@inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, R. and Schenk, Harald}, title = {Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897717-1 -- 897717-9}, language = {en} }