@inproceedings{ConradEhrigKaiseretal., author = {Conrad, Holger and Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Schuffenhauer, David and Stolz, Michael and Gaudet, Matthieu and Schenk, Harald}, title = {CMOS-kompatibler MEMS-Lautsprecher f{\"u}r Im-Ohr-Anwendungen}, series = {Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung f{\"u}r Akustik, 19.-22. M{\"a}rz 2018, M{\"u}nchen}, booktitle = {Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung f{\"u}r Akustik, 19.-22. M{\"a}rz 2018, M{\"u}nchen}, publisher = {Deutsche Gesellschaft f{\"u}r Akustik e.V. (DEGA)}, address = {Berlin}, isbn = {978-3-939296-13-3}, pages = {892 -- 894}, language = {de} } @misc{EhrigKaiserConradetal., author = {Ehrig, Lutz and Kaiser, Bert and Conrad, Holger and Schenk, Hermann and Schuffenhauer, David and Stolz, Michael and Gaudet, Matthieu and Schenk, Harald and Kolkovsky, Vladimir}, title = {MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications}, series = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, volume = {TMT 30}, journal = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, pages = {189 -- 192}, abstract = {Wireless earphones require a tremendous degree of integration: In addition to the electroacoustic transducer at least the power supply and a radio module have to be accommodated, supplemented by several microphones for hands-free applications or for noise reduction, as well as position and bio sensors, memory and CPU. With increasing integration, the pressure on the individual components increases in terms of size, energy efficiency and costs. In the field of microphones, MEMS technology has enjoyed great popularity for almost 10 years, and due to their benefits (size, cost, integration) MEMS microphones have almost completely supersede other microphone technologies in mobile audio devices and opened up new fields of applications.}, language = {en} } @misc{SpitzWallSchenketal., author = {Spitz, Barbara and Wall, Franziska and Schenk, Hermann and Melnikov, Anton and Ehrig, Lutz and Langa, Sergiu and Stolz, Michael and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Pufe, Wolfram}, title = {Audio-Transducer f{\"u}r In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {54 -- 57}, abstract = {Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.}, language = {de} } @misc{KaiserLangaEhrigetal., author = {Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Stolz, Michael and Schenk, Hermann and Conrad, Holger and Schenk, Harald and Schimmanz, Klaus and Schuffenhauer, David}, title = {Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers}, series = {Microsystems and Nanoengineering}, journal = {Microsystems and Nanoengineering}, number = {5}, issn = {2055-7434}, doi = {10.1038/s41378-019-0095-9}, pages = {11}, abstract = {MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4\%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches.}, language = {en} } @misc{EhrigKaiserSchenketal., author = {Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Stolz, Michael and Langa, Sergiu and Conrad, Holger and Schenk, Harald and M{\"a}nnchen, Andreas and Brocks, Tobias}, title = {Acoustic validation of electrostatic all-silicon MEMS-speakers}, series = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, journal = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, doi = {10.17743/aesconf.2019.978-1-942220-29-9}, language = {en} } @misc{EhrigSchenkWalletal., author = {Ehrig, Lutz and Schenk, Hermann and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Langa, Sergiu and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Electrostatic all silicon MEMS speakers for in-ear audio applications - acoustic measurements and modelling approach}, series = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, journal = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, doi = {10.18154/RWTH-CONV-239893}, pages = {6}, language = {en} } @misc{MelnikovSchenkWalletal., author = {Melnikov, Anton and Schenk, Hermann and Wall, Franziska and Spitz, Barbara and Ehrig, Lutz and Langa, Sergiu and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, doi = {10.1117/12.2551271}, language = {en} } @misc{SchenkMelnikovStolzetal., author = {Schenk, Harald and Melnikov, Anton and Stolz, Michael and Wall, Franziska and Kaiser, Bert and Mrosk, Andreas and Schuffenhauer, David and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Schenk, Hermann and Ehrig, Lutz and Conrad, Holger and Ahnert, Maik}, title = {Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals}, series = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, journal = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, pages = {7}, abstract = {A recently introduced novel actuator class, called the nano electrostatic drive (NED), uses the elec-trostatic actuation to generate large deflections of elastic structures. The NED principle was recently successfully applied to create an all silicon loudspeaker based on micro-electro-mechanical systems (MEMS) technology. Such MEMS audio transducers cover the full frequency range required for high fidelity audio applications. High fidelity audio reproduction also demands minimizing harmonic distortions substantially below 1 \%. A major advance in this direction is combining the NED principle with a push-pull driving scheme in a balanced design (BNED), eliminating even harmonics. The practical implementation of a BNED design is however demanding. The nature of the Coulomb force, the impact of stress stiffening and the large deformations required for generating high sound pressures, to name a few aspects, potentially contribute to the harmonic distortion and therefore need advanced experimental methods and simulation models to allow for an apt design. In this paper, we report first results of an experimental technique, combining an optical microscope with a high-speed camera, capable of analyzing the local details of the actuator movement at frame rates of 50,000 frames per second. Dynamic features, such as the excitation of harmonics and intermodulations become clearly visible. These experimental results are then used to scrutinize and refine our multi physics FEM simulations.}, language = {en} } @misc{MonsalveGuaracaoMelnikovKaiseretal., author = {Monsalve Guaracao, Jorge Mario and Melnikov, Anton and Kaiser, Bert and Schuffenhauer, David and Stolz, Michael and Ehrig, Lutz and Schenk, Hermann and Conrad, Holger and Schenk, Harald}, title = {Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers}, series = {IEEE/ASME Transactions on Mechatronics}, volume = {7}, journal = {IEEE/ASME Transactions on Mechatronics}, number = {5}, issn = {1083-4435}, doi = {10.1109/TMECH.2021.3112267}, pages = {2612 -- 2622}, abstract = {This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.}, language = {en} } @misc{KaiserSchenkEhrigetal., author = {Kaiser, Bert and Schenk, Hermann A. G. and Ehrig, Lutz and Wall, Franziska and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Stolz, Michael and Melnikov, Anton and Conrad, Holger and Schuffenhauer, David and Schenk, Harald}, title = {The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers}, series = {Microsystems \& Nanoengineering}, volume = {Vol. 8}, journal = {Microsystems \& Nanoengineering}, issn = {2055-7434}, doi = {10.1038/s41378-022-00458-z}, abstract = {Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2\% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer.}, language = {en} } @misc{MonsalveGuaracaoMelnikovStolzetal., author = {Monsalve Guaracao, Jorge Mario and Melnikov, Anton and Stolz, Michael and Mrosk, Andreas and Jongmanns, Marcel and Wall, Franziska and Langa, Sergiu and Marica-Bercu, Ioana and Br{\"a}ndel, Tim and Kircher, Marco and Schenk, Hermann A. G. and Kaiser, Bert and Schenk, Harald}, title = {Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion}, series = {Sensors and Actuators A: Physical}, volume = {Vol. 345}, journal = {Sensors and Actuators A: Physical}, issn = {1873-3069}, doi = {10.1016/j.sna.2022.113813}, abstract = {An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip's surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3×3.3 mm², 2D/λ≈0.77) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35-63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range.}, language = {en} } @misc{WallSchenkMelnikovetal., author = {Wall, Franziska and Schenk, Hermann A. G. and Melnikov, Anton and Kaiser, Bert and Schenk, Harald}, title = {A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators}, series = {Nonlinear Dynamics}, volume = {111}, journal = {Nonlinear Dynamics}, number = {19}, issn = {1573-269X}, doi = {10.1007/s11071-023-08811-1}, pages = {17809 -- 17818}, abstract = {For electrostatic actuators, the pull-in marks an upper limit for the operation range. Once reached, the electrodes come into contact and are shorted without further protection. A non-destructive measurement technique to predict this failure mode is of high interest to allow, e.g. fabrication monitoring or reliability studies. To this end, we develop a surprisingly simple nonlinear lumped parameter model (LPM) for a rather complex electrostatic actuator, designed