@article{SchulzeSchuldtKahleetal., author = {Schulze, Knut and Schuldt, U. and Kahle, Olaf and Schulz, Stefan E. and Uhlig, M.}, title = {Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization}, doi = {10.1016/j.mee.2005.07.016}, language = {en} } @inproceedings{BauerDreyerKahleetal., author = {Bauer, Monika and Dreyer, Christian and Kahle, Olaf and Schuldt, U. and Uhlig, C. and Schulze, K. and Schulz, Stefan E. and Uhlig, M. and Geßner, Thomas}, title = {Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization}, language = {en} }