@inproceedings{MuellerHenkelPaloumpaetal., author = {M{\"u}ller, Klaus and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Low-cost-Plot-Technologie fur die Mikrostrukturierung von Gassensoren}, series = {Sensoren im Fokus neuer Anwendungen, 5. Dresdner Sensor-Symposium, 10. - 12. Dezember 2001, Dresden}, booktitle = {Sensoren im Fokus neuer Anwendungen, 5. Dresdner Sensor-Symposium, 10. - 12. Dezember 2001, Dresden}, publisher = {w.e.b. Universit{\"a}tsverlag}, address = {Dresden}, isbn = {3-935712-71-5}, pages = {166 -- 169}, abstract = {Bei der Herstellung von Mikrosensoren ist die Strukturierung von Elektroden oder elektrischen Zu-leitungen mit einem hohen Miniaturisierungsgrad ein entscheidender Punkt. Dazu m{\"u}s-sen h{\"a}ufig teure Verfahren (Lithographie, Maskentechniken) herangezogen werden.Dieser Beitrag beschreibt eine low-cost-Technologie zur Herstellung organischer Mikrostrukturen f{\"u}r elektronische und messtechnische Anwendungen im Bereich der Sensorik. Geplottete Strukturen mit Polypyrrol und Poly(3,4-Ethylen-Dioxy-Thiophen), dotiert mit Polystyrolsulfonat (PEDOT/PSS) wurden als Widerstandssensoren f{\"u}r die Detektion von Luftfeuchte ein-gesetzt. Die prinzipielle Ein-satzm{\"o}glichkeit unserer Technik im Bereich der organischen Elektronik konnten wir mit dem Bau organischer Feldeffekttransistoren nachweisen. Mit einem computergesteu-erten Plotter des Typs Rol-land DXY-1150A, Plot-Kapillaren f{\"u}r das Tuschezeichnen, handels{\"u}blichen Folien f{\"u}r wasserl{\"o}sliche Tinten als Substrat und kolloidalen Graphit als leitendes Material konnten wir Aufl{\"o}sungen, das heißt insbesondere Kanalbreiten bzw. Elektrodenabst{\"a}nde im Bereich von 20+10\%B5m (auf 2cm L{\"a}nge) her-stellen.}, language = {de} } @inproceedings{BatchelorBergSimonetal., author = {Batchelor, David R. and Berg, A. and Simon, Sylvio and Wagner, Lothar and Viehweger, Bernd and Schmeißer, Dieter}, title = {Development of Joining Techniques through Pressforming of Steel and Aluminium}, language = {en} } @inproceedings{HenkelEllingDanzetal., author = {Henkel, Karsten and Elling, B. and Danz, R. and B{\"u}chtemann, A. and Straube, Oliver and Paloumpa, Ioanna and Yfantis, Alexandros D. and Schmeißer, Dieter}, title = {Piezoelectric polymer sensor for high pressures in forming machines}, language = {en} } @inproceedings{HuleaHoffmannBrinzaetal., author = {Hulea, Iulian and Hoffmann, Patrick and Brinza, Monica and Batchelor, David R. and Schmeißer, Dieter}, title = {The interface of friction-welded Al-Fe joints. ATB Metallurgy}, language = {en} } @inproceedings{JaegermannSchmeisser, author = {Jaegermann, Wolfram and Schmeißer, Dieter}, title = {Elementary Processes at Solid/Electrolyte Interfaces}, language = {en} } @inproceedings{YfantisTsiniarakisLabrakopoulosetal., author = {Yfantis, Alexandros D. and Tsiniarakis, G. and Labrakopoulos, S. and Yfantis, Alexandros D. and Schmeißer, Dieter}, title = {Conductive polymers of pyrrole as pigments in organic anticorrosive coatings-application for aluminium alloys}, language = {en} } @inproceedings{SidorenkoTokarevKreneketal., author = {Sidorenko, Alexander and Tokarev, Igor and Krenek, Radim and Burkov, Yevgen and Schmeißer, Dieter and Minko, S. and Stamm, Manfred}, title = {Generation of Nanostructured Materials from Thin Films of Block Copolymer Assembles}, series = {Nano-architectured and manostructured materials, fabrication, control and properties, EUROMAT 2003}, booktitle = {Nano-architectured and manostructured materials, fabrication, control and properties, EUROMAT 2003}, editor = {Champion, Yannick and Fecht, Hans-J{\"o}rg}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {3-527-31008-8}, pages = {143 -- 150}, language = {en} } @inproceedings{SchmeisserMuessig, author = {Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim}, title = {Pr-silicate formation on SiO2 covered 3C-SiC(111)}, series = {Physics of semiconductors, 27th International Conference on the Physics of Semiconductors}, booktitle = {Physics of semiconductors, 27th International Conference on the Physics of Semiconductors}, publisher = {AIP, American Inst. of Physics}, address = {New York, NY}, isbn = {0-7354-0257-4}, pages = {75 -- 76}, language = {en} } @inproceedings{Schmeisser, author = {Schmeißer, Dieter}, title = {Chemical Bonding in Low-k Dielectric Materials for Interconnect Isolation: Characterization using XAS and EELS}, language = {en} } @inproceedings{HoffmannSchmeisserEngelmannetal., author = {Hoffmann, Patrick and Schmeißer, Dieter and Engelmann, Hans-J{\"u}rgen and Zschech, Ehrenfried and Stegmann, Heiko and Himpsel, Franz J. and Denlinger, Jonathan D.