@inproceedings{SandnerGrashoffSchenketal., author = {Sandner, Thilo and Grashoff, Thomas and Schenk, Harald and Kenda, Andreas}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.909817}, pages = {82520C-1 -- 82520C-10}, language = {en} } @misc{SchenkSandner, author = {Schenk, Harald and Sandner, Thilo}, title = {Mikromechanisches Bauelement mit erh{\"o}hter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same}, language = {de} } @misc{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, Richard and Schenk, Harald}, title = {Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011114-1 -- 011114-10}, language = {en} } @misc{ConradSchenkSchirrmannetal., author = {Conrad, Holger and Schenk, Harald and Schirrmann, Christian and Zimmer, Fabian and Schmidt, Jan-Uwe and Sandner, Thilo}, title = {Micromechanical element}, language = {en} } @misc{SandnerSchenk, author = {Sandner, Thilo and Schenk, Harald}, title = {Optical device comprising a structure for avoiding reflections}, language = {en} } @inproceedings{TortschanoffBaumgartFranketal., author = {Tortschanoff, Andreas and Baumgart, M. and Frank, A. and Wildenhain, Michael and Sandner, Thilo and Schenk, Harald and Kenda, Andreas}, title = {Optical position feedback for electrostatically driven MOEMS-scanners}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520S-1 -- 82520S-8}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, R. and Schenk, Harald}, title = {Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897717-1 -- 897717-9}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Tulea, C. and Lenenbach, A. and Schenk, Harald}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, booktitle = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897705-1 -- 897705-11}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schenk, Harald and Tortschanoff, Andreas}, title = {Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-4799-1512-5}, pages = {861605-1 -- 861605-6}, language = {en} } @misc{SchenkGrahmannSandneretal., author = {Schenk, Harald and Grahmann, Jan and Sandner, Thilo and Wagner, Michael and Dauderst{\"a}dt, Ulrike and Schmidt, Jan-Uwe}, title = {Micro mirrors for high-speed laser deflections and patterning}, series = {Physics Procedia}, volume = {56}, journal = {Physics Procedia}, issn = {1875-3892}, doi = {10.1016/j.phpro.2014.08.090}, pages = {7 -- 18}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Schenk, Harald and Tulea, C. and Lenenbach, A.}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, booktitle = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-1512-5}, pages = {83 -- 84}, abstract = {We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.}, language = {en} } @inproceedings{JungSandnerKallweitetal., author = {Jung, Denis and Sandner, Thilo and Kallweit, David and Schenk, Harald}, title = {Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520U-1 -- 82520U-10}, language = {en} } @misc{SchenkSandnerDrabeetal., author = {Schenk, Harald and Sandner, Thilo and Drabe, Christian and Klose, Thomas and Jung, Denis}, title = {Micromechanical device with tilted electrodes}, language = {en} } @misc{SandnerGrashoffGaumontetal., author = {Sandner, Thilo and Grashoff, Thomas and Gaumont, E. and Schenk, Harald and Kenda, Andreas}, title = {Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011115-1 -- 011115-14}, language = {en} } @misc{JungDrabeSchenketal., author = {Jung, Denis and Drabe, Christian and Schenk, Harald and Sandner, Thilo and Klose, Thomas and Wolter, Alexander}, title = {Method for generating a micromechanical structure}, language = {en} } @misc{KendaKraftTortschanoffetal., author = {Kenda, Andreas and Kraft, Martin and Tortschanoff, Andreas and Scherf, Werner and Sandner, Thilo and Schenk, Harald and Luettjohann, Stephan and Simon, Apolline}, title = {Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives}, series = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, journal = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-038-9}, pages = {910102-1 -- 910102-10}, language = {en} }