@misc{GuaracoLangaStolzetal., author = {Guaraco, Jorge Mario Monsalve and Langa, Sergiu and Stolz, Michael and Mrosk, Andreas and Kaiser, Bert and Schenk, Harald}, title = {Design of micromachines under uncertainty with the sample-average approximation method}, series = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, volume = {18 (2024)}, journal = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, number = {2}, publisher = {Japan Society of Mechanical Engineers}, issn = {1881-3054}, doi = {10.1299/jamdsm.2024jamdsm0018}, language = {en} } @misc{MelnikovSchenkMonsalveGuaracaoetal., author = {Melnikov, Anton and Schenk, Hermann A. G. and Monsalve Guaracao, Jorge Mario and Wall, Franziska and Stolz, Michael and Mrosk, Andreas and Langa, Sergiu and Kaiser, Bert}, title = {Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation}, series = {Microsystems \& Nanoengineering}, volume = {7}, journal = {Microsystems \& Nanoengineering}, number = {1}, issn = {2055-7434}, doi = {10.1038/s41378-021-00265-y}, abstract = {Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.}, language = {en} }