@misc{SchweigerSchulzeSchlipfetal., author = {Schweiger, Severin and Schulze, Tim F. and Schlipf, Simon and Reinig, Peter and Schenk, Harald}, title = {Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation}, series = {Journal of Optical Microsystems}, volume = {Vol. 2}, journal = {Journal of Optical Microsystems}, number = {3}, issn = {2708-5260}, doi = {10.1117/1.jom.2.3.033501}, abstract = {Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power and scan speed to find dependent mechanical material properties. The employed photoresists were examined using Raman spectroscopy to find the degree of conversion (DC) of monomer to polymer, and subsequently, micro- or nanoindentation was used to find Young's modulus (E). For the photoresist IP-Dip, the attained DC and E ranged from 20\% to 45\% and 1 to 2.1 GPa, respectively. The results were compared with reports found in the literature. For IP-Q, the attained DC and E ranged from 53\% to 80\% and 0.5 to 1.3 GPa, respectively. The characterized properties of IP-Q manifest as the current state of knowledge of the material.}, language = {en} } @misc{KurthKunathSchenk, author = {Kurth, Eberhard and Kunath, Christian and Schenk, Harald}, title = {Ion-sensitive structure and method for producing the same}, language = {en} } @misc{ConradGaudetSchenketal., author = {Conrad, Holger and Gaudet, Matthieu and Schenk, Harald and Uhlig, Sebastian}, title = {Micromechanical devices with mechanical actuators}, language = {en} } @misc{SchenkConrad, author = {Schenk, Harald and Conrad, Holger}, title = {MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same}, language = {en} } @misc{MonsalveGuaracaoKaiserSchenk, author = {Monsalve Guaracao, Jorge Mario and Kaiser, Bert and Schenk, Harald}, title = {Design of Micromachined Ultrasonic Transducers for Variability with the Sample-Average Approximation Method}, series = {Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023}, journal = {Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023}, publisher = {VDE Verlag}, address = {Berlin}, isbn = {978-3-8007-6204-0}, pages = {S. 639}, language = {en} } @misc{VillasmuntaSteglichHeinrichetal., author = {Villasmunta, Francesco and Steglich, Patrick and Heinrich, Friedhelm and Villringer, Claus and Mai, Andreas and Schrader, Sigurd and Schenk, Harald}, title = {Optical Through-Silicon Waveguides for 3D-Chip-Interconnections}, abstract = {Integrated optical interconnections in silicon chips have the potential to replace electrical interconnects between integrated circuits thanks to their high bandwidth and low energy communication promises. A silicon dielectric waveguide can be etched through the full thickness of a silicon substrate providing a monolithically integrated solution for 2.5D and 3D photonic architectures. The optical through-silicon waveguide design presented here is based on Finite Difference Time Domain simulations, while the fabrication takes advantage of the innovative plasma cryo-etching process that provides smooth sidewalls and tapering angle tunability. Such structures can provide effective mode size conversion, therefore favoring the coupling of external light sources to photonic integrated circuits and the stacking of multiple optically interconnected dies.}, language = {en} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Ruffert, Christine and Jongmanns, Marcel and Schenk, Harald}, title = {Highly integrable silicon micropumps using lateral electrostatic bending actuators}, series = {Microsystem Technologies}, volume = {30}, journal = {Microsystem Technologies}, number = {8}, publisher = {Springer Science and Business Media LLC}, issn = {0946-7076}, doi = {10.1007/s00542-024-05635-w}, pages = {949 -- 960}, abstract = {We present the design, fabrication, and characterization of an innovative silicon-based micropump with high potential for portable lab-on-chip (LoC) as well as point-of-care (PoC) applications. The actuators of the pump are electrostatic driven in-plane bending devices, which were presented earlier (Borcia et al. in Phys Rev Fluids 3(8): 084202, 2018. 10.1103/PhysRevFluids.3.084202; Uhlig et al. in Micromachines, 9(4), 2018. 10.3390/mi9040190). This paper presents the characterization results achieved with the micropump. The dielectric non-polar liquid Novec7100™ was used as a test liquid due to its adequate physical properties. When applying a periodic voltage of 130 V, a flow rate of up to 80 µL/min was detected. The counter pressure amounts up to 30 kPa and the correspondent fluidic power (volumetric flow rate times the counter pressure) was calculated to 10 µW. The pump contains passive flap valves at the inlet and outlet, which are based on a bending cantilever design. Depending on the application requirements, the micropump can be designed modularly to adjust the specific parameters by an adequate arrangement of pump base units. In this paper, the proof of principle is shown using a single base unit with different number of stacked NED-actuator beams, as well as the serial arrangement of base units. Both modular concepts target the increase of backpressure of the NED-micropump in an inherently different way compared to conventional membrane micropumps.