@misc{SchroederLupinaSeifarthetal., author = {Schroeder, Thomas and Lupina, Grzegorz and Seifarth, Olaf and Tallarida, Massimo and Schmeißer, Dieter}, title = {Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2-xO3 (x=0-2) dielectrics on TiN for dynamic random access memory applications}, series = {Journal of Applied Physics}, volume = {102}, journal = {Journal of Applied Physics}, number = {1}, issn = {0021-8979}, pages = {014103}, language = {en} }