@misc{KolkovskyStuebnerLangaetal., author = {Kolkovsky, Vladimir and St{\"u}bner, R. and Langa, Sergiu and Wende, U. and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, series = {Solid-State Electronics}, volume = {123}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, pages = {89 -- 95}, language = {en} }