@misc{ZeipertBoeckleWilkerOpfermannetal., author = {Zeipert-B{\"o}ckle, Silke and Wilker, Viola and Opfermann, Johannes and Linke, Dietmar}, title = {Thermokinetische Analyse des Sintern unterschiedlich pr{\"a}parierter Si-Al-Y-O-N-Keramik}, abstract = {Kurzreferat zum Poster auf der 11. Vortragstagung der Gesellschaft Deutscher Chemiker, Fachgruppe Festk{\"o}rperchemie und Materialforschung, "Nichtst{\"o}chiometrische Festk{\"o}rper - Grundlagen und Anwendungen", Dresden 24.-26.09.2002}, language = {de} } @misc{WilkerZeipertBoeckleLinke, author = {Wilker, Viola and Zeipert-B{\"o}ckle, Silke and Linke, Dietmar}, title = {Sialon-Glas-Komposite}, abstract = {Poster auf dem Antragskolloquium zum DFG-Schwerpunktprogramm "Substitutionseffekte in ionischen Festk{\"o}rpern", Bonn-R{\"o}ttgen, 08.-09.04.2002 Materialforschung, "Nichtst{\"o}chiometrische Festk{\"o}rper - Grundlagen und Anwendungen", Dresden 24.-26.09.2002}, language = {de} } @misc{WilkerViethLinke, author = {Wilker, Viola and Vieth, Siegfried and Linke, Dietmar}, title = {Materialforschung zu Hochleistungskeramik auf der Basis von Siliciumnitrid Si3N4}, abstract = {Posterbeitrag, 2. Innovationskongreß "Chemie und Biotechnologie", 13./14.05.2003, Martin-Luther-Universit{\"a}t Halle-Wittenberg}, language = {de} } @inproceedings{ZeipertBoeckleWilkerFinkeetal., author = {Zeipert-B{\"o}ckle, Silke and Wilker, Viola and Finke, B. and Linke, Dietmar}, title = {Das Sintern einer Si-Al-Y-O-N-Keramik {\"u}ber unterschiedliche Reaktionswege}, language = {de} } @inproceedings{ZeipertBoeckleWilkerLinke, author = {Zeipert-B{\"o}ckle, Silke and Wilker, Viola and Linke, Dietmar}, title = {Vom chemisch-reaktiven zum physikalischen Sintern - Schwindungsverhalten unterschiedlich pr{\"a}parierter Si-Al-Y-O-N-Proben identischer Bruttozusammensetzung}, language = {de} } @misc{GaydardzhievGusoviusWilkeretal., author = {Gaydardzhiev, Stoyan and Gusovius, Hans-J{\"o}rg and Wilker, Viola and Ay, Peter}, title = {Gel-casted porous Al2O3 ceramics by use of natural fibres as pore developers}, series = {Journal of Porous Materials}, volume = {15}, journal = {Journal of Porous Materials}, number = {4}, issn = {1573-4854}, pages = {475 -- 480}, language = {en} } @misc{GaydardzhievWilkerScheffler, author = {Gaydardzhiev, Stoyan and Wilker, Viola and Scheffler, Michael}, title = {Dip-coating of fibrous natural materials for alumina tube manufacturing}, series = {Advanced Engineering Materials}, volume = {10}, journal = {Advanced Engineering Materials}, number = {3}, issn = {1527-2648}, pages = {223 -- 226}, language = {en} } @misc{KotHenkelNaumannetal., author = {Kot, Małgorzata and Henkel, Karsten and Naumann, Franziska and Gargouri, Hassan and Tarnawska, Lidia Lupina and Wilker, Viola and Kus, Peter and Pożarowska, Emilia and Garain, Samiran and Rouissi, Zied and Schmeißer, Dieter}, title = {Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources}, series = {Journal of Vacuum Science and Technology A}, volume = {37}, journal = {Journal of Vacuum Science and Technology A}, number = {2}, issn = {0734-2101}, doi = {10.1116/1.5079628}, pages = {11}, abstract = {A comparative study of thin aluminum nitride (AlN) films deposited by plasma-enhanced atomic layer deposition in the SENTECH SI ALD LL system applying either a direct inductively coupled plasma (ICP) or an indirect capacitively coupled plasma (CCP) source is presented. The films prepared with the ICP source (based on a planar triple spiral antenna) exhibit improved properties concerning the growth rate per cycle, total cycle duration, homogeneity, refractive index, fixed and mobile electrical charges, and residual oxygen content compared to the CCP source, where the comparison is based on the applied plasma power of 200 W. The increase of the plasma power to 600 W in the ICP process significantly reduces the residual oxygen content and enhances the electrical breakdown field. The AlN layers grown under these conditions, with a growth rate per cycle of 1.54 {\AA}/cycle, contain residual oxygen and carbon concentrations of about 10\% and 4\%, respectively, and possess a refractive index of 2.07 (at 632.8 nm).}, language = {en} }