remains at the surface (at 375∘C) available for methanation.}, language = {en} } @inproceedings{TallaridaMichlingDasetal., author = {Tallarida, Massimo and Michling, Marcel and Das, Chittaranjan and Friedrich, Daniel and St{\"a}dter, Matthias and Schmeißer, Dieter}, title = {Role of substrate chemistry in ALD revealed by in-situ techniques}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {We show recent results of our in-situ investigations where the role of substrate chemistry in ALD is outlined. While the usual strategy to develop new properties of ALD films is to find new precursors or new procedures, the influence of substrate chemistry on the growth properties of ALD films has been often underestimated. This has principally a technical reason, as the usual characterization methods (QMS, FTIR, ellipsometry) are only weakly sensitive to the substrate, and a characterization of substrates before ALD is often not possible. Thanks to the use of in-situ characterization methods, including photoemission and X-ray absorption spectroscopy with synchrotron radiation, we are able to determine chemical properties of substrates before ALD and after either half or complete ALD cycles. The substrate chemistry influences the standard Al2O3 ALD with TMA and water [1,2], as well as the TiO2 ALD with TTIP and either water, O2 or O2-plasma. [1] M. Tallarida, K. Kukli, M. Michling, M. Ritala, M. Leskel{\"a} and D. Schmeisser, Chem. Mater. 23, 3159 (2011); [2] M. Tallarida, C. Adelmann, A. Delabie, S. van Elshocht, M. Caymax, and D. Schmeisser, Appl. Phys. Lett. 92, 042906 (2011).}, language = {en} } @inproceedings{FischerRohrbeckWehneretal., author = {Fischer, Christian B. and Rohrbeck, Magdalena and Wehner, Stefan and Richter, Matthias and Schmeißer, Dieter}, title = {Diamond-Like Carbon Coatings on Selected Plastic Materials}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {The manufacturing of synthetic materials and their wide range of use for daily life is accompanied by essential requirements. Besides the basic performance of materials such as flexibility, elasticity, fracture strength and chemical resistance, further determinants are long term stability or biocompatibility. To overcome mismatches in surface characteristics of optimal parent material they can be customized for their intended use resulting in suitable coatings for profitable applications. The determining factor for such modifications is the preservation of basic material performance in addition to the benefit of further advantages like changed adhesive, improved repellent or antibacterial behavior. Protective coatings of selected plastic materials have been realized by depositing a few layers of diamond-like carbon (DLC). The assembly of soft plastic material and robust DLC coating is important for the resulting material characteristics. The detailed understanding of materials interphasing between these unequal materials and the conjunction of carbon centers in chemically different neighborhood is part of the presented work. Results will be transferable to other plastic materials with diverse needs, e.g. energy storage devices, water treatments and coatings for everyday commodities or industrial parts.}, language = {en} } @inproceedings{RohrbeckFischerWehneretal., author = {Rohrbeck, Magdalena and Fischer, Christian B. and Wehner, Stefan and Richter, Matthias and Schmeißer, Dieter}, title = {Diamond-Like Carbon Coatings on Industrial Polyethylene Surfaces}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Synthetic materials are used in a wide variety of fields. Depending on the intended application the plastic material must meet specific requirements. Since the material always interacts with its environment, particular attention is required regarding the surface. Possible damage of the plastic material and further risks could be caused by the adhesion of bacteria, biofilm formation and encrustations. Therefore, bacteria-repellent coatings and surface-modified materials that allow for an effective removal of adhered bacteria are of extremely high interest for many applications. In this study Polyethylene (PE) is chosen