@misc{VillasmuntaSteglichVillringeretal., author = {Villasmunta, Francesco and Steglich, Patrick and Villringer, Claus and Schrader, Sigurd and Schenk, Harald and Mai, Andreas and Regehly, Martin}, title = {Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections}, series = {Optical Interconnects XXIV}, journal = {Optical Interconnects XXIV}, editor = {Schr{\"o}der, Henning and Chen, Ray T.}, publisher = {SPIE}, doi = {10.1117/12.3003146}, pages = {12}, language = {en} } @incollection{SchenkSchulze, author = {Schenk, Harald and Schulze, Matthias}, title = {Micro mirrors}, series = {Handbook of Silicon Based MEMS Materials and Technologies}, booktitle = {Handbook of Silicon Based MEMS Materials and Technologies}, edition = {Third Edition}, publisher = {Elsevier}, isbn = {978-0-12-817786-0}, doi = {10.1016/B978-0-12-817786-0.00049-9}, pages = {949 -- 968}, language = {en} } @incollection{Schenk, author = {Schenk, Harald}, title = {Optische Mikrosysteme}, series = {Lehrbuch Mikrotechnologie}, booktitle = {Lehrbuch Mikrotechnologie}, publisher = {Carl Hanser Verlag GmbH \& Co. KG}, address = {M{\"u}nchen}, isbn = {9783446425606}, doi = {10.3139/9783446429741.017}, pages = {539 -- 592}, language = {de} } @misc{SchenkShashankGaudet, author = {Schenk, Harald and Shashank, S. and Gaudet, M.}, title = {MEMS actuator and method for controlling a MEMS actuator}, abstract = {The invention provides a MEMS actuator comprising at least one actuator cell. The actuator cell comprises a first connecting piece and a second connecting piece. A mechanical connection between the first connecting piece and the second connecting piece comprises at least one connector unit. The connector unit comprises a first beam and a second beam being serially connected with the first beam so as to provide for a meandered shape. At least the first beam comprises a serial arrangement of a plurality of actuator elements configured to change a bending of the first beam upon actuation.}, language = {en} } @misc{SchenkSanderSchmidtetal., author = {Schenk, Harald and Sander, T. and Schmidt, J.-U. and Gatto, A. and Yang, M. and Heber, J. and Kaiser, N.}, title = {Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof}, language = {en} } @misc{SchenkSanderSchollesetal., author = {Schenk, Harald and Sander, T. and Scholles, M. and Schwarzenberg, M. and Wolter, A.}, title = {Projection apparatus for scanningly projection}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Micromechanical device}, language = {en} } @misc{SchenkWolterSchwarzenberg, author = {Schenk, Harald and Wolter, A. and Schwarzenberg, M.}, title = {Projection apparatus}, language = {de} } @misc{SchenkSanderPufe, author = {Schenk, Harald and Sander, T. and Pufe, W.}, title = {Microoptic reflecting component}, abstract = {The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.}, language = {en} } @misc{SchenkWolterSanderetal., author = {Schenk, Harald and Wolter, A. and Sander, T. and Drabe, C. and Klose, T.}, title = {Oscillating, deflectable micromechanical element and method for use thereof}, language = {de} } @misc{SchenkDrabe, author = {Schenk, Harald and Drabe, C.}, title = {Micro-optical arrangement}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element}, language = {de} } @misc{SchenkSanderHeberetal., author = {Schenk, Harald and Sander, T. and Heber, J. and Klose, T. and Bergmann, A. and Gerwig, C. and Knieling, T.}, title = {Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device}, language = {en} } @misc{SchenkZimmerWolter, author = {Schenk, Harald and Zimmer, F. and Wolter, A.}, title = {Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung}, language = {de} }