@misc{ZschechGeislerRinderknechtetal., author = {Zschech, Ehrenfried and Geisler, Holm and Rinderknecht, Jochen and Schneider, Gerd and Spolenak, Ralph and Schmeißer, Dieter}, title = {Nano-scale analysis using synchrotron-radiation: Applications in the semiconductor industry}, series = {Current nanoscience}, volume = {4}, journal = {Current nanoscience}, number = {3}, issn = {1573-4137}, pages = {256 -- 266}, language = {en} }