@misc{KukliAarikAidlaetal., author = {Kukli, Kaupo and Aarik, Jaan and Aidla, Aleks and Uustare, Teet and J{\~o}gi, Indrek and Lu, Jun and Tallarida, Massimo and Kemell, Marianna and Kiisler, Alma- Asta and Ritala, Mikko and Leskel{\"a}, Markku}, title = {Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1´-methyl-ruthenocene}, series = {Journal of Crystal Growth}, volume = {312}, journal = {Journal of Crystal Growth}, number = {12-13}, issn = {0022-0248}, doi = {10.1016/j.jcrysgro.2010.03.033}, pages = {2025 -- 2032}, language = {en} } @misc{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope}, language = {en} } @misc{HoZschechSchmeisseretal., author = {Ho, Paul S. and Zschech, Ehrenfried and Schmeißer, Dieter and Meyer, Moritz Andreas and Huebner, Rene and Hauschildt, Meike and Zhang, Lijuan and Gall, Martin and Kraatz, Matthias}, title = {Scaling effects on microstructure and reliability for cu interconnects}, language = {en} } @misc{WehnerKarpitschkaBurkovetal., author = {Wehner, Stefan and Karpitschka, Stefan and Burkov, Yevgen and Schmeißer, Dieter and K{\"u}ppers, J{\"u}rgen and Brand, Helmut R.}, title = {Stochastic aspects of pattern formation during the catalytic oxidation of CO on Pd(111)}, language = {en} } @misc{HenkelSeimePaloumpaetal., author = {Henkel, Karsten and Seime, Bernd and Paloumpa, Ioanna and M{\"u}ller, Klaus and Schmeißer, Dieter}, title = {Buffer layer incestigaions on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene]}, series = {IOP conference series : Materials Science and Engineering}, volume = {8}, journal = {IOP conference series : Materials Science and Engineering}, number = {1}, issn = {1757-899X}, pages = {012036}, language = {en} } @misc{SchmeisserHenkelBergholzetal., author = {Schmeißer, Dieter and Henkel, Karsten and Bergholz, Matthias and Tallarida, Massimo}, title = {The band gab and band offset in ultrathin oxide-semiconductor heterostructures}, language = {en} } @inproceedings{MuellerSchmeisser, author = {M{\"u}ller, Sebastian and Schmeißer, Dieter}, title = {Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {64 -- 68}, language = {en} } @inproceedings{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {47 -- 51}, language = {en} } @inproceedings{KlocekFriedrichSchmeisseretal., author = {Klocek, Jolanta and Friedrich, Daniel and Schmeißer, Dieter and Hecker, Michael and Zschech, Ehrenfried}, title = {The stability of C60 and its derivatives upon handling in microsystems technologies}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {43 -- 46}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films}, language = {en} } @incollection{SchwiertzHenkelBleietal., author = {Schwiertz, Carola and Henkel, Karsten and Blei, S. and Heidenreich, R. and Schmeißer, Dieter}, title = {Nachweis von Aerosolen (<1µm) mit Schwingquarzimpedanzspektroskopie}, language = {de} } @misc{ZschechHoSchmeisseretal., author = {Zschech, Ehrenfried and Ho, O. S. and Schmeißer, Dieter and Meyer, Moritz Andreas and Vairagar, A. V. and Schneider, G. and Hauschildt, Meike and Kraatz, Matthias and Sukharev, V.}, title = {Geometry and Microstructure Effect on EM-Induced Copper Interconnect Degradation}, series = {IEEE Transactions on Device and Materials Reliability}, volume = {9}, journal = {IEEE Transactions on Device and Materials Reliability}, number = {1}, issn = {1530-4388}, pages = {20 -- 30}, language = {en} } @inproceedings{HeimFriedrichGuttmannetal., author = {Heim, S. and Friedrich, Daniel and Guttmann, P. and Rehbein, S. and Chumakov, Dmytro and Ritz, Y. and Schneider, G. and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects}, language = {en} } @misc{SchmeisserHenkelMuelleretal., author = {Schmeißer, Dieter and Henkel, Karsten and M{\"u}ller, Klaus and Tallarida, Massimo}, title = {Interface Reactions in Ultrathin Functional Dielectric Films}, language = {en} } @misc{SchmeisserTallaridaHenkeletal., author = {Schmeißer, Dieter and Tallarida, Massimo and Henkel, Karsten and M{\"u}ller, Klaus and Mandal, Dipankar and Chumakov, Dmytro and Zschech, Ehrenfried}, title = {Characterization of oxidic and organic materials with synchrotron radiation based XPS and XAS}, language = {en} } @misc{LazarevaKovalMuelleretal., author = {Lazareva, I. and Koval, Yuri and M{\"u}ller, P. and M{\"u}ller, Klaus and Henkel, Karsten and Schmeißer, Dieter}, title = {Interface screening and imprint in pol(vinylidene fluoride/trifluoroethylene) ferroelectric field effect transistors}, language = {en} } @incollection{MuellerBurkovMandaletal., author = {M{\"u}ller, Klaus and Burkov, Yevgen and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Goryachko, Andriy and Schmeißer, Dieter}, title = {Microscopic and spectroscopic characterization of interfaces and dielectric layers for OFET devices}, series = {Organic Electronics : structural and Electronic Properties of OFETs}, booktitle = {Organic Electronics : structural and Electronic Properties of OFETs}, editor = {W{\"o}ll, Christof}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-40810-8}, pages = {445 -- 468}, language = {en} } @misc{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {HfO2/Si interface formation in atomic layer deposition films: an in situ investigation}, language = {en} } @misc{HenkelLazarevaMandaletal., author = {Henkel, Karsten and Lazareva, I. and Mandal, Dipankar and Paloumpa, Ioanna and M{\"u}ller, Klaus and Koval, Yuri and M{\"u}ller, P. and Schmeißer, Dieter}, title = {Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using Poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications}, language = {en} } @misc{HenkelBurkovKaravaevetal., author = {Henkel, Karsten and Burkov, Yevgen and Karavaev, Konstantin and Torche, Mohamed and Schwiertz, Carola and Schmeißer, Dieter}, title = {Optimization of the AION buffer layer for PrxOy/Si stacks}, language = {de} }