@misc{KendaKraftTortschanoffetal., author = {Kenda, Andreas and Kraft, Martin and Tortschanoff, Andreas and Scherf, Werner and Sandner, Thilo and Schenk, Harald and Luettjohann, Stephan and Simon, Apolline}, title = {Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives}, series = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, journal = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-038-9}, pages = {910102-1 -- 910102-10}, language = {en} }