for an in-ear loudspeaker application. It turns out that a single degree-of-freedom model with only one parameter is sufficient. Our key approach is to experimentally determine this free model parameter by analysing harmonic distortions at low frequencies. Harmonic distortions are a very sensitive tool for nonlinearities. Our method is suggested by simulations with a 2D stationary finite element method (FEM), demonstrating how the analysis of harmonic distortions for voltages far below the pull-in can predict not only the DC pull-in but also the quasi-static AC pull-in voltages at different working points. The distortion analysis of electrostatic actuator ensembles therefore seems a viable route for their non-destructive characterization in the nonlinear domain.}, language = {en} } @misc{RuffertSchenkKaiseretal., author = {Ruffert, Christine and Schenk, Hermann A. G. and Kaiser, Bert and Ehrig, Lutz and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Morsk, Andreas and Schuffenhauer, David and Conrad, Holger and Schenk, Harald}, title = {Elektrostatischer Gegentakt NED-Aktor f{\"u}r Im-Ohr-µLautsprecher}, doi = {10.24406/publica-2553}, language = {de} } @misc{WallSchenkSchenketal., author = {Wall, F. and Schenk, Hermann and Schenk, Harald and Melnikov, A. and Ehrig, L. and Kaiser, B.}, title = {P31 - Optimization of Harmonic Distortions for Electrostatic MEMS Push-Pull NED-Microspeakers}, series = {iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster}, journal = {iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster}, publisher = {AMA Service GmbH, Von-M{\"u}nchhausen-Str. 49, 31515 Wunstorf, Germany}, isbn = {978-3-910600-00-3}, doi = {10.5162/iCCC2024/P31}, pages = {218 -- 221}, language = {en} } @inproceedings{SandnerGrashoffSchenketal., author = {Sandner, Thilo and Grashoff, Thomas and Schenk, Harald and Kenda, Andreas}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.909817}, pages = {82520C-1 -- 82520C-10}, language = {en} } @inproceedings{TortschanoffBaumgartFranketal., author = {Tortschanoff, Andreas and Baumgart, M. and Frank, A. and Wildenhain, Michael and Sandner, Thilo and Schenk, Harald and Kenda, Andreas}, title = {Optical position feedback for electrostatically driven MOEMS-scanners}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520S-1 -- 82520S-8}, language = {en} } @inproceedings{JungSandnerKallweitetal., author = {Jung, Denis and Sandner, Thilo and Kallweit, David and Schenk, Harald}, title = {Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520U-1 -- 82520U-10}, language = {en} } @inproceedings{PuegnerKnobbeGruegeretal., author = {P{\"u}gner, Tino and Knobbe, Jens and Gr{\"u}ger, Heinrich and Schenk, Harald}, title = {Realization of a hybrid-integrated MEMS scanning grating spectrometer}, series = {SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland}, booktitle = {SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, pages = {83740W-1 -- 83740W-8}, language = {en} } @inproceedings{GrahmannWildenhainGrashoffetal., author = {Grahmann, Jan and Wildenhain, Michael and Grashoff, Thomas and Gerwig, Christian and Dallmann, Hans-Georg and Wolter, Alexander and Schenk, Harald}, title = {Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, number = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {825205-1 -- 825205-9}, language = {en} } @inproceedings{DrabeKallweitDreyhauptetal., author = {Drabe, Christian and Kallweit, David and Dreyhaupt, Andre and Grahmann, Jan and Schenk, Harald and Davis, Wyatt}, title = {Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.910203}, pages = {825209-1 -- 825209-10}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schenk, Harald and Tortschanoff, Andreas}, title = {Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-4799-1512-5}, pages = {861605-1 -- 861605-6}, language = {en} } @inproceedings{GruegerKnobbePuegneretal., author = {Gr{\"u}ger, Heinrich and Knobbe, Jens and P{\"u}gner, Tino and Schenk, Harald}, title = {Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2004215}, pages = {86160L-1 -- 86160L-13}, language = {en} } @misc{LangaDrabeKunathetal., author = {Langa, Sergiu and Drabe, Christian and Kunath, Christian and Dreyhaupt, Andr{\´e} and Schenk, Harald}, title = {Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, journal = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2003525}, pages = {86140F-1 -- 86140F-8}, language = {en} } @inproceedings{GruegerPuegnerKnobbeetal., author = {Gr{\"u}ger, Heinrich and P{\"u}gner, Tino and Knobbe, Jens and Schenk, Harald}, title = {First application close measurements applying the new hybrid integrated MEMS spectrometer}, series = {SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore}, booktitle = {SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9517-4}, doi = {10.1117/12.2016085}, pages = {872609-1 -- 872609-9}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Schenk, Harald and Tulea, C. and Lenenbach, A.