@misc{SickerHeberBerndtetal., author = {Sicker, Cornelius and Heber, J{\"o}rg and Berndt, Dirk and R{\"u}ckerl, Florian and Tinevez, Jean-Yves and Shorte, Spencer and Wagner, Michael and Schenk, Harald}, title = {Spatially resolved contrast measurement of diffractive micromirror arrays}, series = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, journal = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-465-3}, pages = {93750D-1 -- 93750D-10}, language = {en} }