@misc{EhrigSchenkWalletal., author = {Ehrig, Lutz and Schenk, Hermann and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Langa, Sergiu and Kaiser, Bert and Conrad, Holger}, title = {Electrostatic all-silicon MEMS audio transducer for in-ear audio applications - acoustic measurements and modelling approach}, series = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, journal = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, doi = {10.18154/RWTH-CONV-239893}, pages = {6}, language = {en} } @inproceedings{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically in-plane driven silicon micropump for modular configuration}, series = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, booktitle = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, publisher = {University of Twente}, address = {Enschede}, pages = {57 -- 60}, language = {en} } @misc{SpitzWallSchenketal., author = {Spitz, Barbara and Wall, Franziska and Schenk, Hermann and Melnikov, Anton and Ehrig, Lutz and Langa, Sergiu and Stolz, Michael and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Pufe, Wolfram}, title = {Audio-Transducer f{\"u}r In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {54 -- 57}, abstract = {Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.}, language = {de} } @misc{MelnikovSchenkWalletal., author = {Melnikov, Anton and Schenk, Hermann and Wall, Franziska and Spitz, Barbara and Ehrig, Lutz and Langa, Sergiu and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, doi = {10.1117/12.2551271}, language = {en} } @inproceedings{GaudetUhligStolzetal., author = {Gaudet, Matthieu and Uhlig, Sebastian and Stolz, Michael and Arscott, S. and Conrad, Holger and Langa, Sergiu and Kaiser, Bert and Schenk, Harald}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, series = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-5078-9}, pages = {175 -- 178}, language = {en} } @misc{LangaConradKaiseretal., author = {Langa, Sergiu and Conrad, Holger and Kaiser, Bert and Stolz, Michael and Gaudet, Matthieu and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive}, series = {Microsystem Technologies}, volume = {23}, journal = {Microsystem Technologies}, number = {1}, issn = {1432-1858}, doi = {10.1007/s00542-017-3360-6}, pages = {5697 -- 5708}, language = {en} } @misc{ConradSchenkKaiseretal., author = {Conrad, Holger and Schenk, Harald and Kaiser, Bert and Langa, Sergiu and Gaudet, Matthieu and Schimmanz, Klaus and Stolz, Michael and Lenz, Miriam}, title = {A small-gap electrostatic micro-actuator for large deflections}, series = {Nature Communications}, journal = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, pages = {10078}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A novel electrostatic micro-actuator class and its application potential for optical MEMS}, series = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, booktitle = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-1036-3}, doi = {10.1109/OMN.2016.7565867}, pages = {Tu 3.11-1 -- Tu 3.11-2}, language = {en} } @misc{LangaDrabeKunathetal., author = {Langa, Sergiu and Drabe, Christian and Kunath, Christian and Dreyhaupt, Andr{\´e} and Schenk, Harald}, title = {Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, journal = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2003525}, pages = {86140F-1 -- 86140F-8}, language = {en} } @misc{StolzMroskKaiseretal., author = {Stolz, Michael and Mrosk, Andreas and Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Conrad, Holger and Gaudet, Matthieu and Schenk, Harald}, title = {Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {366 -- 369}, abstract = {In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive - NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollst{\"a}ndig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei {\"u}ber einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerst{\"o}rungsfreie optische Methoden pr{\"a}sentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren erm{\"o}glicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann.}, language = {de} } @misc{MelnikovSchenkMonsalveetal., author = {Melnikov, Anton and Schenk, Hermann A. G. and Monsalve, Jorge Mario and Wall, Franziska and Stolz, Michael and Mrosk, Andreas and Langa, Sergiu and Kaiser, Bert}, title = {Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation}, series = {Microsystems \& Nanoengineering}, volume = {7}, journal = {Microsystems \& Nanoengineering}, number = {1}, issn = {2055-7434}, doi = {10.1038/s41378-021-00265-y}, abstract = {Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.}, language = {en} } @misc{MonsalveMelnikovStolzetal., author = {Monsalve, Jorge Mario and Melnikov, Anton and Stolz, Michael and Mrosk, Andreas and Jongmanns, Marcel and Wall, Franziska and Langa, Sergiu and Marica-Bercu, Ioana and Br{\"a}ndel, Tim and Kircher, Marco and Schenk, Hermann A. G. and Kaiser, Bert and Schenk, Harald}, title = {Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion}, series = {Sensors and Actuators A: Physical}, volume = {Vol. 345}, journal = {Sensors and Actuators A: Physical}, issn = {1873-3069}, doi = {10.1016/j.sna.2022.113813}, abstract = {An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip's surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3×3.3 mm², 2D/λ≈0.77) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35-63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range.