@misc{GrahmannMertenOstendorfetal., author = {Grahmann, Jan and Merten, Andr{\´e} and Ostendorf, Ralf and Fontenot, M. and Bleh, Daniela and Schenk, Harald and Wagner, Hans-Joachim}, title = {Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897708-1 -- 897708-11}, language = {en} } @misc{CostacheSchenkBornhorstetal., author = {Costache, Florenta Adriana and Schenk, Harald and Bornhorst, Kirstin and Schirrmann, Christian}, title = {Fluidic Variable Focal length optical Lens and Method of Manufacturing the same}, language = {en} } @misc{BorciaBestehornUhligetal., author = {Borcia, Rodica and Bestehorn, Michael and Uhlig, Sebastian and Gaudet, Matthieu and Schenk, Harald}, title = {Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach}, series = {Physical Review Fluids}, volume = {3}, journal = {Physical Review Fluids}, number = {8}, issn = {2469-990X}, doi = {10.1103/PhysRevFluids.3.084202}, abstract = {Two liquid pumps are investigated theoretically and numerically: a single thin liquid layer actuated by a periodic force at an elastic beam and a two-layer geometry actuated by an elastic beam. For the second geometry, the beam actuates the liquid from both sides. For both pumps, the liquid film thickness is small compared to the lateral characteristic length of the system. A lubrication theory is developed. The Euler-Bernoulli equation for transverse deformations of an elastic beam is coupled to the fundamental hydrodynamic equations: the Navier-Stokes equation and a continuity equation in the long-wave approximation. In this way, one connects the transverse displacement of the beam with the hydrodynamic quantities (pressure, velocity fields, and flow rates). Appropriate boundary conditions incorporate the function of the valves. The derivation of the theoretical model is followed by numerical simulations. We estimate flow rates (in two and three spatial dimensions) for different system parameters and we compute the efficiency of a well-designed liquid pump.}, language = {en} } @misc{SchenkSandner, author = {Schenk, Harald and Sandner, Thilo}, title = {Mikromechanisches Bauelement mit erh{\"o}hter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same}, language = {de} } @misc{ConradSchenkSchirrmannetal., author = {Conrad, Holger and Schenk, Harald and Schirrmann, Christian and Zimmer, Fabian and Schmidt, Jan-Uwe and Sandner, Thilo}, title = {Micromechanical element}, language = {en} } @inproceedings{SandnerGrashoffSchenketal., author = {Sandner, Thilo and Grashoff, Thomas and Schenk, Harald and Kenda, Andreas}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.909817}, pages = {82520C-1 -- 82520C-10}, language = {en} } @inproceedings{GrahmannWildenhainGrashoffetal., author = {Grahmann, Jan and Wildenhain, Michael and Grashoff, Thomas and Gerwig, Christian and Dallmann, Hans-Georg and Wolter, Alexander and Schenk, Harald}, title = {Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, number = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {825205-1 -- 825205-9}, language = {en} } @inproceedings{SchenkWagnerGrahmannetal., author = {Schenk, Harald and Wagner, Michael and Grahmann, Jan and Merten, Andr{\´e}}, title = {Advances in MOEMS technologies for high quality imaging systems}, series = {Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States}, booktitle = {Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States}, editor = {Kye, Jongwook and Owa, Soichi}, publisher = {SPIE}, address = {Bellingham, Washington}, isbn = {978-1-5106-1666-0}, doi = {10.1117/12.2297399}, abstract = {An overview of advances in MOEMS devices and technologies for high quality imaging systems is provided. A particular focus is laid on recent technological further developments possibly opening gateways to unprecedented device and system functionality by e. g.: increase of pixel count towards higher parallel operation, decrease of the mirror pitch in large arrays towards applications like high-performance holography, novel technologies for higher operation bandwidth, increase of aperture size for scanning applications like LIDAR, integration of high reflection coatings for processing of multi Watt laser radiation for marking and engraving, and phased arrays for high speed laser beam steering.}, language = {en} } @misc{GrahmannWagnerOstendorfetal., author = {Grahmann, Jan and Wagner, Hans-Joachim and Ostendorf, Ralf and Schenk, Harald and Rattunde, Marcel}, title = {MEMS basiertes Durchstimmen von Lasern}, language = {de} } @misc{SandnerSchenk, author = {Sandner, Thilo and Schenk, Harald}, title = {Optical device comprising a structure for avoiding reflections}, language = {en} } @incollection{SchenkHornbeck, author = {Schenk, Harald and Hornbeck, L. J.}, title = {Micro Mirrors}, series = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, booktitle = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, editor = {Waser, Rainer}, publisher = {Wiley-VCH-Verlag}, address = {Weinheim}, isbn = {978-3-527-40927-3}, pages = {985 -- 999}, language = {en} } @inproceedings{GruegerKnobbePuegneretal., author = {Gr{\"u}ger, Heinrich and Knobbe, Jens and P{\"u}gner, Tino and Schenk, Harald}, title = {Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2004215}, pages = {86160L-1 -- 86160L-13}, language = {en} } @misc{KurthKunathSchenk, author = {Kurth, Eberhard and Kunath, Christian and Schenk, Harald}, title = {Ion-sensitive structure and method of manufacturing the same}, language = {en} } @inproceedings{DrabeKallweitDreyhauptetal., author = {Drabe, Christian and Kallweit, David and Dreyhaupt, Andre and Grahmann, Jan and Schenk, Harald and Davis, Wyatt}, title = {Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.910203}, pages = {825209-1 -- 825209-10}, language = {en} } @misc{KloseWolterSchenk, author = {Klose, Thomas and Wolter, Alexander and Schenk, Harald}, title = {Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use}, language = {en} } @misc{SickerHeberBerndtetal., author = {Sicker, Cornelius and Heber, J{\"o}rg and Berndt, Dirk and R{\"u}ckerl, Florian and Tinevez, Jean-Yves and Shorte, Spencer and Wagner, Michael and Schenk, Harald}, title = {Spatially resolved contrast measurement of diffractive micromirror arrays}, series = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, journal = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-465-3}, pages = {93750D-1 -- 93750D-10}, language = {en} } @inproceedings{PuegnerKnobbeGruegeretal., author = {P{\"u}gner, Tino and Knobbe, Jens and Gr{\"u}ger, Heinrich and Schenk, Harald}, title = {Realization of a hybrid-integrated MEMS scanning grating spectrometer}, series = {SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland}, booktitle = {SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, pages = {83740W-1 -- 83740W-8}, language = {en} }