}, title = {Characterization of chemical bonding in low-k dielectric materials for interconnect isolation: A XAS and EELS Study}, series = {Materials, technology and reliability of low-k dielectrics and copper interconnects, symposium held April 18 - 21, 2006, San Francisco, California}, booktitle = {Materials, technology and reliability of low-k dielectrics and copper interconnects, symposium held April 18 - 21, 2006, San Francisco, California}, editor = {Tsui, Ting Y.}, publisher = {Materials Research Society}, address = {Warrendale, Pa.}, isbn = {978-1-55899-870-5}, pages = {55 -- 62}, language = {en} } @inproceedings{SchmeisserZhengPerezDieste, author = {Schmeißer, Dieter and Zheng, Fan and Perez-Dieste, Virginia}, title = {Silicate Formation at the Interface of Pr-Oxide as a High-K Dielectric and Si(001) surfaces}, language = {en} } @inproceedings{DomaradzkiSchmeisserKaczmareketal., author = {Domaradzki, Jarosław and Schmeißer, Dieter and Kaczmarek, Danuta and Beuckert, Guido and Prociow, E. L. and Borkowska, Angnieszka and Kudrawiec, Robert and Misiewicz, J.}, title = {Characterization of Nanocrystalline TiO2 - HfO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering}, language = {en} } @inproceedings{SchmeisserZhengHimpseletal., author = {Schmeißer, Dieter and Zheng, Fan and Himpsel, Franz J. and Engelmann, Hans-J{\"u}rgen and Zschech, Ehrenfried}, title = {Silicate Formation at the Interface of High-k Dielectrics and Si(001) Surfaces}, language = {en} } @inproceedings{ZschechStegmannSchmeisseretal., author = {Zschech, Ehrenfried and Stegmann, Heiko and Schmeißer, Dieter and Hoffmann, Patrick}, title = {Chemical Bonding, Permittivity, and Elastic Properties in Locally Modified Organosilicate Glass}, language = {en} } @inproceedings{TallaridaSchmeisserZheng, author = {Tallarida, Massimo and Schmeißer, Dieter and Zheng, Fan}, title = {X-ray Absorption and Photoemission Spectroscopy of 3C- and 4H-SiC}, language = {en} } @inproceedings{TallaridaSohalSchmeisser, author = {Tallarida, Massimo and Sohal, Rakesh and Schmeißer, Dieter}, title = {Resonant photoemission at the oxygen K edge as a tool to study the electronic properties of defects at SiO2/Si and SiO2/SiC interfaces}, language = {en} } @inproceedings{SohalTorcheSchmeisser, author = {Sohal, Rakesh and Torche, Mohamed and Schmeißer, Dieter}, title = {Al-Oxynitrides as a Buffer Layer for Pr2O3/SiC Interfaces}, language = {en} } @inproceedings{SchmeisserWehnerHoffmannetal., author = {Schmeißer, Dieter and Wehner, Stefan and Hoffmann, Patrick and Brand, Helmut R. and K{\"u}ppers, J{\"u}rgen}, title = {Influence of the Substrate on the Pattern Formation of a Surface Reaction}, series = {Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006}, booktitle = {Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006}, editor = {Descalzi, Orazio}, publisher = {AIP Publishing}, address = {Melville, New York}, isbn = {978-0-7354-0421-2}, pages = {121 -- 126}, language = {en} } @inproceedings{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {64 -- 68}, language = {en} } @inproceedings{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {47 -- 51}, language = {en} } @inproceedings{KlocekFriedrichSchmeisseretal., author = {Klocek, Jolanta and Friedrich, Daniel and Schmeißer, Dieter and Hecker, Michael and Zschech, Ehrenfried}, title = {The stability of C60 and its derivatives upon handling in microsystems technologies}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {43 -- 46}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films}, language = {en} } @inproceedings{HeimFriedrichGuttmannetal., author = {Heim, S. and Friedrich, Daniel and Guttmann, P. and Rehbein, S. and Chumakov, Dmytro and Ritz, Y. and Schneider, G. and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects}, language = {en} } @inproceedings{SeifarthWilkeWalczyketal., author = {Seifarth, Olaf and Wilke, A. and Walczyk, Christian and Dabrowski, Jarek