@inproceedings{BauerDreyerKahleetal., author = {Bauer, Monika and Dreyer, Christian and Kahle, Olaf and Schuldt, U. and Uhlig, C. and Schulze, K. and Schulz, Stefan E. and Uhlig, M. and Geßner, Thomas}, title = {Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization}, language = {en} }