@phdthesis{Kahle, author = {Kahle, Olaf}, title = {Einsatzm{\"o}glichkeiten und Grenzen der temperaturvariablen Ellipsometrie zur thermophysikalischen Charakterisierung polymerer Schichten}, publisher = {Brandenburgische Techn. Univ.}, address = {Cottbus}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-000000266}, language = {de} } @inproceedings{KahleUhligBauer, author = {Kahle, Olaf and Uhlig, C. and Bauer, Monika}, title = {VTE - A new Method for Characterisation of Thin Film Properties}, series = {Proceedings presented at POLYTRONIC 2001, Potsdam, Germany, October 21 - 24, 2001}, booktitle = {Proceedings presented at POLYTRONIC 2001, Potsdam, Germany, October 21 - 24, 2001}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {0-7803-7220-4}, language = {en} } @inproceedings{UhligKahleWienekeetal., author = {Uhlig, C. and Kahle, Olaf and Wieneke, B. and Bauer, Monika and Keller, J{\"u}rgen}, title = {Optical Crack Tracing : a New Method for the Automatic Determination of Fracture Toughness for Crack Initiation and Propagation}, series = {Proceedings, MICROMAT 2000, April 17-19, 2000, Berlin, Germany}, booktitle = {Proceedings, MICROMAT 2000, April 17-19, 2000, Berlin, Germany}, publisher = {ddp goldenbogen}, address = {Dresden}, isbn = {3-932434-15-3}, pages = {618 -- 629}, language = {en} } @article{SchulzeSchuldtKahleetal., author = {Schulze, Knut and Schuldt, U. and Kahle, Olaf and Schulz, Stefan E. and Uhlig, M.}, title = {Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization}, doi = {10.1016/j.mee.2005.07.016}, language = {en} } @misc{UhligKahleBauer, author = {Uhlig, C. and Kahle, Olaf and Bauer, Monika}, title = {Toughening of Reactive Resins by Phase Separation and by Particles and Measuring Fracture Toughness by Optical Crack Tracing}, series = {Micromaterials and Nanomaterials}, journal = {Micromaterials and Nanomaterials}, number = {4}, issn = {1619-2486}, pages = {S. 60}, language = {en} } @inproceedings{BauerDreyerKahleetal., author = {Bauer, Monika and Dreyer, Christian and Kahle, Olaf and Schuldt, U. and Uhlig, C. and Schulze, K. and Schulz, Stefan E. and Uhlig, M. and Geßner, Thomas}, title = {Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization}, language = {en} } @article{KahleBauer, author = {Kahle, Olaf and Bauer, Monika}, title = {Von der Ellipsometrie zur Nano-TMA/TGA/DVS: Methode und Anwendungen}, language = {de} } @article{KahleUhligBauer, author = {Kahle, Olaf and Uhlig, C. and Bauer, Monika}, title = {Thermophysical Characterisation of Sub-\%B5m Polymer Layers by Nano-TMA/TGA/DVS}, language = {en} } @article{KahleUhligBauer, author = {Kahle, Olaf and Uhlig, C. and Bauer, Monika}, title = {The Advancement of Ellipsometry to the Nano-TMA/TGA/DVS - Method and Applications}, language = {en} } @inproceedings{KahleUhligBauer, author = {Kahle, Olaf and Uhlig, C. and Bauer, Monika}, title = {Die Weiterentwicklung der Ellipsometrie zur Nano-TMA/TGA/DVS - Methode und Anwendungen}, series = {NanoScience 2007, Lichtenwalde, 18.-20.10.2007}, booktitle = {NanoScience 2007, Lichtenwalde, 18.-20.10.2007}, publisher = {Fraunhofer-Inst. IZM, Micro Materials Center [u.a.]}, address = {Berlin}, pages = {S. 21}, language = {de} }