Marek and Zaumseil, Peter and Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111)}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {285 -- 286}, language = {en} } @inproceedings{HenkelBurkovBergholzetal., author = {Henkel, Karsten and Burkov, Yevgen and Bergholz, Matthias and Karavaev, Konstantin and Sohal, Rakesh and Torche, Mohamed and Schmeißer, Dieter}, title = {Al-Oxynitride as a buffer layer for high-k dielectrics}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {161 -- 162}, language = {en} } @inproceedings{HenkelMandalSeimeetal., author = {Henkel, Karsten and Mandal, Dipankar and Seime, Bernd and Paloumpa, Ioanna and Lazareva, I. and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Electrical investigations on MFIS structures consisting P[VDF/TrFE] as ferro-electric layer for non-volatile memory applications}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {159 -- 160}, language = {en} } @inproceedings{TallaridaKaravaevSchmeisseretal., author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {HfO2 ALD-growth studied by in situ photoemission}, series = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, pages = {289 -- 290}, language = {en} } @inproceedings{WyrodekTallaridaWeisheitetal., author = {Wyrodek, Jakub and Tallarida, Massimo and Weisheit, Martin and Schmeißer, Dieter}, title = {Determination of interfacial layers in high-k nanomaterials by ADXPS measurements}, language = {en} } @inproceedings{StarzykTallaridaSchmeisser, author = {Starzyk, Łukasz and Tallarida, Massimo and Schmeißer, Dieter}, title = {Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition}, language = {en} } @inproceedings{BroczkowskaKlocekFriedrichetal., author = {Broczkowska, K. and Klocek, Jolanta and Friedrich, Daniel and Henkel, Karsten and Kolanek, Krzysztof and Urbanowicz, A. and Schmeißer, Dieter and Miller, M. and Zschech, Ehrenfried}, title = {Fullerene based materials for ultra-low-k application}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-8324-2}, pages = {39 -- 43}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisser, author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-situ Atomic Layer Deposition growth of Hafnium oxide}, series = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, booktitle = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, editor = {Vierhaus, Heinrich Theodor}, publisher = {BTU}, address = {Cottbus}, pages = {13 -- 19}, language = {en} } @inproceedings{HenkelTorcheSohaletal., author = {Henkel, Karsten and Torche, Mohamed and Sohal, Rakesh and Schwiertz, Carola and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Pr-O-N Dielectrics for MIS Stacks on Silicon and Silicon Carbide Surfaces}, series = {Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A.}, booktitle = {Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A.}, editor = {Dudley, Michael}, publisher = {Materials Research Society}, address = {Warrendale, Pa.}, isbn = {978-1-55899-867-4}, pages = {353 -- 358}, language = {en} } @inproceedings{MuellerPaloumpaSchmeisser, author = {M{\"u}ller, Klaus and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Carbon-Plot-Micostructuring for All-Polymer-Transistors}, language = {en} } @inproceedings{YfantisBourdasLambrakopoulosetal., author = {Yfantis, Alexandros D. and Bourdas, N. and Lambrakopoulos, S. and Yfantis, N. and Paloumpa, Ioanna and Yfantis, Alexandros D.}, title = {Conductive polymers precoats-application on metallisation of ABS}, language = {en} } @inproceedings{YfantisBourdasLambrakopoulosetal., author = {Yfantis, Alexandros D. and Bourdas, N. and Lambrakopoulos, S. and Yfantis, N. and Paloumpa, Ioanna and Yfantis, Alexandros D.