@misc{BeckerStorckLiuetal., author = {Becker, L. and Storck, Peter and Liu, Y. and Schwalb, G. and Schroeder, Thomas and Fischer, Inga Anita and Albrecht, M.}, title = {Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1- xGex/Si (001) layers through dynamic growth rate control}, series = {Journal of Applied Physics}, volume = {135}, journal = {Journal of Applied Physics}, number = {20}, issn = {0021-8979}, doi = {10.1063/5.0204318}, pages = {10}, language = {en} }