}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, booktitle = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-1512-5}, pages = {83 -- 84}, abstract = {We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, R. and Schenk, Harald}, title = {Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897717-1 -- 897717-9}, language = {en} } @misc{GrahmannMertenOstendorfetal., author = {Grahmann, Jan and Merten, Andr{\´e} and Ostendorf, Ralf and Fontenot, M. and Bleh, Daniela and Schenk, Harald and Wagner, Hans-Joachim}, title = {Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897708-1 -- 897708-11}, language = {en} } @misc{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, Richard and Schenk, Harald}, title = {Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011114-1 -- 011114-10}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Tulea, C. and Lenenbach, A. and Schenk, Harald}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, booktitle = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897705-1 -- 897705-11}, language = {en} } @misc{GrahmannWagnerOstendorfetal., author = {Grahmann, Jan and Wagner, Hans-Joachim and Ostendorf, Ralf and Schenk, Harald and Rattunde, Marcel}, title = {MEMS basiertes Durchstimmen von Lasern}, language = {de} } @misc{LangaConradSchenketal., author = {Langa, Sergiu and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Elektrostatisch auslenkbares mikromechanisches Bauelement}, language = {de} } @misc{SchirrmannCostacheBornhorstetal., author = {Schirrmann, Christian and Costache, Florenta Adriana and Bornhorst, Kirstin and Pawlik, Boscij and Rieck, Andreas and Schenk, Harald}, title = {Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator}, series = {Procedia Engineering}, journal = {Procedia Engineering}, number = {87}, issn = {1877-7058}, pages = {1553 -- 1556}, abstract = {A large deflection polymer bending actuator was employed in the design of an integrated micro-lens with electrically adjustable focal length. This micro-lens consisted of micro-fluidic chambers bonded together and sealed by an elastomeric lens membrane to which the polymer actuator has been attached. For focal length optimization, the chambers could be filled with fluids of different refractive indices. The multilayered actuator of radial shape and the variable micro-lens chip design were optimized using 2D FEM simulations. Fabrication steps included bonding of polymer actuator stack with the elastomeric lens membrane on a micro-machined silicon wafer. For a tunable micro-lens with 3 mm aperture, a tuning range in optical power between 0 and more than 15 dpt was achieved.}, language = {en} } @misc{HintschichPuegnerKnobbeetal., author = {Hintschich, Susanne and P{\"u}gner, Tino and Knobbe, Jens and Schr{\"o}der, Julia and Reinig, Peter and Gr{\"u}ger, Heinrich and Schenk, Harald}, title = {MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring}, series = {Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK}, journal = {Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK}, pages = {430 -- 434}, language = {en} } @misc{SandnerGrashoffGaumontetal., author = {Sandner, Thilo and Grashoff, Thomas and Gaumont, E. and Schenk, Harald and Kenda, Andreas}, title = {Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011115-1 -- 011115-14}, language = {en} } @misc{SchenkGrahmannSandneretal., author = {Schenk, Harald and Grahmann, Jan and Sandner, Thilo and Wagner, Michael and Dauderst{\"a}dt, Ulrike and Schmidt, Jan-Uwe}, title = {Micro mirrors for high-speed laser deflections and patterning}, series = {Physics Procedia}, volume = {56}, journal = {Physics Procedia}, issn = {1875-3892}, doi = {10.1016/j.phpro.2014.08.090}, pages = {7 -- 18}, language = {en} } @misc{ConradSchenkKaiseretal., author = {Conrad, Holger and Schenk, Harald and Kaiser, Bert and Langa, Sergiu and Gaudet, Matthieu and Schimmanz, Klaus and Stolz, Michael and Lenz, Miriam}, title = {A small-gap electrostatic micro-actuator for large deflections}, series = {Nature Communications}, journal = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, pages = {10078}, language = {en} } @inproceedings{BlehOstendorfMertenetal., author = {Bleh, D. and Ostendorf, Ralf and Merten, A. and Grahmann, Jan and Schenk, Harald and Kunzer, M. and Schmidt, R. and Wagner, J.