}, title = {Primers of conductive polymers-application in powder coatings technology}, language = {en} } @inproceedings{YfantisBourdasYfantisetal., author = {Yfantis, Alexandros D. and Bourdas, N. and Yfantis, N. and Yfantis, Alexandros D. and Lambrakopoulos, S. and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {A study of anticorrosive conversion coatings based on conductive polymers of pyrrole}, language = {en} } @inproceedings{HoffmannMikaloBatcheloretal., author = {Hoffmann, Patrick and Mikalo, Ricardo Pablo and Batchelor, David R. and Beuckert, Guido and Schmeißer, Dieter and Kittler, Martin and Ourmazd, A. and Lewerenz, Hans-Joachim}, title = {Solare Energieumwandlung in d{\"u}nnen Schichten}, language = {de} } @inproceedings{HoffmannBatchelorSchmeisser, author = {Hoffmann, Patrick and Batchelor, David R. and Schmeißer, Dieter}, title = {Spectro-Microscopic analyses in metallurgical systems: spheroidic graphite in cast iron and the interface of friction-welded Al-Fe joints}, language = {en} } @inproceedings{GehrlichOhsiekKleinetal., author = {Gehrlich, Lukas and Ohsiek, Susanne and Klein, C. and Geiß, M. and Friedemann, Michael and K{\"u}cher, Peter and Schmeißer, Dieter}, title = {Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements}, series = {2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM 2011), Dresden, Germany, 8 - 12 May 2011}, booktitle = {2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM 2011), Dresden, Germany, 8 - 12 May 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-0503-8}, doi = {10.1109/IITC.2011.5940322}, pages = {82 -- 84}, language = {en} } @inproceedings{MandalHenkelSchmeisser, author = {Mandal, Dipankar and Henkel, Karsten and Schmeißer, Dieter}, title = {Control of the Crystalline Polymorph, Molecular Dipole and Chain Orientations in P(VDF-HFP) for High Electrical Energy Storage Application}, series = {International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011}, booktitle = {International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011}, publisher = {IEEE}, isbn = {978-1-4577-2035-2}, doi = {10.1109/NSTSI.2011.6111801}, language = {en} } @inproceedings{RichterSchmeisser, author = {Richter, Matthias and Schmeißer, Dieter}, title = {The Co2p oxidation state in Co-PI catalysts}, series = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, booktitle = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, publisher = {The Electrochemical Society}, pages = {1803}, language = {en} } @inproceedings{RichterFriedrichSchmeisser, author = {Richter, Matthias and Friedrich, Daniel and Schmeißer, Dieter}, title = {Multiple Auger decay at resonant photo-excitation in carbon thin films}, series = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, booktitle = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, publisher = {The Electrochemical Society}, pages = {3509}, language = {en} } @inproceedings{SchmeisserRichterTallarida, author = {Schmeißer, Dieter and Richter, Matthias and Tallarida, Massimo}, title = {Intrinsic defects in TiO2 to explain resistive switching devices}, series = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, booktitle = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, editor = {Heber, J{\"o}rg and Schlom, Darrell and Tokura, Yoshinori and Waser, Rainer and Wuttig, Matthias}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-41191-7}, doi = {10.1002/9783527667703.ch45}, pages = {255 -- 256}, language = {en} } @inproceedings{MandalHenkelDasetal., author = {Mandal, Dipankar and Henkel, Karsten and Das, Suken and Schmeißer, Dieter}, title = {Control of β- and γ-Phase formation in electroactive P(VDF-HFP) films by silver nano-particle doping}, series = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, booktitle = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, editor = {Heber, J{\"o}rg and Schlom, Darrell and Tokura, Yoshinori and Waser, Rainer and Wuttig, Matthias}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-41191-7}, doi = {10.1002/9783527667703.ch69}, pages = {640 -- 641}, language = {en} } @inproceedings{Tallarida, author = {Tallarida, Massimo}, title = {III-V/oxide interfaces investigated with synchrotron radiation photoemission spectroscopy}, series = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, booktitle = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, publisher = {The Electrochemical Society}, pages = {2587 -- 2587}, language = {en} } @inproceedings{MaiDauderstaedtPahneretal., author = {Mai, Andreas and Dauderst{\"a}dt, Ulrike and Pahner, D. and Krellmann, M. and Schmeißer, Dieter and Wagner, M.}, title = {In situ determination of laser induced degradation of micro-mirror arrays}, series = {International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011}, booktitle = {International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1651-5}, doi = {10.1109/STYSW.2011.6155850}, pages = {84 -- 88}, abstract = {The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test.