@inproceedings{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {47 -- 51}, language = {en} } @inproceedings{KlocekFriedrichSchmeisseretal., author = {Klocek, Jolanta and Friedrich, Daniel and Schmeißer, Dieter and Hecker, Michael and Zschech, Ehrenfried}, title = {The stability of C60 and its derivatives upon handling in microsystems technologies}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {43 -- 46}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films}, language = {en} } @incollection{SchwiertzHenkelBleietal., author = {Schwiertz, Carola and Henkel, Karsten and Blei, S. and Heidenreich, R. and Schmeißer, Dieter}, title = {Nachweis von Aerosolen (<1µm) mit Schwingquarzimpedanzspektroskopie}, language = {de} } @misc{ZschechHoSchmeisseretal., author = {Zschech, Ehrenfried and Ho, O. S. and Schmeißer, Dieter and Meyer, Moritz Andreas and Vairagar, A. V. and Schneider, G. and Hauschildt, Meike and Kraatz, Matthias and Sukharev, V.}, title = {Geometry and Microstructure Effect on EM-Induced Copper Interconnect Degradation}, series = {IEEE Transactions on Device and Materials Reliability}, volume = {9}, journal = {IEEE Transactions on Device and Materials Reliability}, number = {1}, issn = {1530-4388}, pages = {20 -- 30}, language = {en} } @inproceedings{HeimFriedrichGuttmannetal., author = {Heim, S. and Friedrich, Daniel and Guttmann, P. and Rehbein, S. and Chumakov, Dmytro and Ritz, Y. and Schneider, G. and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects}, language = {en} } @misc{SchmeisserHenkelMuelleretal., author = {Schmeißer, Dieter and Henkel, Karsten and M{\"u}ller, Klaus and Tallarida, Massimo}, title = {Interface Reactions in Ultrathin Functional Dielectric Films}, language = {en} } @misc{SchmeisserTallaridaHenkeletal., author = {Schmeißer, Dieter and Tallarida, Massimo and Henkel, Karsten and M{\"u}ller, Klaus and Mandal, Dipankar and Chumakov, Dmytro and Zschech, Ehrenfried}, title = {Characterization of oxidic and organic materials with synchrotron radiation based XPS and XAS}, language = {en} } @misc{LazarevaKovalMuelleretal., author = {Lazareva, I. and Koval, Yuri and M{\"u}ller, P. and M{\"u}ller, Klaus and Henkel, Karsten and Schmeißer, Dieter}, title = {Interface screening and imprint in pol(vinylidene fluoride/trifluoroethylene) ferroelectric field effect transistors}, language = {en} } @incollection{MuellerBurkovMandaletal., author = {M{\"u}ller, Klaus and Burkov, Yevgen and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Goryachko, Andriy and Schmeißer, Dieter}, title = {Microscopic and spectroscopic characterization of interfaces and dielectric layers for OFET devices}, series = {Organic Electronics : structural and Electronic Properties of OFETs}, booktitle = {Organic Electronics : structural and Electronic Properties of OFETs}, editor = {W{\"o}ll, Christof}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-40810-8}, pages = {445 -- 468}, language = {en} } @misc{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {HfO2/Si interface formation in atomic layer deposition films: an in situ investigation}, language = {en} } @misc{HenkelLazarevaMandaletal., author = {Henkel, Karsten and Lazareva, I. and Mandal, Dipankar and Paloumpa, Ioanna and M{\"u}ller, Klaus and Koval, Yuri and M{\"u}ller, P. and Schmeißer, Dieter}, title = {Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using Poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications}, language = {en} } @misc{HenkelBurkovKaravaevetal., author = {Henkel, Karsten and Burkov, Yevgen and Karavaev, Konstantin and Torche, Mohamed and Schwiertz, Carola and Schmeißer, Dieter}, title = {Optimization of the AION buffer layer for PrxOy/Si stacks}, language = {de} } @article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Konarski, Piotr and Cwil, M. and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation}, language = {en} } @misc{ZschechGeislerRinderknechtetal., author = {Zschech, Ehrenfried and Geisler, Holm and Rinderknecht, Jochen and Schneider, Gerd and Spolenak, Ralph and Schmeißer, Dieter}, title = {Nano-scale analysis using synchrotron-radiation: Applications in the semiconductor industry}, series = {Current nanoscience}, volume = {4}, journal = {Current nanoscience}, number = {3}, issn = {1573-4137}, pages = {256 -- 266}, language = {en} } @misc{ZagorodniyChumakovTaeschneretal., author = {Zagorodniy, Kostyantyn and Chumakov, Dmytro and T{\"a}schner, Christine and Lukowiak, Anna and Stegmann, Heiko and Schmeißer, Dieter and Geisler, Holm and Engelmann, Hans-J{\"u}rgen and Hermann, Helmut and Zschech, Ehrenfried}, title = {Novel Carbon-cage based ultralow-k materials: Modelling and first experiments}, doi = {10.1109/TSM.2008.2005396}, language = {en} } @article{TallaridaSchmeisser, author = {Tallarida, Massimo and Schmeißer, Dieter}, title = {Study of silicon/oxides interfaces by means of Si2p resonant photoemission}, language = {en} } @article{TallaridaKaravaevSchmeisser, author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {The initial atomic layer deposition of HfO2/Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy}, language = {en} } @article{MuellerMandalHenkeletal., author = {M{\"u}ller, Klaus and Mandal, Dipankar and Henkel, Karsten and Paloumpa, Ioanna and Schmeißer, Dieter}, title = {Ferroelectric properties of spin-coated ultrathin (down to 10nm) copolymer films}, language = {en} } @misc{OpelNielsenBaueretal., author = {Opel, Matthias and Nielsen, Karl-Wilhelm and Bauer, Sebastian and Goennenwein, Sebastian T. B. and Gross, Rudolf and Cezar, Julio C. and Schmeißer, Dieter and Simon, J{\"u}rgen and Mader, Werner}, title = {Nanosized superparamagnetic precipitates in cobalt-doped ZnO}, series = {The European Physical Journal : B}, volume = {63}, journal = {The European Physical Journal : B}, number = {4}, issn = {1434-6036}, pages = {437 -- 444}, language = {en} } @inproceedings{SeifarthWilkeWalczyketal., author = {Seifarth, Olaf and Wilke, A. and Walczyk, Christian and Dabrowski, Jarek Marek and Zaumseil, Peter and Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim and Schroeder, Thomas}, title = {Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111)}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {285 -- 286}, language = {en} }