@misc{MoralesPlateMarthetal., author = {Morales, Carlos and Plate, Paul and Marth, Ludwig and Naumann, Franziska and Kot, Małgorzata and Janowitz, Christoph and Kus, Peter and Z{\"o}llner, Marvin Hartwig and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Bottom-up design of a supercycle recipe for atomic layer deposition of tunable Indium Gallium Zinc Oxide thin films}, series = {ACS Applied Electronic Materials}, volume = {6}, journal = {ACS Applied Electronic Materials}, number = {8}, publisher = {American Chemical Society (ACS)}, issn = {2637-6113}, doi = {10.1021/acsaelm.4c00730}, pages = {5694 -- 5704}, abstract = {We present a successful bottom-up approach to design a generic plasma-enhanced atomic layer deposition (PEALD) supercycle recipe to grow high-quality indium gallium zinc oxide (IGZO) thin films with tunable composition at a relatively low temperature of 150 °C. In situ real-time ellipsometric characterization in combination with ex situ complementary techniques has been used to optimize the deposition process and quality of the films by identifying and solving growth challenges such as degree of oxidation, nucleation delays, or elemental composition. The developed supercycle approach enables facile control of the target composition by adapting the subcycle ratios within the supercycle process. Compared to other low-temperature deposition techniques resulting in amorphous films, our PEALD-IGZO process at 150 °C results in nearly amorphous, nanocrystalline films. The preparation of IGZO films at low temperature by a supercycle PEALD approach allows controlling the thickness, composition, and electrical properties while preventing thermally induced segregation.}, language = {en} }