}, language = {en} } @inproceedings{CuypersDorpTallaridaetal., author = {Cuypers, Daniel and Dorp, Dennis H. von and Tallarida, Massimo and Brizzi, Simone and Rodriguez, Leonard and Conard, Thierry and Arnauts, Sophia and Schmeißer, Dieter and Adelmann, Christoph and De Gendt, Stefan}, title = {Study of InP Surfaces After Wet Chemical Treatments}, series = {Meeting Abstracts-Electrochemical Society, San Francisco, 2013}, booktitle = {Meeting Abstracts-Electrochemical Society, San Francisco, 2013}, publisher = {The Electrochemical Society}, pages = {S. 2132}, language = {en} } @inproceedings{HenkelTallaridaHaeberleetal., author = {Henkel, Karsten and Tallarida, Massimo and Haeberle, J{\"o}rg and Gargouri, Hassan and Naumann, Franziska and Gruska, Bernd and Arens, Michael and Schmeißer, Dieter}, title = {PE-ALD-Al2O3-Schichten f{\"u}r die Passivierung von Solarzellen}, series = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, booktitle = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, editor = {Gl{\"u}ck, Bernhard K. and Schmidt, Sindy and Stein, Erhard and Raschke, J{\"o}rg-Uwe and Richter, Hans}, publisher = {Cottbus-Senftenberg}, address = {BTU}, pages = {7 -- 14}, abstract = {D{\"u}nne Al2O3-Schichten wurden bei Substrattemperaturen zwischen Raumtemperatur und 200°C mittels PE-ALD auf Si-Substraten abgeschieden und ellipsometrisch, spektroskopisch und elektrisch charakterisiert. Ihr Potenzial f{\"u}r die chemische und Feldeffektpassivierung der Oberfl{\"a}chenrekombination wird bewertet.}, language = {de} } @inproceedings{KrenekCimrovaSeifarthetal., author = {Krenek, Radim and Cimrova, Vera and Seifarth, Olaf and Bocharova, Vera and Gorodyska, Ganna and Sidorenko, Alexander and Schmeißer, Dieter and Stamm, Manfred}, title = {Electronic Properties of Metals Embedded into Porous Polymeric Nanotemplates}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 108}, abstract = {We report on electrical measurements (current-voltage characteristics (CVC)) of metals which are templated via porous polymeric nanotemplates. The nanotemplates are based on self-organization of poly(styrene-block 4-vinylpyridine) (PS-PVP). The cylindrical pores of 8 nm in the diameter are ordered in a hexagonal lattice (24 nm in the period). Chromium and gold were embedded in the nanotemplates by magnetron sputtering, nickel was electrodeposited. These thin films were characterized by AFM, ellipsometry, x-ray reflectivity, XAS, XPS and NEXAFS. CVC were acquired by a connection common for light emitting diodes discussing a further use of nanotemplated metals in these devices. To make the connection, the nanotemplate was deposited on glass with ITO electrodes, then metal was embedded into it and finally Al electrodes were evaporated on the device. Behaviour of space charge limited currents (SCLC) was observed. Also, we deal with the electrical mode of AFM as well. Finally electronic behaviour of the metallic nanorods embedded in polymeric nanotemplates is discussed in respective to the structure and chemical composition obtained by AFM and x-ray techniques.}, language = {en} } @inproceedings{TallaridaSohalSchmeisser, author = {Tallarida, Massimo and Sohal, Rakesh and Schmeißer, Dieter}, title = {Electronic properties of the 2x1 3C-SiC surface reconstruction studied with resonant photoemission}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, isbn = {0420-0195}, pages = {S. 239}, abstract = {We have studied the 2x1 reconstructed surface of the 3C-SiC polytype by means of photoemission spectroscopy. The reconstruction was characterized through Si2p and C1s core level and angle-integrated valence band spectroscopy, and confirmed by the observation of a two-domain 2x1 LEED pattern. The electronic properties of this surface were investigated by collecting valence band spectra at photon energies near the Si2p and C1s absorption edges. The results show a strong dependence of the photoemission intensity on the excitation energy with characteristic resonances for certain valence band features. With a detailed study of the resonances we are able to assign the electronic origin of the resonating states and the nature of the electronic transition near the absorption edges.}, language = {en} }