}, language = {en} } @misc{KaiserSchenkEhrigetal., author = {Kaiser, Bert and Schenk, Hermann A. G. and Ehrig, Lutz and Wall, Franziska and Monsalve, Jorge Mario and Langa, Sergiu and Stolz, Michael and Melnikov, Anton and Conrad, Holger and Schuffenhauer, David and Schenk, Harald}, title = {The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers}, series = {Microsystems \& Nanoengineering}, volume = {Vol. 8}, journal = {Microsystems \& Nanoengineering}, issn = {2055-7434}, doi = {10.1038/s41378-022-00458-z}, abstract = {Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2\% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer.}, language = {en} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, language = {de} } @misc{SchenkMelnikovStolzetal., author = {Schenk, Harald and Melnikov, Anton and Stolz, Michael and Wall, Franziska and Kaiser, Bert and Mrosk, Andreas and Schuffenhauer, David and Monsalve, Jorge Mario and Langa, Sergiu and Schenk, Hermann and Ehrig, Lutz and Conrad, Holger and Ahnert, Maik}, title = {Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals}, series = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, journal = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, pages = {7}, abstract = {A recently introduced novel actuator class, called the nano electrostatic drive (NED), uses the elec-trostatic actuation to generate large deflections of elastic structures. The NED principle was recently successfully applied to create an all silicon loudspeaker based on micro-electro-mechanical systems (MEMS) technology. Such MEMS audio transducers cover the full frequency range required for high fidelity audio applications. High fidelity audio reproduction also demands minimizing harmonic distortions substantially below 1 \%. A major advance in this direction is combining the NED principle with a push-pull driving scheme in a balanced design (BNED), eliminating even harmonics. The practical implementation of a BNED design is however demanding. The nature of the Coulomb force, the impact of stress stiffening and the large deformations required for generating high sound pressures, to name a few aspects, potentially contribute to the harmonic distortion and therefore need advanced experimental methods and simulation models to allow for an apt design. In this paper, we report first results of an experimental technique, combining an optical microscope with a high-speed camera, capable of analyzing the local details of the actuator movement at frame rates of 50,000 frames per second. Dynamic features, such as the excitation of harmonics and intermodulations become clearly visible. These experimental results are then used to scrutinize and refine our multi physics FEM simulations.}, language = {en} } @misc{ConradKaiserGaudetetal., author = {Conrad, Holger and Kaiser, Bert and Gaudet, Matthieu and Langa, Sergiu and Stolz, Michael and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {A novel electrostatic actuator class}, series = {Procedia Engineering}, volume = {168}, journal = {Procedia Engineering}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, pages = {1533 -- 1536}, language = {en} } @misc{KolkovskyStuebnerLangaetal., author = {Kolkovsky, Vladimir and St{\"u}bner, R. and Langa, Sergiu and Wende, U. and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, series = {Solid-State Electronics}, volume = {123}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, pages = {89 -- 95}, language = {en} } @inproceedings{ConradGaudetKaiseretal., author = {Conrad, Holger and Gaudet, Matthieu and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schenk, Harald}, title = {CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators}, series = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, booktitle = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, publisher = {VDE-Verlag}, address = {Berlin [u.a.]}, isbn = {978-3-8007-4491-6}, pages = {219 -- 222}, language = {en} } @misc{RuffertSchenkKaiseretal., author = {Ruffert, Christine and Schenk, Hermann A. G. and Kaiser, Bert and Ehrig, Lutz and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Morsk, Andreas and Schuffenhauer, David and Conrad, Holger and Schenk, Harald}, title = {Elektrostatischer Gegentakt NED-Aktor f{\"u}r Im-Ohr-µLautsprecher}, doi = {10.24406/publica-2553}, language = {de} } @misc{SchenkStolzLangaetal., author = {Schenk, Harald and Stolz, Michael and Langa, Sergiu and Kaiser, Bert}, title = {Reliability Aspects of in-plane NED Bending Actuators in Silicon-based MEMS}, series = {MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte f{\"u}r zukunftsf{\"a}hige M{\"a}rkte 08. - 