@misc{HayatRatzkeAlvaradoChavarinetal., author = {Hayat, Ahsan and Ratzke, Markus and Alvarado Chavarin, Carlos and Z{\"o}llner, Marvin Hartwig and Corley-Wiciak, Agnieszka Anna and Schubert, Markus Andreas and Wenger, Christian and Fischer, Inga Anita}, title = {Structural and morphological properties of CeO2 films deposited by radio frequency magnetron sputtering for back-end-of-line integration}, series = {Thin Solid Films}, volume = {807}, journal = {Thin Solid Films}, issn = {0040-6090}, doi = {10.1016/j.tsf.2024.140547}, pages = {3}, language = {en} } @misc{HayatSpiritoCorleyWiciaketal., author = {Hayat, Ahsan and Spirito, Davide and Corley-Wiciak, Agnieszka Anna and Schubert, Markus Andreas and Masood, Maria and Reichmann, Felix and Ratzke, Markus and Capellini, Giovanni and Fischer, Inga Anita}, title = {MBE-based growth of Sn-rich quantum wells and dots at low Sn deposition rates}, series = {Materials Science in Semiconductor Processing}, volume = {165}, journal = {Materials Science in Semiconductor Processing}, issn = {1873-4081}, doi = {10.1016/j.mssp.2023.107693}, language = {en} } @misc{KalraAlvaradoChavarinNitschetal., author = {Kalra, Amanpreet and Alvarado Chavarin, Carlos and Nitsch, Paul-Gregor and Tschammer, Rudi and Flege, Jan Ingo and Ratzke, Markus and Zoellner, Marvin Hartwig and Schubert, Markus Andreas and Wenger, Christian and Fischer, Inga Anita}, title = {Deposition of CeOₓ/SnOₓ-based thin films via RF magnetron sputtering for resistive gas sensing applications}, series = {Physica B, Condensed matter}, volume = {723}, journal = {Physica B, Condensed matter}, publisher = {Elsevier BV}, address = {Amsterdam}, issn = {0921-4526}, doi = {10.1016/j.physb.2025.418098}, pages = {1 -- 7}, abstract = {Cerium oxide-tin oxide (CeOx/SnOx) thin films with varying Sn content were deposited using RF magnetron sputtering and investigated for hydrogen sensing applications. Structural, compositional, and morphological properties were characterized using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy (EDX). Gas sensing measurements showed effective hydrogen detection at room temperature, with the sensitivity strongly influenced by Sn content and oxygen vacancy concentration. Higher Sn concentration enhanced the sensing response, which was correlated with microstructural features obtained from AFM and EDX, as well as with the presence of Ce3+ and Ce4+ oxidation states identified by XPS. This study highlights the potential of CeOx/SnOx thin films for possible back-end-of-line integration and provides proof-of-principle for room-temperature hydrogen sensing.}, language = {en} } @misc{MuellerGoryachkoBurkovetal., author = {M{\"u}ller, Klaus and Goryachko, Andriy and Burkov, Yevgen and Schwiertz, Carola and Ratzke, Markus and K{\"o}ble, J. and Reif, J{\"u}rgen and Schmeißer, Dieter}, title = {Scanning Kelvin Probe Microscopy and Photoemission electron microscopy of organic source-drain structures}, series = {Synthetic Metals}, volume = {146}, journal = {Synthetic Metals}, number = {3}, issn = {0379-6779}, pages = {377 -- 382}, abstract = {n order to optimize organic field effect transistors (OFETs), the characterisation of active-layer surfaces in terms of their roughness, chemical composition and distribution of surface potentials is important. We report on high-resolution microscopic mapping of organic source-drain structures with P3HT as the semiconductor by scanning Kelvin probe microscopy (SKPM) and photoemission electron microscopy (PEEM). It was shown that PEEM is able to characterise the surface morphology (roughness), the chemical homogeneity and the composition of organic structures. The two-dimensional mapping of surface potentials by SKPM with applied source-drain voltages is shown to be an important ingredient of OFETs failure mode analysis.