@misc{SchenkSandnerDrabeetal., author = {Schenk, Harald and Sandner, Thilo and Drabe, Christian and Klose, Thomas and Jung, Denis}, title = {Micromechanical device with tilted electrodes}, language = {en} } @misc{JungDrabeSchenketal., author = {Jung, Denis and Drabe, Christian and Schenk, Harald and Sandner, Thilo and Klose, Thomas and Wolter, Alexander}, title = {Method for generating a micromechanical structure}, language = {en} } @misc{KloseWolterSchenk, author = {Klose, Thomas and Wolter, Alexander and Schenk, Harald}, title = {Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use}, language = {en} }