10. November 2021, Stuttgart-Ludwigsburg}, journal = {MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte f{\"u}r zukunftsf{\"a}hige M{\"a}rkte 08. - 10. November 2021, Stuttgart-Ludwigsburg}, publisher = {VDE-Verlag}, isbn = {978-3-8007-5656-8}, pages = {4}, abstract = {For several years, Fraunhofer IPMS has been developing a new type of an electrostatic MEMS actuator, called nanoscopic electrostatic drive - NED. Since the first publication in 2015, the project group at IPMS has succeeded in providing lateral actuators, which serve as innovative drives in applications such as micro-positioners or micro-speakers. These applications require a high long-term stability of the drive in order to ensure that the system operates as desired. For this purpose, the reliability of such novel lateral electrostatic actuators was evaluated. Long-term studies of NED actuators have shown that different degradation phenomena can occur during operation. The experiments indicate that high electric fields in the range of several MV/m are one of the most important triggers of the degradations observed. On the one hand, they lead to anodic oxidation occurring at the boundary layers between the NED electrodes and neighbored insulators, which results in corrosion of the silicon electrodes. On the other hand, geometry-based field enhancement far from the insulator interfaces lead to permanent field emission, which causes dark discharges in the electrode gap. This in turn leads to cold plasma oxidation and the growth of oxide b ulges on the electrode surfaces. In the course of the experiments, it was shown that corrosion does not take place in a vacuum and can be avoided with the help of passivation layers. Non silicon oxides, e.g. Al2O3, are well suited as passivation layers. Although they bring additional flexural rigidity to the overall structure, which changes the mechanical behavior of the actuators, they increase the effective relative permittivity in the electrode gap, which in turn makes the actuators more effective. Thanks to the passivation coating,the lifespan of the NED actuators was increased and they can become even more effective by choosing a layer with suitable properties.}, language = {en} } @misc{KaiserLangaEhrigetal., author = {Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Stolz, Michael and Schenk, Hermann and Conrad, Holger and Schenk, Harald and Schimmanz, Klaus and Schuffenhauer, David}, title = {Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers}, series = {Microsystems and Nanoengineering}, journal = {Microsystems and Nanoengineering}, number = {5}, issn = {2055-7434}, doi = {10.1038/s41378-019-0095-9}, pages = {11}, abstract = {MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4\%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches.}, language = {en} } @misc{SchenkNarimaniSchollesetal., author = {Schenk, Harald and Narimani, Keyvan and Scholles, Michael and Shashank, Shashank and Langa, Sergiu and Pineda Gomez, Roberto and Ruffert, Christine}, title = {Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive}, series = {MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte f{\"u}r zukunftsf{\"a}hige M{\"a}rkte 08. - 10. November 2021, Stuttgart-Ludwigsburg}, journal = {MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte f{\"u}r zukunftsf{\"a}hige M{\"a}rkte 08. - 10. November 2021, Stuttgart-Ludwigsburg}, publisher = {VDE e.V.}, isbn = {978-3-8007-5656-8}, pages = {4}, abstract = {We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system's footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM).}, language = {en} } @misc{EhrigKaiserSchenketal., author = {Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Stolz, Michael and Langa, Sergiu and Conrad, Holger and Schenk, Harald and M{\"a}nnchen, Andreas and Brocks, Tobias}, title = {Acoustic validation of electrostatic all-silicon MEMS-speakers}, series = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, journal = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, doi = {10.17743/aesconf.2019.978-1-942220-29-9}, language = {en} } @misc{LangaConradSchenketal., author = {Langa, Sergiu and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Elektrostatisch auslenkbares mikromechanisches Bauelement}, language = {de} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically driven in-plane silicon micropump for modular configuration}, series = {Micromachines}, volume = {9}, journal = {Micromachines}, number = {4}, issn = {2072-666X}, doi = {10.3390/mi9040190}, pages = {15}, abstract = {In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called "Nano Electrostatic Drive" is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina.}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A contribution to the expansion of the applicability of electrostatic forces in micro transducers}, series = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, booktitle = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {978-1-5106-0674-6}, doi = {10.1117/12.2249575}, language = {en} }