@misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @inproceedings{SzeremleyMussenbrockBrinkmannetal., author = {Szeremley, Daniel and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Eremin, Denis and Mitschker, Felix and Steves, Simon and Awakowicz, Peter and Kushner, Mark}, title = {Numerical simulations of a microwave driven low pressure plasma}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534377}, language = {en} } @misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{BrinkmannOberrathAwakowiczetal., author = {Brinkmann, Ralf Peter and Oberrath, Jens and Awakowicz, Peter and Lapke, Martin and Musch, Thomas and Mussenbrock, Thomas and Rolfes, Ilona and Schulz, Christian and Storch, Robert and Styrnoll, Tim and Zietz, Christian}, title = {Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma}, language = {en} } @misc{DakshaDerzsiWilczeketal., author = {Daksha, Manaswi and Derzsi, Aranka and Wilczek, Sebastian and Trieschmann, Jan and Mussenbrock, Thomas and Awakowicz, Peter and Donk{\´o}, Zolt{\´a}n and Schulze, Julian}, title = {The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs}, series = {Plasma Sources Science and Technology}, volume = {26}, journal = {Plasma Sources Science and Technology}, number = {8}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa7c88}, pages = {085006}, language = {en} } @misc{BergerSteinbergerSchuengeletal., author = {Berger, Birk and Steinberger, Thomas and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase}, series = {Applied Physics Letters}, volume = {111}, journal = {Applied Physics Letters}, number = {20}, issn = {1077-3118}, doi = {10.1063/1.5000144}, pages = {5}, language = {en} } @misc{TrieschmannRiesBibinovetal., author = {Trieschmann, Jan and Ries, Stefan and Bibinov, Nikita and Awakowicz, Peter and Mr{\´a}z, Stanislav and Schneider, Jochen M. and Mussenbrock, Thomas}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {5}, doi = {10.1088/1361-6595/aac23e}, pages = {14}, language = {en} } @misc{BergerYouLeeetal., author = {Berger, Birk and You, Kwangho and Lee, Hyo-Chang and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {12}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaefc7}, pages = {5}, language = {en} }