as simplest model for relevant plastic materials. Surface modification of PE samples is accomplished by plasma-deposited diamond-like carbon (DLC) coatings to achieve increased abrasion strength and bacterial resistance. Two types of nanometer-scaled DLC films with different layer thicknesses are compared by multiscale microscopic analysis. Further spectroscopic measurements with synchrotron radiation are performed. These results will provide an enhanced understanding of layer formation at the interface between the basic plastic material and the DLC coating and will possibly lead to optimal parameters for the surface coating to achieve improved product characteristics.}, language = {en} } @misc{DasTallaridaSchmeisser, author = {Das, Chittaranjan and Tallarida, Massimo and Schmeißer, Dieter}, title = {Si microstructures laminated with a nanolayer of TiO2 as long-term stable and effective photocathodes in PEC devices}, series = {Nanoscale}, journal = {Nanoscale}, number = {7}, issn = {2040-3364}, doi = {10.1039/C5NR00764J}, pages = {7726 -- 7733}, abstract = {Photoelectrochemical (PEC) water splitting is one of the most emerging fields for green energy generation and storage. Here we show a study of microstructured Si covered by a TiO2 nano-layer. The microstructures are prepared by galvanostatic selective etching of Si. The TiO2 nano-layer was deposited by atomic layer deposition (ALD) to protect the microstructured photocathode against corrosion. The obtained microstructured photocathode showed a shift in the onset potential of 400 mV towards the anodic direction compared to bare Si. The Si microstructures laminated with a nano-layer of TiO2 show stability over 60 hours of measurement.}, language = {en} } @inproceedings{HenkelDasSowinskaetal., author = {Henkel, Karsten and Das, Chittaranjan and Sowinska, Małgorzata and Tallarida, Massimo and Schmeißer, Dieter and Gargouri, Hassan and K{\"a}rkk{\"a}nen, Irina and Schneidewind, Jessica and Gruska, Bernd and Arens, Michael}, title = {Charakterisierung von TiO2-ALD-Schichten und deren Nutzung f{\"u}r die Passivierung von Si-Photokathoden}, series = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 15.04.2015}, booktitle = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 15.04.2015}, editor = {Gl{\"u}ck, B. K. and Schmidt, S. and Stein, E. and Raschke, J{\"o}rg-Uwe and Richter, H.}, publisher = {BTU Cottbus-Senftenberg}, address = {Senftenberg}, pages = {3 -- 8}, abstract = {Wir berichten zun{\"a}chst {\"u}ber den Einfluss der Methode der Atomlagenabscheidung auf die TiO2-Schichteigenschaften. Insbesondere wird der Zusammenhang zwischen Ti3+- sowie Interbandzust{\"a}nden mit elektrischen Kennlinien und deren Einfluss auf funktionale Schichteigenschaften diskutiert. Anschließend werden Mikrostrukturierung, Grenzfl{\"a}chen-Engineering und konforme Abscheidung einer TiO2-ALD-Schutzschicht effektiv zur Performance-Steigerung von p-Si-Photokathoden angewendet.}, language = {de} } @misc{NourbakhshAdelmannSongetal., author = {Nourbakhsh, Amirhasan and Adelmann, Christoph and Song, Yi and Lee, Chang Seung and Asselberghs, Inge and Huyghebaert, Cedric and Brizzi, Simone and Tallarida, Massimo and Schmeißer, Dieter and Elshocht, Sven van and Heyns, Marc and Kong, Jing and Palacios, Tom{\´a}s and De Gendt, Stefan}, title = {Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides}, series = {Nanoscale}, volume = {2015}, journal = {Nanoscale}, number = {7}, issn = {2040-3364}, doi = {10.1039/C5NR01128K}, pages = {10781 -- 10789}, abstract = {Graphene oxide (GO) was explored as an atomically-thin transferable seed layer for the atomic layer deposition (ALD) of dielectric materials on any substrate of choice. This approach does not require specific chemical groups on the target surface to initiate ALD. This establishes GO as a unique interface which enables the growth of dielectric materials on a wide range of substrate materials and opens up numerous prospects for applications. In this work, a mild oxygen plasma treatment was used to oxidize graphene monolayers with well-controlled and tunable density of epoxide functional groups. This was confirmed by synchrotron-radiation photoelectron spectroscopy. In addition, density functional theory calculations were carried out on representative epoxidized graphene monolayer models to correlate the capacitive properties of GO with its electronic structure. Capacitance-voltage measurements showed that the capacitive behavior of Al2O3/GO depends on the oxidation level of GO. Finally, GO was successfully used as an ALD seed layer for the deposition of Al2O3 on chemically inert single layer graphene, resulting in high performance top-gated field-effect transistors.