}, language = {en} } @misc{RatzkeWolfframmKappaetal., author = {Ratzke, Markus and Wolfframm, Dirk and Kappa, Mathias and Kouteva-Arguirova, Simona and Reif, J{\"u}rgen}, title = {Pulsed laser deposition of HfO2 and Pr(x)O(y) high-k films on Si(100)}, series = {Applied Surface Science}, volume = {247}, journal = {Applied Surface Science}, number = {1-4}, issn = {0169-4332}, pages = {128 -- 133}, language = {en} } @misc{KappaRatzkeReif, author = {Kappa, Mathias and Ratzke, Markus and Reif, J{\"u}rgen}, title = {Pulsed laser deposition of hafnium oxide on silicon}, language = {en} } @inproceedings{LippertDabrowskiCostinaetal., author = {Lippert, Gunther and Dabrowski, Jarek Marek and Costina, Ioan and Lupina, Grzegorz and Ratzke, Markus and Zaumseil, Peter and M{\"u}ssig, Hans-Joachim}, title = {Morphology and Composition of Praseodymium Based High-k Materials and Their Relevance to Dielectric Properties of Thin-Films}, language = {en} } @misc{ReifCostacheVarlamovaetal., author = {Reif, J{\"u}rgen and Costache, Florenta Adriana and Varlamova, Olga and Jia, G. and Ratzke, Markus}, title = {Self-organized regular surface patterning by pulsed laser ablation}, series = {Physica Status Solidi C}, volume = {6}, journal = {Physica Status Solidi C}, number = {3}, issn = {1610-1634}, doi = {10.1002/pssc.200880719}, pages = {681 -- 686}, language = {de} } @misc{VarlamovaRatzkeReif, author = {Varlamova, Olga and Ratzke, Markus and Reif, J{\"u}rgen}, title = {Feedback Effect on the Self-Organized Nanostructures Formation on Silicon upon Femtosecond Laser Ablation}, series = {Solid State Phenomena}, volume = {156/158}, journal = {Solid State Phenomena}, issn = {1012-0394}, pages = {535 -- 540}, language = {en} } @article{ReifRatzkeVarlamovaetal., author = {Reif, J{\"u}rgen and Ratzke, Markus and Varlamova, Olga and Costache, Florenta Adriana}, title = {Electrical Properties of Laser-Ablation-Initiated Self-Organized Nanostructures on Silicon Surface}, doi = {10.1016/j.mseb.2006.07.030}, language = {en} } @inproceedings{RatzkeKappaWolfframmetal., author = {Ratzke, Markus and Kappa, Mathias and Wolfframm, Dirk and Kouteva-Arguirova, Simona and Reif, J{\"u}rgen}, title = {PLD of high-k dielectric films on silicon}, series = {Fifth International Symposium on Laser Precision Microfabrication, 11 - 14 May 2004, Nara, Japan}, booktitle = {Fifth International Symposium on Laser Precision Microfabrication, 11 - 14 May 2004, Nara, Japan}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {0-8194-5623-3}, pages = {406 -- 411}, language = {en} } @misc{RatzkeWolfframmArguirovetal., author = {Ratzke, Markus and Wolfframm, Dirk and Arguirov, Tzanimir V. and Kappa, Mathias and Reif, J{\"u}rgen}, title = {Pulsed laser deposition of Praseodymium Oxide films on Silicon (100)}, series = {Applied Physics / A}, volume = {79}, journal = {Applied Physics / A}, number = {4-6}, issn = {0947-8396}, pages = {1247 -- 1249}, language = {en} } @article{WolfframmRatzkeKappaetal., author = {Wolfframm, Dirk and Ratzke, Markus and Kappa, Mathias and Montenegro, M. J. and D{\"o}beli, M. and Lippert, Th. and Reif, J{\"u}rgen}, title = {Pulsed Laser Deposition of Thin PrxOx Films on Si(100)}, series = {Materials Science and Engineering B}, volume = {109}, journal = {Materials Science and Engineering B}, number = {1-3}, issn = {0921-5107}, pages = {24 -- 29}, language = {en} } @misc{ReifVarlamovaRatzkeetal., author = {Reif, J{\"u}rgen and Varlamova, Olga and Ratzke, Markus and Schade, Martin and Leipner, Hartmut S. and Arguirov, Tzanimir V.