@inproceedings{MaiDauderstaedtPahneretal., author = {Mai, Andreas and Dauderst{\"a}dt, Ulrike and Pahner, D. and Krellmann, M. and Schmeißer, Dieter and Wagner, M.}, title = {In situ determination of laser induced degradation of micro-mirror arrays}, series = {International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011}, booktitle = {International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1651-5}, doi = {10.1109/STYSW.2011.6155850}, pages = {84 -- 88}, abstract = {The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test.}, language = {en} } @misc{SchenkGrahmannSandneretal., author = {Schenk, Harald and Grahmann, Jan and Sandner, Thilo and Wagner, Michael and Dauderst{\"a}dt, Ulrike and Schmidt, Jan-Uwe}, title = {Micro mirrors for high-speed laser deflections and patterning}, series = {Physics Procedia}, volume = {56}, journal = {Physics Procedia}, issn = {1875-3892}, doi = {10.1016/j.phpro.2014.08.090}, pages = {7 -- 18}, language = {en} } @misc{DauderstaedtDuerrGehneretal., author = {Dauderst{\"a}dt, Ulrike and D{\"u}rr, Peter and Gehner, Andreas and Wagner, Michael and Schenk, Harald}, title = {Analog Spatial Light Modulators based on Micromirror Arrays}, series = {Micromachines, Special Issue "Beam Steering via Arrayed Micromachines"}, volume = {12}, journal = {Micromachines, Special Issue "Beam Steering via Arrayed Micromachines"}, number = {5}, issn = {2072-666X}, doi = {10.3390/mi12050483}, pages = {12}, language = {en} }