@inproceedings{MuellerWahlichKrottenthaler, author = {M{\"u}ller, T. and Wahlich, R. and Krottenthaler, P.}, title = {Modelling and experimental verification of the 300mm Ar Anneal Process}, language = {en} } @article{MuellerWahlichKrottenthaler, author = {M{\"u}ller, T. and Wahlich, R. and Krottenthaler, P.}, title = {Modeling and experimental verification of the 300mm Ar anneal process}, language = {en} }