}, title = {Multipulse feedback in self-organized ripples formation upon femtosecond laser ablation from silicon}, series = {Applied Physics A}, volume = {101}, journal = {Applied Physics A}, number = {2}, issn = {0947-8396}, doi = {10.1007/s00339-010-5830-x}, pages = {361 -- 365}, language = {en} } @article{RatzkeYangReif, author = {Ratzke, Markus and Yang, B. and Reif, J{\"u}rgen}, title = {Fixed charge densitiy distribution on pulsed laser deposited high-k oxide layers}, language = {en} } @article{RatzkeYuVyvenkoetal., author = {Ratzke, Markus and Yu, Xuegong and Vyvenko, Oleg F. and Reif, J{\"u}rgen and Kittler, Martin and Reiche, Manfred}, title = {Scanning Probe studies of the electrical activity at interfaces formed by silicon wafer direct bonding}, series = {Physica Status Solidi C}, volume = {4}, journal = {Physica Status Solidi C}, number = {8}, issn = {1610-1634}, pages = {2893 -- 3897}, language = {en} } @article{RatzkeReif, author = {Ratzke, Markus and Reif, J{\"u}rgen}, title = {On the reliability of scanning probe based electrostatic force measurements}, language = {en} } @article{VarlamovaCostacheRatzkeetal., author = {Varlamova, Olga and Costache, Florenta Adriana and Ratzke, Markus and Reif, J{\"u}rgen}, title = {Control parameters in pattern formation upon femtosecond laser ablation}, language = {en} } @misc{SchmidMankovicsArguirovetal., author = {Schmid, Reiner P. and Mankovics, Daniel and Arguirov, Tzanimir V. and Ratzke, Markus and Mtchedlidze, T. and Kittler, Martin}, title = {Rapid dislocation-related D1-photoluminescence imaging of multicrystalline Si wafers at room temperature}, series = {Physica Status Solidi : A}, volume = {208}, journal = {Physica Status Solidi : A}, number = {4}, issn = {1610-1642}, doi = {10.1002/pssa.201026269}, pages = {888 -- 892}, language = {en} } @misc{YuArguirovKittleretal., author = {Yu, Xuegong and Arguirov, Tzanimir V. and Kittler, Martin and Seifert, Winfried and Ratzke, Markus and Reiche, Manfred}, title = {Properties of dislocation networks formed by Si wafer direct bonding}, series = {Materials Science in Semiconductor Processing}, volume = {9}, journal = {Materials Science in Semiconductor Processing}, number = {1-3}, doi = {10.1016/j.mssp.2006.01.070}, pages = {96 -- 101}, language = {en} } @misc{LippertDabrowskiOberbecketal., author = {Lippert, Gunther and Dabrowski, Jarek Marek and Oberbeck, Lars and Schroeder, Uwe and Costina, Ioan and Lupina, Grzegorz and Ratzke, Markus and Zaumseil, Peter and M{\"u}ssig, Hans-Joachim}, title = {Morphology and composition of selected high-k materials and their relevance to dielectric properties of thin films}, series = {Journal of the electrochemical society}, volume = {155}, journal = {Journal of the electrochemical society}, number = {5}, issn = {1945-7111}, doi = {10.1149/1.2875741}, pages = {G97 -- G114}, language = {en} } @misc{KlossekMankovicsArguirovetal., author = {Klossek, Andre and Mankovics, Daniel and Arguirov, Tzanimir V. and Ratzke, Markus and Kirner, Simon and Friedrich, Felice and Gabriel, Onno and Stannowski, Bernd and Schlatmann, Rutger and Kittler, Martin}, title = {Growth process of microcrystalline silicon studied by combined photoluminsescence and Raman investigations}, series = {Journal of applied physics}, volume = {114}, journal = {Journal of applied physics}, issn = {1520-8850}, doi = {10.1063/1.4838058}, pages = {223511}, language = {en} } @misc{ReifVarlamovaRatzkeetal., author = {Reif, J{\"u}rgen and Varlamova, Olga and Ratzke, Markus and Uhlig, Sebastian}, title = {Laser-Induced Periodic Surface Structures of Thin Complex Multi-Component Films}, series = {Applied Physics / A}, volume = {122}, journal = {Applied Physics / A}, number = {4}, issn = {1432-0630}, doi = {10.1007/s00339-016-9936-7}, pages = {1 -- 6}, language = {en} }