}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Silicon integrated electrostatic drives}, series = {International Conference and Exhibition on New Actuator Systems and Applications 2024}, journal = {International Conference and Exhibition on New Actuator Systems and Applications 2024}, doi = {10.24406/publica-3964}, pages = {36}, abstract = {Presentation held at ACTUATOR 2024, International Conference and Exhibition on New Actuator Systems and Applications, June 13 - 14, 2024, Wiesbaden, Germany}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Digitalisierung und KI f{\"u}r Gesellschaft, Wirtschaft und Forschung}, series = {Digitalisierung und KI f{\"u}r Gesellschaft, Wirtschaft und Forschung}, journal = {Digitalisierung und KI f{\"u}r Gesellschaft, Wirtschaft und Forschung}, editor = {Schenk, Harald}, doi = {10.24406/publica-3965}, pages = {19}, abstract = {Leben mit Krebs - Digitalisierung, K{\"u}nstliche Intelligenz in Medizin und Tumormedizin}, language = {de} } @misc{Schenk, author = {Schenk, Harald}, title = {Highly integrated active Spatial Light Modulators - from imaging to holography}, series = {International Conference on Machine Vision 2024}, journal = {International Conference on Machine Vision 2024}, doi = {10.24406/publica-3963}, pages = {37}, language = {en} } @misc{GuaracoLangaStolzetal., author = {Guaraco, Jorge Mario Monsalve and Langa, Sergiu and Stolz, Michael and Mrosk, Andreas and Kaiser, Bert and Schenk, Harald}, title = {Design of micromachines under uncertainty with the sample-average approximation method}, series = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, volume = {18 (2024)}, journal = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, number = {2}, publisher = {Japan Society of Mechanical Engineers}, issn = {1881-3054}, doi = {10.1299/jamdsm.2024jamdsm0018}, language = {en} } @misc{VillasmuntaSteglichVillringeretal., author = {Villasmunta, Francesco and Steglich, Patrick and Villringer, Claus and Schrader, Sigurd and Schenk, Harald and Mai, Andreas and Regehly, Martin}, title = {Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections}, series = {Optical Interconnects XXIV}, journal = {Optical Interconnects XXIV}, editor = {Schr{\"o}der, Henning and Chen, Ray T.}, publisher = {SPIE}, doi = {10.1117/12.3003146}, pages = {12}, language = {en} } @incollection{SchenkSchulze, author = {Schenk, Harald and Schulze, Matthias}, title = {Micro mirrors}, series = {Handbook of Silicon Based MEMS Materials and Technologies}, booktitle = {Handbook of Silicon Based MEMS Materials and Technologies}, edition = {Third Edition}, publisher = {Elsevier}, isbn = {978-0-12-817786-0}, doi = {10.1016/B978-0-12-817786-0.00049-9}, pages = {949 -- 968}, language = {en} } @incollection{Schenk, author = {Schenk, Harald}, title = {Optische Mikrosysteme}, series = {Lehrbuch Mikrotechnologie}, booktitle = {Lehrbuch Mikrotechnologie}, publisher = {Carl Hanser Verlag GmbH \& Co. KG}, address = {M{\"u}nchen}, isbn = {9783446425606}, doi = {10.3139/9783446429741.017}, pages = {539 -- 592}, language = {de} } @misc{SchenkShashankGaudet, author = {Schenk, Harald and Shashank, S. and Gaudet, M.}, title = {MEMS actuator and method for controlling a MEMS actuator}, abstract = {The invention provides a MEMS actuator comprising at least one actuator cell. The actuator cell comprises a first connecting piece and a second connecting piece. A mechanical connection between the first connecting piece and the second connecting piece comprises at least one connector unit. The connector unit comprises a first beam and a second beam being serially connected with the first beam so as to provide for a meandered shape. At least the first beam comprises a serial arrangement of a plurality of actuator elements configured to change a bending of the first beam upon actuation.}, language = {en} } @misc{SchenkSanderSchmidtetal., author = {Schenk, Harald and Sander, T. and Schmidt, J.-U. and Gatto, A. and Yang, M. and Heber, J. and Kaiser, N.}, title = {Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof}, language = {en} } @misc{SchenkSanderSchollesetal., author = {Schenk, Harald and Sander, T. and Scholles, M. and Schwarzenberg, M. and Wolter, A.}, title = {Projection apparatus for scanningly projection}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Micromechanical device}, language = {en} } @misc{SchenkWolterSchwarzenberg, author = {Schenk, Harald and Wolter, A. and Schwarzenberg, M.}, title = {Projection apparatus}, language = {de} } @misc{SchenkSanderPufe, author = {Schenk, Harald and Sander, T. and Pufe, W.}, title = {Microoptic reflecting component}, abstract = {The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.}, language = {en} } @misc{SchenkWolterSanderetal., author = {Schenk, Harald and Wolter, A. and Sander, T. and Drabe, C. and Klose, T.}, title = {Oscillating, deflectable micromechanical element and method for use thereof}, language = {de} } @misc{SchenkDrabe, author = {Schenk, Harald and Drabe, C.}, title = {Micro-optical arrangement}, language = {en} } @misc{Schenk, author = {Schenk, Harald}, title = {Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element}, language = {de} } @misc{SchenkSanderHeberetal., author = {Schenk, Harald and Sander, T. and Heber, J. and Klose, T. and Bergmann, A. and Gerwig, C. and Knieling, T.}, title = {Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device}, language = {en} }