@misc{SchenkShashankGaudet, author = {Schenk, Harald and Shashank, S. and Gaudet, M.}, title = {MEMS actuator and method for controlling a MEMS actuator}, abstract = {The invention provides a MEMS actuator comprising at least one actuator cell. The actuator cell comprises a first connecting piece and a second connecting piece. A mechanical connection between the first connecting piece and the second connecting piece comprises at least one connector unit. The connector unit comprises a first beam and a second beam being serially connected with the first beam so as to provide for a meandered shape. At least the first beam comprises a serial arrangement of a plurality of actuator elements configured to change a bending of the first beam upon actuation.}, language = {en} }