@misc{LangaDrabeKunathetal., author = {Langa, Sergiu and Drabe, Christian and Kunath, Christian and Dreyhaupt, Andr{\´e} and Schenk, Harald}, title = {Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, journal = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2003525}, pages = {86140F-1 -- 86140F-8}, language = {en} } @misc{LangaConradSchenketal., author = {Langa, Sergiu and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Elektrostatisch auslenkbares mikromechanisches Bauelement}, language = {de} } @misc{ConradSchenkKaiseretal., author = {Conrad, Holger and Schenk, Harald and Kaiser, Bert and Langa, Sergiu and Gaudet, Matthieu and Schimmanz, Klaus and Stolz, Michael and Lenz, Miriam}, title = {A small-gap electrostatic micro-actuator for large deflections}, series = {Nature Communications}, journal = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, pages = {10078}, language = {en} } @misc{KolkovskyStuebnerLangaetal., author = {Kolkovsky, Vladimir and St{\"u}bner, R. and Langa, Sergiu and Wende, U. and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, series = {Solid-State Electronics}, volume = {123}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, pages = {89 -- 95}, language = {en} } @misc{ConradKaiserGaudetetal., author = {Conrad, Holger and Kaiser, Bert and Gaudet, Matthieu and Langa, Sergiu and Stolz, Michael and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {A novel electrostatic actuator class}, series = {Procedia Engineering}, volume = {168}, journal = {Procedia Engineering}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, pages = {1533 -- 1536}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A novel electrostatic micro-actuator class and its application potential for optical MEMS}, series = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, booktitle = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-1036-3}, doi = {10.1109/OMN.2016.7565867}, pages = {Tu 3.11-1 -- Tu 3.11-2}, language = {en} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, language = {de} } @inproceedings{GaudetUhligStolzetal., author = {Gaudet, Matthieu and Uhlig, Sebastian and Stolz, Michael and Arscott, S. and Conrad, Holger and Langa, Sergiu and Kaiser, Bert and Schenk, Harald}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, series = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-5078-9}, pages = {175 -- 178}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A contribution to the expansion of the applicability of electrostatic forces in micro transducers}, series = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, booktitle = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {978-1-5106-0674-6}, doi = {10.1117/12.2249575}, language = {en} } @misc{LangaConradKaiseretal., author = {Langa, Sergiu and Conrad, Holger and Kaiser, Bert and Stolz, Michael and Gaudet, Matthieu and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive}, series = {Microsystem Technologies}, volume = {23}, journal = {Microsystem Technologies}, number = {1}, issn = {1432-1858}, doi = {10.1007/s00542-017-3360-6}, pages = {5697 -- 5708}, language = {en} }