@article{SchmeisserSeiboldReif, author = {Schmeißer, Dieter and Seibold, G{\"o}tz and Reif, J{\"u}rgen}, title = {Nano-scaled Dielectric Barriers (NanoDieB) for CMOS compatible Si-technologies}, series = {Forum der Forschung}, journal = {Forum der Forschung}, number = {19}, issn = {0947-6989}, pages = {131 -- 136}, language = {en} }