}, title = {Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components}, series = {International Quantum Cascade Lasers School \& Workshop (IQCLSW), Policoro, Italy}, booktitle = {International Quantum Cascade Lasers School \& Workshop (IQCLSW), Policoro, Italy}, pages = {1 -- 2}, language = {en} } @misc{KendaKraftTortschanoffetal., author = {Kenda, Andreas and Kraft, Martin and Tortschanoff, Andreas and Scherf, Werner and Sandner, Thilo and Schenk, Harald and Luettjohann, Stephan and Simon, Apolline}, title = {Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives}, series = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, journal = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-038-9}, pages = {910102-1 -- 910102-10}, language = {en} } @inproceedings{WagnerOstendorfGrahmannetal., author = {Wagner, J. and Ostendorf, Ralf and Grahmann, Jan and Merten, A. and Hugger, S. and Jarvis, J.-P. and Fuchs, F. and Boscovic, D. and Schenk, Harald}, title = {Widely tunable quantum cascade lasers for spectroscopic sensing}, series = {Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States}, booktitle = {Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States}, editor = {Razeghi, Manijeh}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-460-8}, pages = {937012-1 -- 937012-6}, language = {en} } @misc{SickerHeberBerndtetal., author = {Sicker, Cornelius and Heber, J{\"o}rg and Berndt, Dirk and R{\"u}ckerl, Florian and Tinevez, Jean-Yves and Shorte, Spencer and Wagner, Michael and Schenk, Harald}, title = {Spatially resolved contrast measurement of diffractive micromirror arrays}, series = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, journal = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-465-3}, pages = {93750D-1 -- 93750D-10}, language = {en} } @incollection{SchenkHornbeck, author = {Schenk, Harald and Hornbeck, L. J.}, title = {Micro Mirrors}, series = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, booktitle = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, editor = {Waser, Rainer}, publisher = {Wiley-VCH-Verlag}, address = {Weinheim}, isbn = {978-3-527-40927-3}, pages = {985 -- 999}, language = {en} } @misc{KaiserGrashoffDrabeetal., author = {Kaiser, Bert and Grashoff, Thomas and Drabe, Christian and Conrad, Holger and Schenk, Harald}, title = {About stress in filled DRIE-trenches}, series = {Journal of Micromechanics and Microengineering (JMM)}, volume = {25}, journal = {Journal of Micromechanics and Microengineering (JMM)}, number = {8}, issn = {0960-1317}, pages = {8085003}, language = {en} } @misc{SchenkSandnerDrabeetal., author = {Schenk, Harald and Sandner, Thilo and Drabe, Christian and Klose, Thomas and Jung, Denis}, title = {Micromechanical device with tilted electrodes}, language = {en} } @misc{JungDrabeSchenketal., author = {Jung, Denis and Drabe, Christian and Schenk, Harald and Sandner, Thilo and Klose, Thomas and Wolter, Alexander}, title = {Method for generating a micromechanical structure}, language = {en} } @misc{SandnerSchenk, author = {Sandner, Thilo and Schenk, Harald}, title = {Optical device comprising a structure for avoiding reflections}, language = {en} } @misc{ConradSchenkSchirrmannetal., author = {Conrad, Holger and Schenk, Harald and Schirrmann, Christian and Zimmer, Fabian and Schmidt, Jan-Uwe and Sandner, Thilo}, title = {Micromechanical element}, language = {en} } @misc{KloseWolterSchenk, author = {Klose, Thomas and Wolter, Alexander and Schenk, Harald}, title = {Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use}, language = {en} } @misc{SchenkSandner, author = {Schenk, Harald and Sandner, Thilo}, title = {Mikromechanisches Bauelement mit erh{\"o}hter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same}, language = {de} } @misc{KolkovskyStuebnerLangaetal., author = {Kolkovsky, Vladimir and St{\"u}bner, R. and Langa, Sergiu and Wende, U. and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, series = {Solid-State Electronics}, volume = {123}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, pages = {89 -- 95}, language = {en} } @misc{ConradKaiserGaudetetal., author = {Conrad, Holger and Kaiser, Bert and Gaudet, Matthieu and Langa, Sergiu and Stolz, Michael and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {A novel electrostatic actuator class}, series = {Procedia Engineering}, volume = {168}, journal = {Procedia Engineering}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, pages = {1533 -- 1536}, language = {en} }