@misc{ConradKaiserGaudetetal., author = {Conrad, Holger and Kaiser, Bert and Gaudet, Matthieu and Langa, Sergiu and Stolz, Michael and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {A novel electrostatic actuator class}, series = {Procedia Engineering}, volume = {168}, journal = {Procedia Engineering}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, pages = {1533 -- 1536}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A novel electrostatic micro-actuator class and its application potential for optical MEMS}, series = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, booktitle = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-1036-3}, doi = {10.1109/OMN.2016.7565867}, pages = {Tu 3.11-1 -- Tu 3.11-2}, language = {en} } @inproceedings{GaudetUhligStolzetal., author = {Gaudet, Matthieu and Uhlig, Sebastian and Stolz, Michael and Arscott, S. and Conrad, Holger and Langa, Sergiu and Kaiser, Bert and Schenk, Harald}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, series = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-5078-9}, pages = {175 -- 178}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A contribution to the expansion of the applicability of electrostatic forces in micro transducers}, series = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, booktitle = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {978-1-5106-0674-6}, doi = {10.1117/12.2249575}, language = {en} } @misc{LangaConradKaiseretal., author = {Langa, Sergiu and Conrad, Holger and Kaiser, Bert and Stolz, Michael and Gaudet, Matthieu and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive}, series = {Microsystem Technologies}, volume = {23}, journal = {Microsystem Technologies}, number = {1}, issn = {1432-1858}, doi = {10.1007/s00542-017-3360-6}, pages = {5697 -- 5708}, language = {en} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically driven in-plane silicon micropump for modular configuration}, series = {Micromachines}, volume = {9}, journal = {Micromachines}, number = {4}, issn = {2072-666X}, doi = {10.3390/mi9040190}, pages = {15}, abstract = {In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called "Nano Electrostatic Drive" is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina.}, language = {en} } @inproceedings{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically in-plane driven silicon micropump for modular configuration}, series = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, booktitle = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, publisher = {University of Twente}, address = {Enschede}, pages = {57 -- 60}, language = {en} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Ruffert, Christine and Jongmanns, Marcel and Schenk, Harald}, title = {Highly integrable silicon micropumps using lateral electrostatic bending actuators}, series = {Microsystem Technologies}, volume = {30}, journal = {Microsystem Technologies}, number = {8}, publisher = {Springer Science and Business Media LLC}, issn = {0946-7076}, doi = {10.1007/s00542-024-05635-w}, pages = {949 -- 960}, abstract = {We present the design, fabrication, and characterization of an innovative silicon-based micropump with high potential for portable lab-on-chip (LoC) as well as point-of-care (PoC) applications. The actuators of the pump are electrostatic driven in-plane bending devices, which were presented earlier (Borcia et al. in Phys Rev Fluids 3(8): 084202, 2018. 10.1103/PhysRevFluids.3.084202; Uhlig et al. in Micromachines, 9(4), 2018. 10.3390/mi9040190). This paper presents the characterization results achieved with the micropump. The dielectric non-polar liquid Novec7100™ was used as a test liquid due to its adequate physical properties. When applying a periodic voltage of 130 V, a flow rate of up to 80 µL/min was detected. The counter pressure amounts up to 30 kPa and the correspondent fluidic power (volumetric flow rate times the counter pressure) was calculated to 10 µW. The pump contains passive flap valves at the inlet and outlet, which are based on a bending cantilever design. Depending on the application requirements, the micropump can be designed modularly to adjust the specific parameters by an adequate arrangement of pump base units. In this paper, the proof of principle is shown using a single base unit with different number of stacked NED-actuator beams, as well as the serial arrangement of base units. Both modular concepts target the increase of backpressure of the NED-micropump in an inherently different way compared to conventional membrane micropumps.}, language = {en} }