@misc{HayatRatzkeAlvaradoChavarinetal., author = {Hayat, Ahsan and Ratzke, Markus and Alvarado Chavarin, Carlos and Z{\"o}llner, Marvin Hartwig and Corley-Wiciak, Agnieszka Anna and Schubert, Markus Andreas and Wenger, Christian and Fischer, Inga Anita}, title = {Structural and morphological properties of CeO2 films deposited by radio frequency magnetron sputtering for back-end-of-line integration}, series = {Thin Solid Films}, volume = {807}, journal = {Thin Solid Films}, issn = {0040-6090}, doi = {10.1016/j.tsf.2024.140547}, pages = {3}, language = {en} } @misc{HayatSpiritoCorleyWiciaketal., author = {Hayat, Ahsan and Spirito, Davide and Corley-Wiciak, Agnieszka Anna and Schubert, Markus Andreas and Masood, Maria and Reichmann, Felix and Ratzke, Markus and Capellini, Giovanni and Fischer, Inga Anita}, title = {MBE-based growth of Sn-rich quantum wells and dots at low Sn deposition rates}, series = {Materials Science in Semiconductor Processing}, volume = {165}, journal = {Materials Science in Semiconductor Processing}, issn = {1873-4081}, doi = {10.1016/j.mssp.2023.107693}, language = {en} } @misc{KalraAlvaradoChavarinNitschetal., author = {Kalra, Amanpreet and Alvarado Chavarin, Carlos and Nitsch, Paul-Gregor and Tschammer, Rudi and Flege, Jan Ingo and Ratzke, Markus and Zoellner, Marvin Hartwig and Schubert, Markus Andreas and Wenger, Christian and Fischer, Inga Anita}, title = {Deposition of CeOₓ/SnOₓ-based thin films via RF magnetron sputtering for resistive gas sensing applications}, series = {Physica B, Condensed matter}, volume = {723}, journal = {Physica B, Condensed matter}, publisher = {Elsevier BV}, address = {Amsterdam}, issn = {0921-4526}, doi = {10.1016/j.physb.2025.418098}, pages = {1 -- 7}, abstract = {Cerium oxide-tin oxide (CeOx/SnOx) thin films with varying Sn content were deposited using RF magnetron sputtering and investigated for hydrogen sensing applications. Structural, compositional, and morphological properties were characterized using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy (EDX). Gas sensing measurements showed effective hydrogen detection at room temperature, with the sensitivity strongly influenced by Sn content and oxygen vacancy concentration. Higher Sn concentration enhanced the sensing response, which was correlated with microstructural features obtained from AFM and EDX, as well as with the presence of Ce3+ and Ce4+ oxidation states identified by XPS. This study highlights the potential of CeOx/SnOx thin films for possible back-end-of-line integration and provides proof-of-principle for room-temperature hydrogen sensing.}, language = {en} } @misc{RatzkeWolfframmKappaetal., author = {Ratzke, Markus and Wolfframm, Dirk and Kappa, Mathias and Kouteva-Arguirova, Simona and Reif, J{\"u}rgen}, title = {Pulsed laser deposition of HfO2 and Pr(x)O(y) high-k films on Si(100)}, series = {Applied Surface Science}, volume = {247}, journal = {Applied Surface Science}, number = {1-4}, issn = {0169-4332}, pages = {128 -- 133}, language = {en} } @misc{KappaRatzkeReif, author = {Kappa, Mathias and Ratzke, Markus and Reif, J{\"u}rgen}, title = {Pulsed laser deposition of hafnium oxide on silicon}, language = {en} } @inproceedings{LippertDabrowskiCostinaetal., author = {Lippert, Gunther and Dabrowski, Jarek Marek and Costina, Ioan and Lupina, Grzegorz and Ratzke, Markus and Zaumseil, Peter and M{\"u}ssig, Hans-Joachim}, title = {Morphology and Composition of Praseodymium Based High-k Materials and Their Relevance to Dielectric Properties of Thin-Films}, language = {en} } @misc{ReifCostacheVarlamovaetal., author = {Reif, J{\"u}rgen and Costache, Florenta Adriana and Varlamova, Olga and Jia, G. and Ratzke, Markus}, title = {Self-organized regular surface patterning by pulsed laser ablation}, series = {Physica Status Solidi C}, volume = {6}, journal = {Physica Status Solidi C}, number = {3}, issn = {1610-1634}, doi = {10.1002/pssc.200880719}, pages = {681 -- 686}, language = {de} } @misc{VarlamovaRatzkeReif, author = {Varlamova, Olga and Ratzke, Markus and Reif, J{\"u}rgen}, title = {Feedback Effect on the Self-Organized Nanostructures Formation on Silicon upon Femtosecond Laser Ablation}, series = {Solid State Phenomena}, volume = {156/158}, journal = {Solid State Phenomena}, issn = {1012-0394}, pages = {535 -- 540}, language = {en} } @article{ReifRatzkeVarlamovaetal., author = {Reif, J{\"u}rgen and Ratzke, Markus and Varlamova, Olga and Costache, Florenta Adriana}, title = {Electrical Properties of Laser-Ablation-Initiated Self-Organized Nanostructures on Silicon Surface}, doi = {10.1016/j.mseb.2006.07.030}, language = {en} } @inproceedings{RatzkeKappaWolfframmetal., author = {Ratzke, Markus and Kappa, Mathias and Wolfframm, Dirk and Kouteva-Arguirova, Simona and Reif, J{\"u}rgen}, title = {PLD of high-k dielectric films on silicon}, series = {Fifth International Symposium on Laser Precision Microfabrication, 11 - 14 May 2004, Nara, Japan}, booktitle = {Fifth International Symposium on Laser Precision Microfabrication, 11 - 14 May 2004, Nara, Japan}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {0-8194-5623-3}, pages = {406 -- 411}, language = {en} }