}, language = {en} } @misc{TamangGhoshGarainetal., author = {Tamang, Abiral and Ghosh, Sujoy Kumar and Garain, Samiran and Alam, Md. Mehebub and Haeberle, J{\"o}rg and Henkel, Karsten and Schmeißer, Dieter and Mandal, Dipankar}, title = {DNA-Assisted β‑phase Nucleation and Alignment of Molecular Dipoles in PVDF Film: A Realization of Self-Poled Bioinspired Flexible Polymer Nanogenerator for Portable Electronic Devices}, series = {ACS Applied Materials \& Interfaces}, journal = {ACS Applied Materials \& Interfaces}, number = {7}, issn = {1944-8244}, doi = {10.1021/acsami.5b04161}, pages = {16143 -- 16147}, abstract = {A flexible nanogenerator (NG) is fabricated with a poly(vinylidene fluoride) (PVDF)film, where deoxyribonu-cleic acid (DNA) is the agent for the electroactive β-phase nucleation. Denatured DNA is co-operating to align the molecular-CH2/-CF2 dipoles of PVDF causing piezo- electricity without electrical poling. The NG is capable of harvesting energy from a variety of easily accessible mechanical stress such as human touch, machine vibration, football juggling, and walking. The NG exhibits high piezoelectric energy conversion efficiency facilitating the instant turn-on of several green or blue light-emitting diodes. The generated energy can be used to charge capacitors providing a wide scope for the design of self-powered portable devices.}, language = {en} } @misc{SchmeisserHaeberleRichteretal., author = {Schmeißer, Dieter and Haeberle, J{\"o}rg and Richter, Matthias and Brazda, Petr}, title = {Spin State and Satellite Structures of ε-Fe₂O₃ as determined by Resonant Photoelectron Spectroscopy}, series = {Nuclear Instruments and Methods in Physics Research B}, volume = {2015}, journal = {Nuclear Instruments and Methods in Physics Research B}, number = {364}, issn = {0168-583X}, doi = {10.1016/j.nimb.2015.08.062}, pages = {127 -- 131}, abstract = {We use resonant photoelectron spectroscopy at the Fe2p and the O1s absorption edges to report on spectroscopic investigation of Fe-oxides nanoparticles. We discuss the spectroscopic details like multiple Auger decays, satellite emission in the X-ray absorption process and the core level data. We explain these data by a novel mechanism in which the resonant excitation between Fe3d and Fe4s states are involved. This mechanism is observed when the photo-excited electron becomes polarized by the electron-hole pairs existing in the conduction and valence bands.}, language = {en} } @misc{AlbertonCorreaBrizziSchmeisser, author = {Alberton Corr{\^e}a, Silma and Brizzi, Simone and Schmeißer, Dieter}, title = {Spectroscopic investigation of the electronic structure of thin atomic layer deposition HfO2 films}, series = {Journal of Vacuum Science \& Technology A}, volume = {34}, journal = {Journal of Vacuum Science \& Technology A}, number = {1}, issn = {0734-2101}, doi = {10.1116/1.4935338}, pages = {01A117-1 -- 01A117-8}, abstract = {The electronic structure of HfO2 thin films is investigated employing resonant photoelectron spectroscopy (resPES). The detailed analysis of the O1s resonance profile enables the determination of the partial density of states for the valence and the conduction bands as well as the electronic band gap to be 6.2 eV. The position of the charge neutrality level is evaluated. Thereby, it is demonstrated that the resPES data are able to combine information both for the valence as well as for the conduction band states. In addition, evidences for intrinsic in-gap states attributed to polaronic and charge transfer states are given. Electronic charges within the atomic layer deposition-HfO2films are identified, pointing out that the amount of charges is essential to determine the accurate position of the surface potentials.}, language = {en} } @misc{SowińskaHenkelSchmeisseretal., author = {Sowińska, Małgorzata and Henkel, Karsten and Schmeißer, Dieter and K{\"a}rkk{\"a}nen, Irina and Schneidewind, Jessica and Naumann, Franziska and Gruska, Bernd and Gargouri, Hassan}, title = {Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study}, series = {Journal of Vacuum Science and Technology A}, journal = {Journal of Vacuum Science and Technology A}, number = {34}, issn = {0734-2101}, doi = {10.1116/1.4936227}, pages = {01A127-1 -- 01A127-9}, abstract = {The process parameters' impact of the plasma-enhanced atomic layer deposition (PE-ALD) method on the oxygen to nitrogen (O/N) ratio in titanium oxynitride (TiOxNy) films was studied. Titanium(IV)isopropoxide in combination with NH3 plasma and tetrakis(dimethylamino) titanium by applying N2 plasma processes were investigated. Samples were characterized by the in situ spectroscopic ellipsometry, x-ray photoelectron spectroscopy, and electrical characterization (current-voltage: I-V and capacitance-voltage: C-V) methods. The O/N ratio in the TiOxNy films is found to be very sensitive for their electric properties such as conductivity, dielectric breakdown, and permittivity. Our results indicate that these PE-ALD film properties can be tuned, via the O/N ratio, by the selection of the process parameters and precursor/coreactant combination.}, language = {en} } @misc{PitthandosReisAlbertonCorreaetal., author = {Pitthan, E. and dos Reis, R. and Alberton Corr{\^e}a, Silma and Schmeißer, Dieter and Boudinov, H. I. and Stedile, F. C.}, title = {Influence of CO annealing in metal-oxide-semiconductor capacitors with SiO2 films thermally grown on Si and on SiC}, series = {Journal of Applied Physics}, journal = {Journal of Applied Physics}, number = {119}, issn = {0021-8979}, doi = {10.1063/1.4939836}, pages = {025307-1 -- 025307-6}, abstract = {Understanding the influence of SiC reaction with CO, a by-product of SiC thermal oxidation, is a key point to elucidate the origin of electrical defects in SiC metal-oxide-semiconductor (MOS) devices. In this work, the effects on electrical, structural, and chemical properties of SiO2/Si and SiO2/SiC structures submitted to CO annealing were investigated. It was observed that long annealing times resulted in the incorporation of carbon from CO in the Si substrate, followed by deterioration of the SiO2/Si interface, and its crystallization as SiC. Besides, this incorporated carbon remained in the Si surface (previous SiO2/Si region) after removal of the silicon dioxide film by HF etching. In the SiC case, an even more defective surface region was observed due to the CO interaction. All MOS capacitors formed using both semiconductor materials presented higher leakage current and generation of positive effective charge after CO annealings. Such results suggest that the negative fixed charge, typically observed in SiO2/SiC structures, is not originated from the interaction of the CO by-product, formed during SiC oxidation, with the SiO2/SiC interfacial region.}, language = {en} } @misc{SchmeisserHaeberle, author = {Schmeißer, Dieter and Haeberle, J{\"o}rg}, title = {Intrinsic localized gap states in IGZO and its parent single crystalline TCOs}, series = {Thin Solid Films}, journal = {Thin Solid Films}, number = {603}, issn = {0040-6090}, doi = {10.1016/j.tsf.2016.02.010}, pages = {206 -- 211}, abstract = {We report on the X-ray absorption data for Indium-Gallium-Zink-Oxide thin films, amorphous ZnO films, amorphous SnOx films, and single crystalline In2O3, Ga2O3, ZnO, and SnO2 data. These absorption data probe the empty conduction band states explicitly. Also they allow for an elemental assignment using resonant excitation to derive the contributions of each metal ion. We find that the lowest states appear right at the Fermi energy and result from configuration interaction induced charge transfer states which we consider as intrinsic gap states.}, language = {en} }